# US 12,192,665 B2 · Solid-state imaging device and imaging system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,192,665 B2 - Document ID: US12192665B2 - Status: Granted - Kind: B2 - Application number: 17/390,605 - Filed: 2021-07-30 - Published: 2021-11-18 - Granted: 2025-01-07 - Earliest claimed: 2010-06-30 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Masahiro Kobayashi; Mineo Shimotsusa - Web page: https://patentgrep.com/patent/US12192665B2 ## CPC - H04N 25/79: Arrangements of circuitry being divided between different or multiple substrates, chips or circuit boards, e.g. stacked image sensors - H10D 89/611: {using diodes as protective elements} - H10D 89/931: {characterised by the dispositions of the protective arrangements} - H10F 39/014: {of CMOS image sensors} - H10F 39/024: {of coatings or optical elements} - H10F 39/12: Image sensors - H10F 39/199: {Back-illuminated image sensors} - H10F 39/811: {Interconnections} - H10K 65/00: Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element and at least one organic radiation-sensitive element, e.g. organic opto-couplers (organic image sensors integrated with organic light-emitting devices H10K39/34; OLED displays integrated with photosensors H10K59/13) - H10F 39/182: {Colour image sensors} - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract A solid-state imaging device includes: a first semiconductor substrate including a photoelectric conversion element; and a second semiconductor substrate including at least a part of a peripheral circuit arranged in a main face of the second semiconductor substrate, the peripheral circuit generating a signal based on the charge of the photoelectric conversion element, a main face of the first semiconductor substrate and the main face of the second semiconductor substrate being opposed to each other with sandwiching a wiring structure therebetween; a pad to be connected to an external terminal; and a protection circuit electrically connected to the pad and to the peripheral circuit, wherein the protection circuit is arranged in the main face of the second semiconductor substrate. ## Claims ### Claim 1 A device comprising: a first semiconductor substrate which includes a photoelectric conversion element; a second semiconductor substrate which includes a transistor; and a wiring structure which is arranged between the first semiconductor substrate and the second semiconductor substrate, wherein the first semiconductor substrate is provided with an opening, wherein the second semiconductor substrate includes semiconductor regions and an insulating member, wherein the semiconductor regions include a first semiconductor region and a second semiconductor region separated from the first semiconductor region by the insulating member, and wherein the opening and at least one of the insulating member, the first semiconductor region and the second semiconductor regions overlap each other, or the opening and a poly silicon portion arranged between the wiring structure and the second semiconductor substrate overlap each other. ### Claim 2 (depends on 1) The device according to claim 1, wherein a first conductor portion and a second conductor portion are bonded to each other at a bonding interface between the first semiconductor substrate and the second semiconductor substrate, and wherein the opening and the insulating member overlap each other, the opening and the first and the second semiconductor regions overlap each other, the opening and the poly silicon portion overlap each other, and the opening and the first and second conductor portions overlap each other. ### Claim 3 (depends on 1) The device according to claim 1, wherein the opening penetrates from a light incident surface of the first semiconductor substrate to a surface, which is opposite to the light incident surface, of the first semiconductor substrate. ### Claim 4 (depends on 1) The device according to claim 1, wherein a pad exposed through the opening is connected to an external terminal. ### Claim 5 (depends on 4) The device according to claim 4, wherein the pad contains aluminum. ### Claim 6 (depends on 1) The device according to claim 1, wherein the second semiconductor substrate includes at least one of a diode which overlaps the opening and the transistor which overlaps the opening. ### Claim 7 (depends on 1) The device according to claim 1, wherein a protection film is provided over the opening. ### Claim 8 (depends on 1) The device according to claim 1, wherein the wiring structure includes a first wiring structure and a second wiring structure, the first wiring structure includes a first insulating film, the second wiring structure includes a second insulating film, and the first wiring structure and the second wiring structure are bonded to each other so that the first insulating film and the second insulating film contact each other. ### Claim 9 (depends on 8) The device according to claim 8, wherein the first wiring structure includes a first wiring layer and a second wiring layer arranged between the first wiring layer and the second wiring structure, wherein the second wiring structure includes a third wiring layer, wherein the opening is arranged above a part of the first wiring layer, and wherein the part of the first wiring layer is electrically connected to the third wiring layer via the second wiring layer. ### Claim 10 (depends on 9) The device according to claim 9, wherein the first wiring layer includes a first wiring, the second wiring layer includes a second wiring electrically connected to the first wiring, and the third wiring layer includes a third wiring electrically connected to the second wiring and the second semiconductor substrate. ### Claim 11 (depends on 10) The device according to claim 10, wherein the third wiring is electrically connected to at least one of the first and the second semiconductor regions. ### Claim 12 (depends on 10) The device according to claim 10, wherein the third wiring is electrically connected to the poly silicon portion. ### Claim 13 (depends on 1) The device according to claim 1, wherein the insulating member contains one of a LOCOS structure and a STI structure. ### Claim 14 (depends on 1) A system comprising: the device according to claim 1; and a processing unit configured to process a signal output from the device. ### Claim 15 A device comprising: a first semiconductor substrate which includes a photoelectric conversion element; a second semiconductor substrate which includes a transistor; a first wiring structure arranged between the first semiconductor substrate and the second semiconductor substrate; and a second wiring structure arranged between the first wiring structure and the second semiconductor substrate; wherein the first semiconductor substrate is provided with an opening, wherein the first wiring structure includes a plurality of first conductor portions and a first insulator portion, and, in a cross sectional view, the first insulator portion is arranged between one of the plurality of first conductor portions and another of the plurality of first conductor portions, wherein the second wiring structure includes a plurality of second conductor portions and a second insulator portion, and, in the cross sectional view, the second insulator portion is arranged between one of the plurality of second conductor portions and another of the plurality of second conductor portions, wherein in a bonding interface between the first wiring structure and the second wiring structure, the one of the plurality of first conductor portions and the one of the plurality of second conductor portions are bonded, the another of the plurality of first conductor portions and the another of the plurality of second conductor portions are bonded, and the first insulator portion and the second insulator portion are bonded, wherein the one of the plurality of first conductor portions is electrically connected to a first wiring of the first wiring structure via a first plurality of vias, and wherein the opening overlaps the one of the plurality of first conductor portions, the one of the plurality of second conductor portions and at least one of the first plurality of vias. ### Claim 16 (depends on 15) The device according to claim 15, wherein the one of the second conductor portions is electrically connected to a second wiring of the second wiring structure via a second plurality of vias; and wherein the opening overlaps at least one of the second plurality of vias. ### Claim 17 (depends on 15) The device according to claim 15, wherein the second semiconductor substrate includes at least one of a diode which overlaps the opening and the transistor which overlaps the opening. ### Claim 18 (depends on 15) The device according to claim 15, wherein a protection film is provided over the opening. ### Claim 19 (depends on 15) The device according to claim 15, wherein the first wiring structure includes a first wiring layer and a second wiring layer arranged between the first wiring layer and the second wiring structure, wherein the second wiring structure includes a third wiring layer, wherein the opening is arranged above a part of the first wiring layer, and wherein the part of the first wiring layer is electrically connected to the third wiring layer via the second wiring layer. ### Claim 20 (depends on 19) The device according to claim 19, wherein the first wiring layer includes a first wiring, the second wiring layer includes a second wiring electrically connected to the first wiring, and the third wiring layer includes a third wiring electrically connected to the second wiring and the second semiconductor substrate. ### Claim 21 (depends on 20) The device according to claim 20, wherein the second wiring is arranged between the first wiring layer and the third wiring. ### Claim 22 (depends on 20) The device according to claim 20, wherein the part of the first wiring layer is electrically connected to the second wiring via at least one of the first plurality of vias. ### Claim 23 (depends on 20) The device according to claim 20, wherein the transistor is connected to the photoelectric conversion element, and included in a signal processing circuit at least partially arranged on the second semiconductor substrate. ### Claim 24 (depends on 20) The device according to claim 20, wherein the second wiring and the third wiring are bonded to each other. ### Claim 25 (depends on 20) The device according to claim 20, wherein the second wiring and the third wiring contain copper. ### Claim 26 (depends on 15) A system comprising: the device according to claim 15; and a processing unit configured to process a signal output from the device. ### Claim 27 (depends on 15) The device according to claim 15, wherein a pad exposed through the opening is connected to an external terminal. ### Claim 28 (depends on 27) The device according to claim 27, wherein the pad contains aluminum. ### Claim 29 A device comprising: a first semiconductor substrate which includes a photoelectric conversion element; a second semiconductor substrate which includes a transistor; a first wiring structure arranged between the first semiconductor substrate and the second semiconductor substrate; and a second wiring structure arranged between the first wiring structure and the second semiconductor substrate; wherein the first semiconductor substrate is provided with an opening exposing a pad, wherein the first wiring structure includes a plurality of first conductor portions and a first insulator portion, and, in a cross sectional view, the first insulator portion is arranged between one of the plurality of first conductor portions and another of the plurality of first conductor portions, wherein the second wiring structure includes a plurality of second conductor portions and a second insulator portion, and, in the cross sectional view, the second insulator portion is arranged between one of the plurality of second conductor portions and another of the plurality of second conductor portions, wherein in a bonding interface between the first wiring structure and the second wiring structure, the one of the plurality of first conductor portions and the one of the plurality of second conductor portions are bonded, the another of the plurality of first conductor portions and the another of the plurality of second conductor portions are bonded, and the first insulator portion and the second insulator portion are bonded, wherein the pad is electrically connected to one of the plurality of first conductor portions, and wherein the opening overlaps one of the plurality of first conductor portions. ### Claim 30 (depends on 29) The device according to claim 29, wherein one of the plurality of second conductor portions is electrically connected to a second wiring of the second wiring structure via a plurality of vias; and wherein the opening overlaps at least one of the plurality of vias. ### Claim 31 (depends on 29) The device according to claim 29, wherein the second semiconductor substrate includes at least one of a diode which overlaps the opening and the transistor which overlaps the opening. ### Claim 32 (depends on 29) The device according to claim 29, wherein a protection film is provided over the opening. ### Claim 33 (depends on 29) The device according to claim 29, wherein the first wiring structure includes a first wiring layer and a second wiring layer arranged between the first wiring layer and the second wiring structure, wherein the second wiring structure includes a third wiring layer, wherein the opening is arranged above a part of the first wiring layer, and wherein the part of the first wiring layer is electrically connected to the third wiring layer via the second wiring layer. ### Claim 34 (depends on 33) The device according to claim 33, wherein the first wiring layer includes a first wiring, the second wiring layer includes a second wiring electrically connected to the first wiring, and the third wiring layer includes a third wiring electrically connected to the second wiring and the second semiconductor substrate. ### Claim 35 (depends on 34) The device according to claim 34, wherein the second wiring is arranged between the first wiring layer and the third wiring. ### Claim 36 (depends on 34) The device according to claim 34, wherein the part of the first wiring layer is electrically connected to the second wiring via a plurality of vias. ### Claim 37 (depends on 34) The device according to claim 34, wherein the transistor is electrically connected to the photoelectric conversion element, and included in a signal processing circuit at least partially arranged on the second semiconductor substrate. ### Claim 38 (depends on 34) The device according to claim 34, wherein the second wiring and the third wiring are bonded to each other. ### Claim 39 (depends on 34) The device according to claim 34, wherein the second wiring and the third wiring contain copper. ### Claim 40 (depends on 29) A system comprising: the device according to claim 29; and a processing unit configured to process a signal output from the device. ### Claim 41 (depends on 29) The device according to claim 29, wherein the pad exposed through the opening is connected to an external terminal. ### Claim 42 (depends on 41) The device according to claim 41, wherein the pad contains aluminum.