Sound producing cell
AssigneexMEMS Labs, Inc.
InventorsChiung C. Lo, Hao-Hsin Chang, Wen-Chien Chen, Chun-I Chang
Life of this patent
Estimating the term…
Abstract
A sound producing cell includes a membrane and an actuating layer. The membrane includes a first membrane subpart and a second membrane subpart, wherein the first membrane subpart and the second membrane subpart are opposite to each other. The actuating layer is disposed on the first membrane subpart and the second membrane subpart. The first membrane subpart includes a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored. The second membrane subpart includes a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored.
Claims23
A sound producing cell;
- comprising:
- a membrane;
- comprising:
- a first membrane subpart;
- a second membrane subpart and a third membrane subpart;
- wherein the first membrane subpart and the second membrane subpart are opposite to each other, and the third membrane subpart is disposed by a first side of the sound producing cell between the first membrane subpart and the second membrane subpart in a top view;
- a first slit, formed between the first membrane subpart and the second membrane subpart;
- and
- a second slit, formed between the first membrane subpart and the third membrane subpart;
- and
- an actuating layer, disposed on the first membrane subpart and the second membrane subpart;
- wherein the first membrane subpart comprises a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored;
- wherein the second membrane subpart comprises a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored;
- wherein the third membrane subpart is configured to reduce acoustic leakage at the first side of the sound producing cell;
- wherein the third membrane subpart comprises a third anchored edge which is anchored, and edges of the third membrane subpart other than the third anchored edge are non-anchored;
- wherein a first non-anchored edge of the first membrane subpart is defined by the first slit, and the first non-anchored edge is opposite to the first anchored edge;
- wherein a second non-anchored edge of the first membrane subpart and a fourth non-anchored edge of the third membrane subpart are defined by the second slit, the second non-anchored edge of the first membrane subpart is adjacent to the first anchored edge of the first membrane subpart, and the fourth non-anchored edge of the third membrane subpart is adjacent to the third anchored edge of the third membrane subpart.
A sound producing cell, comprising:
- a membrane, comprising a first membrane subpart and a second membrane subpart, wherein the first membrane subpart and the second membrane subpart are opposite to each other;
- an actuating layer, disposed on the first membrane subpart and the second membrane subpart;
- and
- a recess structure, disposed at a corner of the sound producing cell and configured to disperse a stress applied on the recess structure during a peel-off process;
- wherein the first membrane subpart comprises a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored;
- wherein the second membrane subpart comprises a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored.
Dependencies are inferred from the claim text.