Silicon chip having multi-zone through silicon vias and method of manufacturing the same

A microfluidic device, comprising:

• at least one substrate having a first surface and a second surface, the first surface spaced from the second surface along a transverse direction, the at least one substrate comprising:
• at least one first inlet configured to receive a continuous phase fluid;
• at least one second inlet configured to receive a dispersed phase fluid;
• a plurality of droplet generators configured to produce micro-droplets from the continuous phase fluid and the dispersed phase fluid;
• a plurality of delivery channels in fluid communication with the at least one first inlet and with the at least one second inlet, wherein the plurality of delivery channels are offset from the plurality of droplet generators with respect to the transverse direction, each delivery channel of the plurality of delivery channels having a first cross-sectional dimension along a first plane perpendicular to the transverse direction;
• a plurality of trenches extending from the plurality of delivery channels towards the plurality of droplet generators along the transverse direction, each trench of the plurality of trenches having a second cross-sectional dimension along a second plane perpendicular to the transverse direction, wherein the second cross-sectional dimension is smaller than the first cross-sectional dimension;
• a plurality of vias extending from the plurality of trenches to the plurality of droplet generators along the transverse direction so as to fluidly connect the plurality of delivery channels and the plurality of the droplet generators;
• and
• at least one outlet configured to output the micro-droplets from the at least one outlet.