# US 12,193,192 B2 · Cavities for center-pinned actuator cooling systems > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,193,192 B2 - Document ID: US12193192B2 - Status: Granted - Kind: B2 - Application number: 18/596,562 - Filed: 2024-03-05 - Published: 2024-06-27 - Granted: 2025-01-07 - Earliest claimed: 2019-12-06 - Assignees: Frore Systems Inc. - Applicants: Frore Systems Inc. - Inventors: Suryaprakash Ganti; Sangkyu Kim; Vikram Mukundan; Prathima Kapa; Ji Hoon Kim; Wen-Sheng Chan - Web page: https://patentgrep.com/patent/US12193192B2 ## CPC - H05K 7/20136: {Forced ventilation, e.g. by fans (H05K7/202 takes precedence)} - H05K 7/20509: {Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures} - H05K 7/20254: {Cold plates transferring heat from heat source to coolant} - H05K 7/20418: {the radiating structures being additional and fastened onto the housing} - H10W 40/43: by flowing gases, e.g. forced air cooling - H10W 40/47: by flowing liquids, e.g. forced water cooling - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A flow chamber having an upper chamber, a lower chamber, and an actuator is described. The upper chamber includes a top wall. The actuator is located distally from the top wall. The lower chamber includes a bottom wall and a sidewall. The lower chamber receives a fluid from the upper chamber when the actuator is activated. The bottom wall has orifices and at least one cavity therein. The orifices are vertically aligned with a portion of the actuator and allow the fluid to exit the lower chamber. The at least one cavity is proximate to the sidewall and distally located from the orifices. ## Claims ### Claim 1 A flow chamber, comprising: an upper chamber including a top wall; an actuator located distally from the top wall; and a lower chamber including a bottom wall and a sidewall, the lower chamber receiving a fluid from the upper chamber when the actuator is activated, the bottom wall having a plurality of orifices therein, the plurality of orifices being vertically aligned with a portion of the actuator and allowing the fluid to exit the lower chamber; wherein the bottom wall includes at least one cavity therein, the at least one cavity being proximate to the sidewall and distally located from the plurality of orifices; wherein the actuator includes an anchored region coupled to a support structure and a cantilevered arm, the cantilevered arm including a step region and an extension region, the step region having a step thickness, the extension region extending outward from the step region and having an extension thickness less than the step thickness. ### Claim 2 (depends on 1) The flow chamber of claim 1, further comprising: at least one fluidized surface coupled with the bottom wall, at least a portion of the at least one fluidized surface fluidically coupling the at least one cavity with the lower chamber. ### Claim 3 (depends on 1) The flow chamber of claim 1, wherein the bottom wall further includes at least one additional cavity therein, at least a portion of the plurality of orifices residing in the at least one additional cavity. ### Claim 4 (depends on 1) The flow chamber of claim 1, wherein the extension region extends to a tip of the cantilevered arm. ### Claim 5 (depends on 1) The flow chamber of claim 1, wherein the cantilevered arm includes an outer region extending outward from the extension region and having an outer thickness greater than the extension thickness such that the cantilevered arm includes at least one of a bottom recessed region facing the bottom wall and a top recessed region facing the top wall. ### Claim 6 (depends on 1) The flow chamber of claim 1, wherein the actuator includes a shim region on the anchored region, the shim region having a shim thickness greater than the extension region. ### Claim 7 A cooling system, comprising: a plurality of cooling cells, each of the plurality of cooling cells including a flow chamber having an upper chamber, an actuator, and a lower chamber, the upper chamber including a top wall, the actuator located distally from the top wall, the lower chamber including a bottom wall and a sidewall, the lower chamber receiving a fluid from the upper chamber when the actuator is activated, the bottom wall having a plurality of orifices therein, the plurality of orifices being vertically aligned with a portion of the actuator and allowing the fluid to exit the lower chamber, wherein the bottom wall includes at least one cavity therein, the at least one cavity being proximate to the sidewall and distally located from the plurality of orifices; wherein the actuator includes an anchored region coupled to a support structure and a cantilevered arm, the cantilevered arm including a step region and an extension region, the step region having a step thickness, the extension region extending outward from the step region and having an extension thickness less than the step thickness. ### Claim 8 (depends on 7) The cooling system of claim 7, wherein the flow chamber further includes: at least one fluidized surface coupled with the bottom wall, at least a portion of the at least one fluidized surface fluidically coupling the at least one cavity with the lower chamber. ### Claim 9 (depends on 7) The cooling system of claim 7, wherein the bottom wall further includes at least one additional cavity therein, at least a portion of the plurality of orifices residing in the at least one additional cavity. ### Claim 10 (depends on 7) The cooling system of claim 7, wherein the extension region extends to a tip of the cantilevered arm. ### Claim 11 (depends on 7) The cooling system of claim 7, wherein the cantilevered arm includes an outer region extending outward from the extension region and having an outer thickness greater than the extension thickness such that the cantilevered arm includes at least one of a bottom recessed region facing the bottom wall and a top recessed region facing the top wall. ### Claim 12 (depends on 7) The cooling system of claim 7, wherein the actuator includes a shim region on the anchored region, the shim region having a shim thickness greater than the extension region. ### Claim 13 A method, comprising: driving an actuator to induce a vibrational motion at a frequency, the actuator being configured to undergo the vibrational motion when driven to direct a fluid toward through a chamber including an upper chamber, a lower chamber and the actuator, the upper chamber including a top wall, the actuator located distally from the top wall, the lower chamber including a bottom wall and a sidewall, the lower chamber receiving the fluid from the upper chamber when the actuator is activated, the bottom wall having a plurality of orifices therein, the plurality of orifices being vertically aligned with a portion of the actuator and allowing the fluid to exit the lower chamber; wherein the bottom wall includes at least one cavity therein, the at least one cavity being proximate to the sidewall and distally located from the plurality of orifices; wherein the actuator includes an anchored region coupled to a support structure and a cantilevered arm, the cantilevered arm including a step region and an extension region, the step region having a step thickness, the extension region extending outward from the step region and having an extension thickness less than the step thickness. ### Claim 14 (depends on 13) The method of claim 13, wherein the chamber further includes at least one fluidized surface, at least a portion of the at least one fluidized surface fluidically coupling the at least one cavity with the lower chamber. ### Claim 15 (depends on 13) The method of claim 13, wherein the bottom wall further includes at least one additional cavity therein, at least a portion of the plurality of orifices residing in the at least one additional cavity. ### Claim 16 (depends on 13) The method of claim 13, wherein the cantilevered arm includes an outer region extending outward from the extension region and having an outer thickness greater than the extension thickness such that the cantilevered arm includes at least one of a bottom recessed region facing the bottom wall and a top recessed region facing the top wall. ### Claim 17 (depends on 13) The method of claim 13, wherein the actuator includes a shim region on the anchored region, the shim region having a shim thickness greater than the extension region.