# US 12,193,138 B2 · Matchless plasma source for semiconductor wafer fabrication

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- Number: US 12,193,138 B2
- Document ID: US12193138B2
- Status: Granted
- Kind: B2
- Application number: 18/340,437
- Filed: 2023-06-23
- Published: 2023-11-02
- Granted: 2025-01-07
- Earliest claimed: 2017-10-18
- Assignees: Lam Research Corporation
- Applicants: Lam Research Corporation
- Inventors: Maolin Long; Yuhou Wang; Ricky Marsh; Alex Paterson
- Web page: https://patentgrep.com/patent/US12193138B2

## CPC

- H05H 1/46: using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence)
- H01J 37/32174: {Circuits specially adapted for controlling the RF discharge}
- H01J 37/32183: {Matching circuits}
- H03F 3/2173: {of the bridge type}
- H05H 1/4652: {using inductive coupling means, e.g. coils}
- H05H 1/466: {using capacitive coupling means, e.g. electrodes}
- H05H 2242/10: Cooling arrangements
- H05H 2242/24: Radiofrequency or microwave generators
- H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H03F: AMPLIFIERS

## Abstract

A matchless plasma source is described. The matchless plasma source includes a controller that is coupled to a direct current (DC) voltage source of an agile DC rail to control a shape of an amplified square waveform that is generated at an output of a half-bridge transistor circuit. The matchless plasma source further includes the half-bridge transistor circuit used to generate the amplified square waveform to power an electrode, such as an antenna, of a plasma chamber. The matchless plasma source also includes a reactive circuit between the half-bridge transistor circuit and the electrode. The reactive circuit has a high-quality factor to negate a reactance of the electrode. There is no radio frequency (RF) match and an RF cable that couples the matchless plasma source to the electrode.

## Claims

### Claim 1

A matchless plasma source comprising:
a signal generator configured to generate a square wave signal having a frequency;
a first gate driver coupled to the signal generator, wherein the first gate driver is configured to receive the square wave signal to output a first plurality of reversely synchronized signals having the same frequency as that of the square wave signal, wherein the first plurality of reversely synchronized signals include a first signal and a second signal;
a second gate driver coupled to the signal generator, wherein the second gate driver is configured to receive the square wave signal to output a second plurality of reversely synchronized signals, wherein the second plurality of reversely synchronized signals include a third signal and a fourth signal; and
an H bridge circuit coupled to the first and second gate drivers, wherein the H bridge circuit includes:
a first plurality of transistors including a first transistor and a second transistor, wherein the first transistor is configured to receive the first signal and the second transistor is configured to receive the second signal to output a first waveform;
a second plurality of transistors including a third transistor and a fourth transistor, wherein the third transistor is configured to receive the third signal and the fourth transistor is configured to receive the fourth signal to output a second waveform; and
a reactive circuit coupled to the first and second transistors, wherein the reactive circuit is configured to receive the first waveform to output a sinusoidal radio frequency (RF) signal.

### Claim 2 (depends on 1)

The matchless plasma source of claim 1, wherein the first transistor is coupled to the second transistor via a first output and the third transistor is coupled to the fourth transistor via a second output, wherein the first output is coupled to the second output via the reactive circuit.

### Claim 3 (depends on 2)

The matchless plasma source of claim 2, wherein upon receiving the first and fourth signals, the first and fourth transistors are configured to be turned on and off, upon receiving the second and third signals, the second and third transistors are configured to be turned on and off, wherein when the first and fourth transistors are on, the second and third transistors are off, and when the first and fourth transistors are off, the second and third transistors are on.

### Claim 4 (depends on 3)

The matchless plasma source of claim 3, wherein when the first and fourth transistors are turned on, RF power of the first waveform is transferred from the first output via the reactive circuit and the fourth transistor to a ground potential.

### Claim 5 (depends on 1)

The matchless plasma source of claim 1, wherein the first gate driver includes a first gate and a second gate, wherein the second gate is an inverter, wherein the second gate driver includes a third gate and a fourth gate, wherein the third gate is an inverter.

### Claim 6 (depends on 5)

The matchless plasma source of claim 5, wherein the first and second gates are coupled to the first plurality of inputs.

### Claim 7 (depends on 1)

The matchless plasma system of claim 1, wherein the first signal has a first high level and a first low level and the second signal has a second low level and a second high level, wherein during a time period in which the first signal transitions from the first low level to the first high level, the second signal transitions from the second high level to the second low level and during a time period in which the first signal transitions from the first high level to the first low level, the second signal transitions from the second low level to the second high level.

### Claim 8

A matchless plasma source comprising:
a signal generator configured to generate a square wave signal having a frequency;
a first gate driver coupled to the signal generator, wherein the first gate driver includes a first gate and a second gate, wherein the second gate is an inverter, wherein the first gate driver is configured to receive the square wave signal to output a first plurality of reversely synchronized signals having the same frequency as that of the square wave signal;
a second gate driver coupled to the signal generator, wherein the second gate driver includes a third gate and a fourth gate, wherein the third gate is an inverter; and
a bridge circuit coupled to the first and second gate drivers, wherein the bridge circuit includes:
a first plurality of inputs configured to receive the first plurality of reversely synchronized signals to provide a first waveform, wherein the first and second gates are coupled to the first plurality of inputs;
a reactive circuit configured to receive the first waveform to output a sinusoidal radio frequency (RF) signal; and
a second plurality of inputs configured to receive the second plurality of reversely synchronized signals to provide a second waveform, wherein the third and fourth gates are coupled to the second plurality of inputs and are coupled to each other.

### Claim 9 (depends on 8)

The matchless plasma source of claim 8, wherein the first waveform is provided at a first output and the second waveform is provided at a second output, wherein the second output is configured to provide RF power of the second waveform via the reactive circuit and a transistor to a ground potential.

### Claim 10

A method comprising:
generating a square wave signal having a frequency;
outputting a first plurality of reversely synchronized signals based on the square wave signal, wherein the first plurality of reversely synchronized signals have the same frequency as that of the square wave signal, wherein the first plurality of reversely synchronized signals include a first signal and a second signal;
generating a first waveform upon receiving the first plurality of reversely synchronized signals;
receiving the first waveform to provide a sinusoidal radio frequency (RF) signal;
outputting a second plurality of reversely synchronized signals upon receiving the square wave signal, wherein the second plurality of reversely synchronized signals include a third signal and a fourth signal;
receiving the second plurality of reversely synchronized signals to provide a second waveform;
upon receiving the first and fourth signals, turning on and off a first set of transistors, wherein the first set includes a first transistor and a second transistor; and
upon receiving the second and third signals, turning on and off a second set of transistors, wherein the second set includes a third transistor and a fourth transistor, wherein when the first and fourth transistors are on, the second and third transistors are off, and when the first and fourth transistors are off, the second and third transistors are on.

### Claim 11 (depends on 10)

The method of claim 10, wherein when the first and fourth transistors are turned on, transferring the first waveform from a first output to a reactive circuit, wherein the first output is between the first and second transistors and said receiving the first waveform to output the sinusoidal RF signal is performed by the reactive circuit.

### Claim 12 (depends on 11)

The method of claim 11, further comprising:
transferring the second waveform from a second output to the reactive circuit, wherein the second output is located between the third and fourth transistors.

### Claim 13

A plasma system comprising:
a matchless plasma source including:
a signal generator configured to generate a square wave signal having a frequency;
a first gate driver coupled to the signal generator, wherein the first gate driver is configured to receive the square wave signal to output a first plurality of reversely synchronized signals having the same frequency as that of the square wave signal, wherein the first plurality of reversely synchronized signals include a first signal and a second signal;
a second gate driver coupled to the signal generator, wherein the second gate driver is configured to receive the square wave signal to output a second plurality of reversely synchronized signals, wherein the second plurality of reversely synchronized signals include a third signal and a fourth signal;
an H bridge circuit coupled to the first gate driver, wherein the H bridge circuit includes:
a first plurality of transistors including a first transistor and a second transistor, wherein the first transistor is configured to receive the first signal and the second transistor is configured to receive the second signal to output a first waveform;
a second plurality of transistors including a third transistor and a fourth transistor, wherein the third transistor is configured to receive the third signal and the fourth transistor is configured to receive the fourth signal to output a second waveform; and
a reactive circuit configured to receive the first waveform to output a sinusoidal radio frequency (RF) signal; and
a plasma chamber having an electrode, wherein the electrode is configured to receive the sinusoidal RF signal.

### Claim 14 (depends on 13)

The plasma system of claim 13, wherein there is no impedance matching circuit between the matchless plasma source and the plasma chamber.