US 12,191,842 B2Granted

Acoustic wave device

AssigneeMurata Manufacturing Co., Ltd.

InventorYasumasa Taniguchi

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Abstract

An acoustic wave device includes a piezoelectric layer, first and second upper electrodes, first and second lower electrodes, and first and second acoustic reflection films. In plan view, first and second resonator portions are respectively defined by portions where the first upper electrode and the first lower electrode overlap and where the second upper electrode and the second lower electrode overlap. The first and second acoustic reflection films respectively include first and second metal layers. First and second overlapping portions are respectively defined by portions where only the first upper electrode overlaps with the first metal layer and where only the second upper electrode overlaps with the second metal layer. An area of the first resonator portion is smaller than an area of the second resonator portion and an area of the first overlapping portion is larger than an area of the second overlapping portion.

Claims16

Dependent claims

An acoustic wave device comprising:

a first acoustic wave resonator and a second acoustic wave resonator, the first acoustic wave resonator and the second acoustic wave resonator being electrically connected with each other;
a piezoelectric layer including a first main surface and a second main surface which are opposed to each other;
a first upper electrode on the first main surface;
a second upper electrode on the first main surface;
a first lower electrode on the second main surface of the piezoelectric layer so as to overlap with the first upper electrode in a plan view;
a second lower electrode on the second main surface of the piezoelectric layer so as to overlap with the second upper electrode in the plan view;
a first resonator portion defined by a portion at which the first upper electrode and the first lower electrode mutually overlap in the plan view
a second resonator portion defined by a portion at which the second upper electrode and the second lower electrode mutually overlap in the plan view;
a first acoustic reflection film on the second main surface of the piezoelectric layer so as to overlap with the first resonator portion in the plan view and cover at least a portion of the first lower electrode;
and
a second acoustic reflection film on the second main surface of the piezoelectric layer so as to overlap with the second resonator portion in the plan view and cover at least a portion of the second lower electrode;
wherein
the first acoustic reflection film includes at least one first metal layer and the second acoustic reflection film includes at least one second metal layer;
the first acoustic wave resonator and the second acoustic wave resonator share the piezoelectric layer, the first acoustic wave resonator includes the first upper electrode, the first lower electrode, and the first acoustic reflection film, and the second acoustic wave resonator includes the second upper electrode, the second lower electrode, and the second acoustic reflection film;
a first overlapping portion is defined by a portion at which only the first upper electrode out of the first upper electrode and the first lower electrode overlaps with the first metal layer in the plan view;
a second overlapping portion is defined by a portion at which only the second upper electrode of the second upper electrode and the second lower electrode overlaps with the second metal layer in the plan view;
an area of the first resonator portion in the plan view is smaller than an area of the second resonator portion in the plan view;
and
an area of the first overlapping portion in the plan view is larger than an area of the second overlapping portion in the plan view.

16 more elements

An acoustic wave device comprising:

a first acoustic wave resonator and a second acoustic wave resonator, the first acoustic wave resonator and the second acoustic wave resonator being electrically connected with each other without any other elements interposed therebetween;
a piezoelectric layer including a first main surface and a second main surface which are opposed to each other;
a first IDT electrode on the first main surface and including a plurality of electrode fingers;
a second IDT electrode on the first main surface and including a plurality of electrode fingers;
a first wiring electrode on the first main surface and connected with the first IDT electrode;
a second wiring electrode on the first main surface and connected with the second IDT electrode;
a first resonator portion defined by a portion at which the electrode fingers adjacent to each other of the first IDT electrode overlap with each other when viewed in an acoustic wave propagation direction;
a second resonator portion defined by a portion at which the electrode fingers adjacent to each other of the second IDT electrode overlap with each other when viewed in the acoustic wave propagation direction;
a first acoustic reflection film on the second main surface of the piezoelectric layer and overlapping with the first resonator portion in plan view;
and
a second acoustic reflection film on the second main surface of the piezoelectric layer and overlapping with the second resonator portion in plan view;
wherein
the first acoustic reflection film includes at least one first metal layer and the second acoustic reflection film includes at least one second metal layer;
the first acoustic wave resonator and the second acoustic wave resonator share the piezoelectric layer, the first acoustic wave resonator includes the first IDT electrode and the first acoustic reflection film, and the second acoustic wave resonator includes the second IDT electrode and the second acoustic reflection film;
a first overlapping portion is defined by a portion at which the first wiring electrode and the first metal layer overlap with each other in a plan view;
a second overlapping portion is defined by a portion at which the second wiring electrode and the second metal layer overlap with each other in the plan view;
an area of the first resonator portion in the plan view is smaller than an area of the second resonator portion in the plan view;
and
an area of the first overlapping portion in the plan view is larger than an area of the second overlapping portion in the plan view.

16 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/952,369Filed 26 Sep 2022 · continuation
Priority: JP 2020-06319131 Mar 2020
Published: US 2023/0016324 A119 Jan 2023
Granted: 7 Jan 2025
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

H03H 9/175
Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume: acoustic mirrors
H03H 9/205
Constructional features of resonators consisting of piezoelectric or electrostrictive material: having multiple resonators
H03H 9/02086
Of bulk acoustic wave devices: means for compensation or elimination of undesirable effects
H03H 9/02574
Characteristics of substrate, e.g. cutting angles: of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical…