Controller and control techniques for linear accelerator and ion implanter having linear accelarator
AssigneeApplied Materials, Inc.
InventorKeith E. Kowal
Life of this patent
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Abstract
An apparatus may include global control module, the global control module including a digital master clock generator and a master waveform generator. The apparatus may also include a plurality of resonator control modules, coupled to the global control module. A given resonator control module of the plurality of resonator control modules may include a synchronization module, having a first input coupled to receive a resonator output voltage pickup signal from a local resonator, a second input coupled to receive a digital master clock signal from the digital master clock generator, and a first output coupled to send a delay signal to the master waveform generator.
Claims15
An apparatus, comprising:
- a digital master clock generator;
- a master waveform generator to output an analog sinewave;
- a plurality of local resonator controllers, coupled to the master waveform generator and the digital master clock generator, wherein a given local resonator controller of the plurality of local resonator controllers comprises:
- a first input, coupled to receive a resonator output voltage pickup signal from a local resonator, a second input coupled to receive a digital master clock signal from the digital master clock generator, and a first output coupled to send a delay signal to the master waveform generator;
- and a tuning circuit, to output a tuning signal to an adjustable component of the local resonator, responsive to the resonator output voltage pickup signal.
A linear accelerator, comprising:
- a plurality of stages, wherein a given stage of the plurality of stages comprises a local resonator;
- and a resonator control assembly, coupled to the plurality of stages, the resonator control assembly comprising:
- a digital master clock generator, to generate a digital master clock signal;
- a master waveform generator, to output an analog sinewave;
- and
- a plurality of local resonator controllers, coupled to the master waveform generator and the digital master clock generator, wherein a given local resonator controller comprises:
- a first input coupled to receive a resonator output voltage pickup signal from the local resonator, a second input coupled to receive the digital master clock signal, and a first output coupled to send a delay signal to the master waveform generator;
- and
- a tuning circuit, to output a tuning signal to an adjustable component of the local resonator, responsive to the resonator output voltage pickup signal.
Dependencies are inferred from the claim text.