Method of manufacturing piezoelectric ceramics, piezoelectric ceramics, piezoelectric element, ultrasonic motor, optical apparatus, dust removing device, image pickup apparatus, ultrasonic probe, ultrasonic diagnostic apparatus, and electronic apparatus

Abstract

Provided are a piezoelectric ceramics which does not contain lead, has small temperature dependence of a piezoelectric constant within an operating temperature range, and has high density, a high mechanical quality factor, a satisfactory piezoelectric constant, and a small surface roughness, and a method of manufacturing the piezoelectric ceramics. The method of manufacturing a piezoelectric ceramics is characterized by including: sintering a compact containing a raw material at 1,000° C. or more to obtain a sintered compact; abrading the sintered compact; and annealing the abraded sintered compact at a temperature of 800° C. or more and less than 1,000° C.

Dependencies are inferred from the claim text.