# US 12,191,376 B2 · Power device and method for making the same

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- Number: US 12,191,376 B2
- Document ID: US12191376B2
- Status: Granted
- Kind: B2
- Application number: 17/705,906
- Filed: 2022-03-28
- Published: 2022-09-29
- Granted: 2025-01-07
- Earliest claimed: 2021-03-29
- Assignees: Xiamen Sanan Integrated Circuit Co., Ltd.
- Applicants: Xiamen San'an Integrated Circuit Co., Ltd.
- Inventors: Yonghong Tao; Wenbi Cai; Shaodong Xu; Jinpeng Guo; Yongtian Zhou; Hongxing Hu; Yong Wang
- Web page: https://patentgrep.com/patent/US12191376B2

## CPC

- H10D 8/051: {of Schottky diodes}
- H10D 8/60: Schottky-barrier diodes
- H10D 62/115: {Dielectric isolations, e.g. air gaps}
- H10D 62/8325: {Silicon carbide}
- H10W 74/147: {the encapsulations being multilayered}
- H10D 62/106: {having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions}
- H10W 42/121: {protecting against mechanical damage (H10W76/00, H10W74/00 take precedence)}
- H10W 72/983: {Reinforcing structures, e.g. collars}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A power device includes a substrate, a drift layer disposed on the substrate, a terminal region and an active region disposed in the drift layer, an electrode layer disposed on the active region, a Schottky contact layer disposed between the electrode layer and the active region, a passivation layer disposed on the drift layer, and an isolation layer disposed between the passivation layer and the electrode layer so that the passivation layer and the electrode layer are at least partially separated from each other. The isolation layer, the electrode layer, and the passivation layer each respectively has a thermal expansion coefficient a, b, c, and a>b>c.

## Claims

### Claim 1

A power device, comprising:
a substrate;
a drift layer disposed on said substrate;
a terminal region and an active region disposed in said drift layer, said terminal region surrounding said active region;
an electrode layer disposed on said active region;
a Schottky contact layer disposed between said electrode layer and said active region;
a passivation layer disposed on said drift layer; and
an isolation layer disposed between said passivation layer and said electrode layer so that said passivation layer and said electrode layer are at least partially separated from each other,
wherein said isolation layer has a thermal expansion coefficient a, said electrode layer has a thermal expansion coefficient b, said passivation layer has a thermal expansion coefficient c, and a>b>c.

### Claim 2 (depends on 1)

The power device of claim 1, wherein said passivation layer and said electrode layer are completely separated by said isolation layer.

### Claim 3 (depends on 2)

The power device of claim 2, wherein said electrode layer has a side wall, and said isolation layer is disposed on said side wall.

### Claim 4 (depends on 3)

The power device of claim 3, wherein said side wall has a height, and said isolation layer extends from said side wall at more than half of said height of said side wall in a direction toward said drift layer.

### Claim 5 (depends on 4)

The power device of claim 4, wherein:
said isolation layer is flush with a top surface of said electrode layer, and extends toward said drift layer; and
said passivation layer completely covers said isolation layer and extends toward said terminal region.

### Claim 6 (depends on 2)

The power device of claim 2, further comprising a dielectric layer disposed on said drift layer and extends from a periphery of said active region to cover said terminal region;
said electrode layer has a mesa portion that extends above said dielectric layer;
said mesa portion has a side wall contacting and extending away from said dielectric layer; and
said passivation layer covers said isolation layer and extends toward said terminal region.

### Claim 7 (depends on 6)

The power device of claim 6, wherein said isolation layer is disposed on said side wall of said mesa portion.

### Claim 8 (depends on 7)

The power device of claim 7, wherein said side wall has a height, and said isolation layer extends from said side wall at more than half of said height of said side wall in a direction toward said drift layer.

### Claim 9 (depends on 8)

The power device of claim 8, wherein:
said electrode layer has a top surface distal from said drift layer;
said side wall is proximate to said terminal region;
said isolation layer is flush with a top surface of said electrode layer and extends from said electrode layer in a direction toward said drift layer;
said passivation layer completely covers said isolation layer and extends in a direction toward said terminal region; and
said electrode layer and said passivation layer are separated by said isolation layer.

### Claim 10 (depends on 2)

The power device of claim 2, further comprising a dielectric layer which is disposed on said drift layer and which extends from a periphery of said active region along a direction away from said active region,
wherein
said active region is disposed in said drift layer distal from said substrate,
said electrode layer has a mesa portion that extends above and contacts with said dielectric layer,
said isolation layer is disposed on and convers said electrode layer and said dielectric layer, and
said passivation layer is disposed on said isolation layer.

### Claim 11 (depends on 10)

The power device of claim 10, wherein:
said mesa portion of said electrode layer has a height measured from said dielectric layer;
said isolation layer is disposed on a side wall of said mesa portion and said dielectric layer, and extends from said electrode layer at more than half of said height of said mesa portion in a direction toward said dielectric layer; and
said passivation layer at least covers a surface of said isolation layer.

### Claim 12 (depends on 10)

The power device of claim 10, wherein:
said electrode layer has a welding region for electric connection, said welding region being located at a surface of said electrode layer opposite to said drift layer;
said isolation layer extends from a periphery of said welding region in a direction toward said dielectric layer and at least covers a part of a surface of said dielectric layer; and
said passivation layer covers said isolation layer.

### Claim 13 (depends on 12)

The power device of claim 12, wherein, in a direction from a side wall of said mesa portion of said electrode layer toward said dielectric layer, said isolation layer has a slope surface that extends away from said side wall.

### Claim 14 (depends on 13)

The power device of claim 13, wherein, in a cross section of said power device:
said dielectric layer and said side wall of said electrode layer has a contact point,
said slope surface has a selected point that is nearest to said contact point, and
a tangent line which passes through said selected point and which extends in the direction from said side wall of said mesa portion of said electrode layer toward said dielectric layer forms a second included angle with a top surface of said drift layer, said second included angle ranging from 30° to 45°.

### Claim 15 (depends on 2)

The power device of claim 2, further comprising a dielectric layer which extends from a periphery of said active region to cover said terminal region,
wherein
said active region and said terminal region are disposed in said drift layer distal from said substrate,
said electrode layer has a mesa portion that extends above said dielectric layer, said mesa portion has a side wall that connects to and extends away from said dielectric layer and that forms a first included angle with said dielectric layer,
said electrode layer has a welding region for electrical connection, said welding region being located at a surface of said electrode layer opposite to said drift layer,
said isolation layer is disposed on said electrode layer and said dielectric layer, and is configured so that an angle of inclination of said isolation layer extending from a periphery of said welding region toward said dielectric layer is smaller than said first included angle, and
said passivation layer is disposed on said isolation layer.

### Claim 16 (depends on 15)

The power device of claim 15, wherein:
said mesa portion has a height;
said isolation layer is disposed on said side wall and said dielectric layer, and extends from said mesa portion of said electrode layer at more than half of said height of said mesa portion in a direction toward said dielectric layer; and
said passivation layer covers at least a surface of said isolation layer.

### Claim 17 (depends on 16)

The power device of claim 16, wherein in a direction from said side wall of said mesa portion of said electrode layer toward said dielectric layer, said isolation layer has a slope surface that extends away from said side wall.

### Claim 18 (depends on 17)

The power device of claim 17, wherein, in a cross section of said power device:
said dielectric layer and said side wall has a contact point,
said slope surface has a selected point that is nearest to said contact point, and
a tangent line which passes through said selected point and which extends in a direction from said side wall of said mesa portion of said electrode layer toward said dielectric layer forms a second included angle with a top surface of said drift layer, said second included angle ranging from 30° to 45°.

### Claim 19 (depends on 1)

The power device of claim 1, further comprising a dielectric layer which extends from a periphery of said active region to cover said terminal region,
wherein
said active region and said terminal region are disposed in said drift layer distal from said substrate,
said electrode layer has a mesa portion that extends above said dielectric layer and that has a side wall, said side wall being connected to said dielectric layer and forming a first included angle with said dielectric layer, and
said isolation layer fills a corner defined by said side wall and said dielectric layer and having first included angle so that said isolation layer is disposed on said electrode layer and said dielectric layer.

### Claim 20 (depends on 19)

The power device of claim 19, wherein said side wall of said mesa portion has a height, said isolation layer extends from said side wall at more than half of said height of side wall in a direction toward said dielectric layer, and said passivation layer at least covers said isolation layer.

### Claim 21 (depends on 19)

The power device of claim 19, wherein:
said electrode layer has a welding region for electrical connection, said welding region being located at a surface of said electrode layer opposite to said drift layer;
said isolation layer extends from a periphery of said welding region in a direction toward said dielectric layer; and
said passivation layer covers said isolation layer.

### Claim 22 (depends on 21)

The power device of claim 21, wherein, in a direction from said side wall of said mesa portion of said electrode layer toward said dielectric layer, said isolation layer has a slope surface that extends away from said side wall.

### Claim 23 (depends on 22)

The power device of claim 22, wherein, in a cross section of said power device:
said dielectric layer and said side wall of said mesa portion has a contact point,
said slope surface has a selected point that is nearest to said contact point, and
a tangent line which passes through said selected point and which extends in the direction from said side wall of said mesa portion of said electrode layer toward said dielectric layer forms a second included angle with a top surface of said drift layer, said second included angle ranging from 30° to 45°.

### Claim 24

A method for manufacturing a power device, comprising:
providing a power structure that includes:
a substrate,
a drift layer disposed on the substrate,
an active region disposed in the drift layer,
a terminal region disposed in the drift layer and surrounds the active region,
a dielectric layer disposed on the drift layer and extending from a periphery of the active region to cover the terminal region,
an electrode layer disposed on the active region, and
a Schottky contact layer disposed between the active region and the electrode layer;
forming an isolation layer on the electrode layer; and
forming a passivation layer that covers at least a portion of the isolation layer and extends in a direction toward the terminal region, the passivation layer and the electrode layer being separated by the isolation layer,
wherein
the electrode layer has a mesa portion that extends above the dielectric layer, the mesa portion having a side wall proximate to the dielectric layer and a top surface distal from the drift layer, and
the side wall of the mesa portion is connected to the dielectric layer.

### Claim 25 (depends on 24)

The method of claim 24, wherein the step of forming the isolation layer includes:
depositing a material on a surface of the power structure distal from the substrate; and
patterning the material to remove a part of the material disposed on the top surface of the electrode layer and a surface of the dielectric layer, so as to form the isolation layer on the side wall of the mesa portion,
wherein the isolation layer has a thermal expansion coefficient a, the electrode layer has a thermal expansion coefficient b, the passivation layer has a thermal expansion coefficient c, and a>b>c.

### Claim 26 (depends on 24)

The method of claim 24, wherein the step of forming the isolation layer includes:
depositing a material on a surface of the power structure distal from the substrate; and
patterning the material to remove a part of the material disposed on a central region of the top surface of the electrode layer and a surface of the dielectric layer, so as to form the isolation layer on a terminal region of the top surface of the electrode layer surrounding the central region and on the side wall of the mesa portion,
wherein the isolation layer has a thermal expansion coefficient a, the electrode layer has a thermal expansion coefficient b, the passivation layer has a thermal expansion coefficient c, and a>b>c.

### Claim 27

A method for manufacturing a power device, comprising:
providing a first power structure that includes:
a substrate,
a drift layer disposed on the substrate,
an active region and a terminal region disposed in the drift layer distal from the substrate;
a dielectric layer disposed on the drift layer and extending from a periphery of the active region to cover the terminal region,
an electrode layer disposed on the active region, the electrode layer having a mesa portion that extends above the dielectric layer, the mesa portion having a side wall proximate to the dielectric layer and a top surface distal from the drift layer, the side wall of the mesa portion being connected to the dielectric layer so that an included angle is formed between the mesa portion and the dielectric layer, and
a Schottky contact layer disposed between the active region and the electrode layer;
forming an isolation layer on the electrode layer and the dielectric layer, the isolation layer having a slope surface extending in a direction from the side wall of the mesa portion toward the dielectric layer and away from the side wall;
forming a photoresist on the isolation layer and patterning the photoresist so as to form a through hole in the photoresist that exposes a part of the isolation layer disposed on a central region of the electrode layer;
patterning the isolation layer to remove the part of the isolation layer exposed from the through hole; and
forming a passivation layer that covers at least a portion of the isolation layer, the passivation layer and the electrode layer being at least partially separated by the isolation layer,
wherein
the isolation layer has a thermal expansion coefficient a, the electrode layer has a thermal expansion coefficient b, the passivation layer has a thermal expansion coefficient c, and a>b>c.