# US 12,193,334 B2 · Manufacturing techniques and devices using dielectric elastomers

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- Number: US 12,193,334 B2
- Document ID: US12193334B2
- Status: Granted
- Kind: B2
- Application number: 16/087,431
- Filed: 2017-03-20
- Published: 2019-04-04
- Granted: 2025-01-07
- Earliest claimed: 2016-03-21
- Assignees: President and Fellows of Harvard College
- Applicants: President and Fellows of Harvard College
- Inventors: Mihai Duduta; David Clarke; Robert J. Wood
- Web page: https://patentgrep.com/patent/US12193334B2

## CPC

- H10N 30/857: Macromolecular compositions
- C08G 59/18: Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups {; e.g. general methods of curing}
- C08G 59/22: Di-epoxy compounds
- C08K 3/013: Fillers, pigments or reinforcing additives
- C08L 33/08: Homopolymers or copolymers of acrylic acid esters
- C08L 75/04: Polyurethanes
- C08L 83/04: Polysiloxanes
- H01B 1/24: the conductive material comprising carbon-silicon compounds, carbon or silicon
- H10N 30/04: Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N 30/05: Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N 30/067: Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
- H10N 30/098: Forming organic materials
- H10N 30/50: having a stacked or multilayer structure
- H10N 30/871: {Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes}
- H10N 30/878: {the principal material being non-metallic, e.g. oxide or carbon based}
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- B82Y 40/00: Manufacture or treatment of nanostructures
- C08K 2201/001: Conductive additives
- C08L 2203/20: use in electrical or conductive gadgets
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- C08G: MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08K: Use of inorganic or non-macromolecular organic substances as compounding ingredients (paints, inks, varnishes, dyes, polishes, adhesives C09)
- C08L: COMPOSITIONS OF MACROMOLECULAR COMPOUNDS (compositions based on polymerisable monomers C08F, C08G; artificial filaments or fibres D01F; textile treating compositions D06)
- H01B: CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES (selection for magnetic properties H01F1/00; waveguides H01P {; printed circuits H05K})
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

In some embodiments, a dielectric elastomer device may include at least first and second dielectric elastomer layers, and a first layer of conductive particles disposed between the first and second dielectric elastomer layers and forming a first electrode of the device, wherein portions of the second dielectric elastomer layer are directly bonded with portions of the first dielectric elastomer layer through the first layer of the conductive particles. The dielectric elastomer layer may, for example, comprise a cured acrylic elastomer precursor with an additive including urethane, polybutadiene, or silicone. Electrodes in different layers may be interconnected by infusing a liquid or semi-liquid conductive material in contact with each of a plurality of the electrodes of the actuator or sensor device, and solidifying the conductive material to form a conductive path that interconnects the plurality of electrodes.

## Claims

### Claim 1

A method of making a dielectric elastomer device, comprising:
depositing conductive particles on a first dielectric elastomer layer to form a first electrode of the dielectric elastomer device;
applying a liquid elastomer over the conductive particles and the first dielectric elastomer layer so that a portion of the liquid elastomer permeates the first electrode, wherein the portion of the liquid elastomer that permeates the first electrode contacts portions of the first dielectric elastomer layer that are positioned under the first electrode; and
at least partially curing the liquid elastomer to form a second dielectric elastomer layer that is directly bonded with the contacted portions of the first dielectric elastomer layer.

### Claim 2 (depends on 1)

The method of claim 1, wherein the second dielectric elastomer layer is polymerized with the contacted portions of the first dielectric elastomer layer when the applied liquid elastomer is at least partially cured.

### Claim 3 (depends on 1)

The method of claim 1, wherein the first dielectric elastomer layer and the liquid elastomer each comprises an acrylic elastomer.

### Claim 4 (depends on 1)

The method of claim 1, wherein the first dielectric elastomer layer and the liquid elastomer each comprises a silicone elastomer.

### Claim 5 (depends on 1)

The method of claim 1, wherein the first dielectric elastomer layer and the liquid elastomer each comprises a urethane elastomer.

### Claim 6 (depends on 1)

The method of claim 1, wherein the conductive particles comprise nanoscale conductors.

### Claim 7 (depends on 1)

The method of claim 1, wherein the conductive particles comprise conductive fibers.

### Claim 8 (depends on 7)

The method of claim 7, wherein the conductive fibers comprise carbon nanotubes.

### Claim 9 (depends on 7)

The method of claim 7, wherein the conductive fibers comprise silver nanowires.

### Claim 10 (depends on 1)

The method of claim 1, wherein the conductive particles comprise graphene.

### Claim 11 (depends on 1)

The method of claim 1, wherein the second dielectric elastomer layer comprises a top surface and a bottom surface, the bottom surface being directly bonded with the contacted portions of the first dielectric elastomer layer, and wherein the method further comprises:
depositing additional conductive particles on the top surface of the second dielectric elastomer layer to form a second electrode of the dielectric elastomer device;
applying an additional liquid elastomer over the additional conductive particles and the second dielectric elastomer layer so that the additional liquid elastomer covers the additional conductive particles and contacts portions of the top surface of the second dielectric elastomer layer; and
at least partially curing the additional liquid elastomer to form a third dielectric elastomer layer that is directly bonded with the contacted portions of the top surface of the second dielectric elastomer layer.

### Claim 12 (depends on 1)

The method of claim 1, wherein the dielectric elastomer device comprises a dielectric elastomer actuator or sensor.

### Claim 13

A dielectric elastomer device, comprising:
at least first and second dielectric elastomer layers; and
a first layer of conductive particles disposed between the first and second dielectric elastomer layers and forming a first electrode of the dielectric elastomer device;
wherein portions of the second dielectric elastomer layer permeate the first electrode, and wherein the portions of the second dielectric elastomer layer that permeate the first electrode are directly bonded with portions of the first dielectric elastomer layer that are positioned under the first electrode.

### Claim 14 (depends on 13)

The dielectric elastomer device of claim 13, wherein the portions of the second dielectric elastomer layer are polymerized with the portions of the first dielectric elastomer layer through the first layer of conductive particles.

### Claim 15 (depends on 13)

The dielectric elastomer device of claim 13, wherein the first and second dielectric elastomer layers each comprises an acrylic elastomer.

### Claim 16 (depends on 13)

The dielectric elastomer device of claim 13, wherein the first and second dielectric elastomer layers each comprises a silicone elastomer.

### Claim 17 (depends on 13)

The dielectric elastomer device of claim 13, wherein the first and second dielectric elastomer layers each comprises a urethane elastomer.

### Claim 18 (depends on 13)

The dielectric elastomer device of claim 13, wherein the conductive particles comprise nanoscale conductors.

### Claim 19 (depends on 13)

The dielectric elastomer device of claim 13, wherein the conductive particles comprise conductive fibers.