# US 12,193,201 B2 · Mini-channel cold plate with three-dimensional adaptive flow-path using bi-metal fins

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- Number: US 12,193,201 B2
- Document ID: US12193201B2
- Status: Granted
- Kind: B2
- Application number: 17/847,769
- Filed: 2022-06-23
- Published: 2023-12-28
- Granted: 2025-01-07
- Earliest claimed: 2022-06-23
- Assignees: Hamilton Sundstrand Corporation
- Applicants: Hamilton Sundstrand Corporation
- Inventors: Jin Lee; Yongduk Lee; Parag M. Kshirsagar
- Web page: https://patentgrep.com/patent/US12193201B2

## CPC

- H05K 7/20927: {Liquid coolant without phase change}
- H10W 40/47: by flowing liquids, e.g. forced water cooling
- H05K 7/20409: {Outer radiating structures on heat dissipating housings, e.g. fins integrated with the housing}
- H10W 40/226: {characterised by projecting parts, e.g. fins to increase surface area (leadframes for cooling H10W70/461)}
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

The present disclosure provides for cooling systems, assemblies and methods (e.g., for semiconductor devices; for refrigerant cooling; for cryogenic cooling). More particularly, the present disclosure provides for mini-channel cold plate cooling assemblies, systems and methods for semiconductor devices (e.g., wide-bandgap (WBG) power semiconductor devices), with the cooling assemblies, systems and methods utilizing three-dimensional adaptive flow-paths using bi-metal fins. The present disclosure provides for mini-channel cold plate cooling assemblies, systems and methods that may improve cooling performance and/or enable local cooling control. The present disclosure provides for bi-metal strips that operate as both the surface-temperature sensors and actuators without input energy. The bi-metal strips guide the coolant flow to a low-drag channel when the surface temperature is low, and guide the coolant flow to the near-surface channel when the surface temperature is high.

## Claims

### Claim 1

A cooling assembly comprising:
a cold plate top wall attached to a first cold plate side wall and a second cold plate side wall, the first cold plate side wall attached to a cold plate bottom wall and including a coolant inlet, and the second cold plate side wall attached to the cold plate bottom wall and including a coolant outlet;
a substrate positioned on the cold plate top wall, the substrate having a plurality of semiconductor devices positioned on the substrate;
a plurality of bi-metal fins extending from the cold plate top wall towards the cold plate bottom wall;
wherein heat from a semiconductor device of the plurality of semiconductor devices causes a coolant introduced between the cold plate top wall and the cold plate bottom wall to raise temperature of the coolant, which causes a bi-metal fin positioned proximal to the heated semiconductor device to deform and change a flow path of the coolant from the coolant inlet to the coolant outlet; and
a plurality of wall extensions extending from the cold plate bottom wall towards the cold plate top wall, the plurality of wall extensions defining a plurality of lower channels for the coolant; and
wherein each bi-metal fin of the plurality of bi-metal fins includes a side wall portion and a bottom wall portion, with each bi-metal fin extending from the cold plate top wall to define a plurality of adjustable upper channels for the coolant.

### Claim 2 (depends on 1)

The assembly of claim 1, wherein each bi-metal fin of the plurality of bi-metal fins includes a first metal material and a second metal material, the first metal material different than the second metal material.

### Claim 3 (depends on 1)

The assembly of claim 1, wherein the plurality of semiconductor devices comprises wide-bandgap power semiconductor devices.

### Claim 4 (depends on 1)

The assembly of claim 1, wherein the cold plate top wall, the cold plate bottom wall, the first cold plate side wall and the second cold plate side wall are fabricated from aluminum.

### Claim 5 (depends on 1)

The assembly of claim 1, wherein the substrate is a printed circuit board or a ceramic plate.

### Claim 6 (depends on 1)

The assembly of claim 1, wherein when the cold plate top wall temperature increases at a specific area of the cold plate top wall via a heated semiconductor device, the bottom wall portion of each respective bi-metal fin proximal to the heated area of the cold plate top wall bends down toward the cold plate bottom wall and increases cross-sectional areas of the respective upper channels, thereby increasing the amount of the coolant through the respective upper channels.

### Claim 7 (depends on 1)

The assembly of claim 1, wherein when the cold plate top wall temperature cools and decreases at a specific area of the cold plate top wall, the bottom wall portion of each respective bi-metal fin proximal to the cooled area of the cold plate top wall bends up toward the cold plate top wall and decreases cross-sectional areas of the respective upper channels, thereby decreasing the amount of the coolant through the respective upper channels.

### Claim 8 (depends on 1)

The assembly of claim 1, wherein when the cold plate top wall is at a neutral temperature of about 20° C., the plurality of bi-metal fins are in a neutral position, and each bottom wall portion of each bi-metal fin is substantially planar or horizontal.

### Claim 9 (depends on 1)

The assembly of claim 1, wherein each bi-metal fin includes a first section of a first metal material, a first section of a second metal material, a second section of the first metal material, and a second section of the second metal material; and
wherein the first section of the first metal material is secured to the first section of the second metal material, and the second section of the first metal material is secured to the second section of the second metal material.

### Claim 10 (depends on 9)

The assembly of claim 9, wherein when the cold plate top wall temperature increases at a specific area of the cold plate top wall via a heated semiconductor device, the first section of the first metal material and the first section of the second metal material of each respective bi-metal fin proximal to the heated area of the cold plate top wall are curved, and the second section of the first metal material and the second section of the second metal material of each respective bi-metal fin proximal to the heated area of the cold plate top wall are curved, thereby forming an elongated O-shaped gap in a middle area between the first section of the second metal material and the second section of the second metal material.

### Claim 11 (depends on 10)

The assembly of claim 10, wherein each elongated O-shaped gap increases the amount of the coolant through each elongated O-shaped gap.

### Claim 12 (depends on 9)

The assembly of claim 9, wherein the first metal material comprises aluminum and the second metal material comprises nickel.

### Claim 13 (depends on 9)

The assembly of claim 9, wherein the first metal material comprises aluminum and the second metal material comprises titanium.

### Claim 14

A cooling method comprising:
providing a cold plate assembly comprising: a cold plate top wall attached to a first cold plate side wall and a second cold plate side wall, the first cold plate side wall attached to a cold plate bottom wall and including a coolant inlet, and the second cold plate side wall attached to the cold plate bottom wall and including a coolant outlet, with a plurality of bi-metal fins extending from the cold plate top wall towards the cold plate bottom wall, wherein the assembly further includes: a plurality of wall extensions extending from the cold plate bottom wall towards the cold plate top wall, the plurality of wall extensions defining a plurality of lower channels for the coolant, wherein each bi-metal fin of the plurality of bi-metal fins includes a side wall portion and a bottom wall portion, with each bi-metal fin extending from the cold plate top wall to define a plurality of adjustable upper channels for the coolant;
positioning a substrate on the cold plate top wall, the substrate having a plurality of semiconductor devices positioned on the substrate; and
introducing a coolant between the cold plate top wall and the cold plate bottom wall via the coolant inlet;
wherein heat from a semiconductor device of the plurality of semiconductor devices causes the coolant introduced between the cold plate top wall and the cold plate bottom wall to raise temperature of the coolant, which causes a bi-metal fin positioned proximal to the heated semiconductor device to deform and change a flow path of the coolant from the coolant inlet to the coolant outlet.

### Claim 15 (depends on 14)

The method of claim 14,
wherein when the cold plate top wall temperature increases at a specific area of the cold plate top wall via a heated semiconductor device, the bottom wall portion of each respective bi-metal fin proximal to the heated area of the cold plate top wall bends down toward the cold plate bottom wall and increases cross-sectional areas of the respective upper channels, thereby increasing the amount of the coolant through the respective upper channels.

### Claim 16 (depends on 15)

The method of claim 15, wherein when the cold plate top wall temperature cools and decreases at a specific area of the cold plate top wall, the bottom wall portion of each respective bi-metal fin proximal to the cooled area of the cold plate top wall bends up toward the cold plate top wall and decreases cross-sectional areas of the respective upper channels, thereby decreasing the amount of the coolant through the respective upper channels.

### Claim 17 (depends on 14)

The method of claim 14, wherein each bi-metal fin includes a first section of a first metal material, a first section of a second metal material, a second section of the first metal material, and a second section of the second metal material; and
wherein the first section of the first metal material is secured to the first section of the second metal material, and the second section of the first metal material is secured to the second section of the second metal material.

### Claim 18 (depends on 17)

The method of claim 17, wherein when the cold plate top wall temperature increases at a specific area of the cold plate top wall via a heated semiconductor device, the first section of the first metal material and the first section of the second metal material of each respective bi-metal fin proximal to the heated area of the cold plate top wall are curved, and the second section of the first metal material and the second section of the second metal material of each respective bi-metal fin proximal to the heated area of the cold plate top wall are curved, thereby forming an elongated O-shaped gap in a middle area between the first section of the second metal material and the second section of the second metal material.

### Claim 19 (depends on 18)

The method of claim 18, wherein each elongated O-shaped gap increases the amount of the coolant through each elongated O-shaped gap.

### Claim 20

A cooling assembly comprising:
a cold plate top wall attached to a first cold plate side wall and a second cold plate side wall, the first cold plate side wall attached to a cold plate bottom wall and including a coolant inlet, and the second cold plate side wall attached to the cold plate bottom wall and including a coolant outlet;
a substrate positioned on the cold plate top wall, the substrate having a plurality of semiconductor devices positioned on the substrate;
a plurality of bi-metal fins extending from the cold plate top wall towards the cold plate bottom wall;
wherein heat from a semiconductor device of the plurality of semiconductor devices causes a coolant introduced between the cold plate top wall and the cold plate bottom wall to raise temperature of the coolant, which causes a bi-metal fin positioned proximal to the heated semiconductor device to deform and change a flow path of the coolant from the coolant inlet to the coolant outlet; and
a plurality of wall extensions extending from the cold plate bottom wall towards the cold plate top wall, the plurality of wall extensions defining a plurality of lower channels for the coolant.
