# US 12,191,184 B2 · Fixture > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,191,184 B2 - Document ID: US12191184B2 - Status: Granted - Kind: B2 - Application number: 17/647,986 - Filed: 2022-01-14 - Published: 2023-01-26 - Granted: 2025-01-07 - Earliest claimed: 2021-07-07 - Assignees: Changxin Memory Technologies, Inc. - Applicants: Changxin Memory Technologies, Inc. - Inventors: Zhongyang Wei - Web page: https://patentgrep.com/patent/US12191184B2 ## CPC - H10P 72/72: using electrostatic chucks - H10P 72/722: {Details of electrostatic chucks} - H01J 37/32715: {Workpiece holder} - H01J 37/32853: {Hygiene} - H01J 37/32862: {In situ cleaning of vessels and/or internal parts} - H01J 37/3288: {Maintenance} - H10P 72/0404: {for general liquid treatment, e.g. etching followed by cleaning} - H10P 72/0406: {for cleaning followed by drying, rinsing, stripping, blasting or the like} - H10P 72/0412: {using mainly scrubbing means, e.g. brushes} - H10P 72/7626: {characterised by the construction of the shaft} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract The present disclosure relates to a fixture, the fixture is a fixture for a semiconductor etching machine, and the fixture includes: a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine; a cleaning mechanism, being rotatably arranged on the support mechanism; and at least one cleaning unit, being arranged on the cleaning mechanism. ## Claims ### Claim 1 A fixture, the fixture is a fixture for a semiconductor etching machine, the fixture comprises: a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine; a cleaning mechanism, being rotatably arranged on the support mechanism; and at least one cleaning unit, being arranged on the cleaning mechanism; wherein the cleaning mechanism comprises: a rotating unit, being rotatably arranged on the support mechanism, and the cleaning unit being arranged on the rotating unit; and a limiting unit, being detachably connected with the rotating unit and configured to limit a relative position of the rotating unit and the support mechanism; wherein the support mechanism comprises: an annular support unit, configured to be sleeved on an outside of the electrostatic chuck of the semiconductor etching machine, and the rotating unit being rotatably arranged on the annular support unit; and a connection unit, one end of the connection unit being detachably connected with the annular support unit, and the other end of the connection unit being arranged on the outer base of the electrostatic chuck of the semiconductor etching machine; wherein the cleaning unit comprises: a support part, being rotatably arranged on the rotating unit; and a positioning part, configured to position the support part at a preset position; wherein the limiting unit comprises: a limiting ring, wherein the limiting ring is sleeved on the annular support unit, and one end of the limiting ring is detachably connected with the rotating unit; and the other end of the limiting ring is provided with a first limiting member, the first limiting member is located below the annular support unit. ### Claim 2 (depends on 1) The fixture according to claim 1, wherein the first limiting member is an annular plate and the first limiting member is fixedly connected with the limiting ring at 90 degrees. ### Claim 3 (depends on 1) The fixture according to claim 1, further comprising: a rotating mechanism, being arranged between the rotating unit and the annular support unit to rotate the rotating unit relative to the annular support unit. ### Claim 4 (depends on 3) The fixture according to claim 3, wherein the rotating mechanism comprises: a ball; or a roller, an axial direction of the roller is parallel to a radial direction of the annular support unit. ### Claim 5 (depends on 4) The fixture according to claim 4, wherein an annular rolling slot or a plurality of limiting slots are arranged on the annular support unit, and a plurality of the balls or a plurality of the rollers are located in the annular rolling slot or the plurality of limiting slots. ### Claim 6 (depends on 1) The fixture according to claim 1, wherein when the support part is positioned at the preset position, an inner edge of the support part is adapted to an inner edge of the rotating unit. ### Claim 7 (depends on 1) The fixture according to claim 1, further comprising: at least one operation part, being detachably connected to the cleaning mechanism. ### Claim 8 (depends on 1) The fixture according to claim 1, wherein the at least one cleaning unit comprise a plurality of cleaning units, and the plurality of cleaning units are arranged at equal intervals. ### Claim 9 A fixture, the fixture is a fixture for a semiconductor etching machine, the fixture comprises: a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine; a cleaning mechanism, being rotatably arranged on the support mechanism; and at least one cleaning unit, being arranged on the cleaning mechanism; wherein the cleaning mechanism comprises: a rotating unit, being rotatably arranged on the support mechanism, and the cleaning unit being arranged on the rotating unit; and a limiting unit, being detachably connected with the rotating unit and configured to limit a relative position of the rotating unit and the support mechanism; wherein the support mechanism comprises: an annular support unit, configured to be sleeved on an outside of the electrostatic chuck of the semiconductor etching machine, and the rotating unit being rotatably arranged on the annular support unit; and a connection unit, one end of the connection unit being detachably connected with the annular support unit, and the other end of the connection unit being arranged on the outer base of the electrostatic chuck of the semiconductor etching machine; wherein the cleaning unit comprises: a support part, being rotatably arranged on the rotating unit; and a positioning part, configured to position the support part at a preset position; wherein the limiting unit comprises: a limiting part, wherein the limiting part is arranged at intervals on an outside of the annular support unit, one end of the limiting part is detachably connected with the rotating unit, the other end of the limiting part is provided with a second limiting member, and the second limiting member is located below the annular support unit. ### Claim 10 (depends on 9) The fixture according to claim 9, wherein the limiting part is an arc-shaped limiting part, and the second limiting member is an arc-shaped flat plate structure, the second limiting member is fixedly connected with the limiting part at 90 degrees. ### Claim 11 (depends on 9) The fixture according to claim 9, further comprising: a rotating mechanism, being arranged between the rotating unit and the annular support unit to rotate the rotating unit relative to the annular support unit. ### Claim 12 (depends on 11) The fixture according to claim 11, wherein the rotating mechanism comprises: a ball; or a roller, an axial direction of the roller is parallel to a radial direction of the annular support unit. ### Claim 13 (depends on 12) The fixture according to claim 12, wherein an annular rolling slot or a plurality of limiting slots are arranged on the annular support unit, and a plurality of the balls or a plurality of the rollers are located in the annular rolling slot or the plurality of limiting slots. ### Claim 14 (depends on 9) The fixture according to claim 9, wherein when the support part is positioned at the preset position, an inner edge of the support part is adapted to an inner edge of the rotating unit. ### Claim 15 (depends on 9) The fixture according to claim 9, further comprising: at least one operation part, being detachably connected to the cleaning mechanism. ### Claim 16 (depends on 9) The fixture according to claim 9, wherein at least one cleaning unit comprise a plurality of cleaning units, and the plurality of cleaning units are arranged at equal intervals. ### Claim 17 A fixture, the fixture is a fixture for a semiconductor etching machine, the fixture comprises: a support mechanism, configured to be arranged on an outer base of an electrostatic chuck of the semiconductor etching machine; a cleaning mechanism, being rotatably arranged on the support mechanism; and at least one cleaning unit, being arranged on the cleaning mechanism; wherein the cleaning mechanism comprises: a rotating unit, being rotatably arranged on the support mechanism, and the cleaning unit being arranged on the rotating unit; and a limiting unit, being detachably connected with the rotating unit and configured to limit a relative position of the rotating unit and the support mechanism; wherein the support mechanism comprises: an annular support unit, configured to be sleeved on an outside of the electrostatic chuck of the semiconductor etching machine, and the rotating unit being rotatably arranged on the annular support unit; and a connection unit, one end of the connection unit being detachably connected with the annular support unit, and the other end of the connection unit being arranged on the outer base of the electrostatic chuck of the semiconductor etching machine; wherein the cleaning unit comprises: a support part, being rotatably arranged on the rotating unit; and a positioning part, configured to position the support part at a preset position; wherein the fixture further comprising: a rotating mechanism, being arranged between the rotating unit and the annular support unit to rotate the rotating unit relative to the annular support unit; wherein the rotating mechanism comprises: a ball; or a roller, an axial direction of the roller is parallel to a radial direction of the annular support unit; wherein an annular rolling slot or a plurality of limiting slots are arranged on the annular support unit, and a plurality of the balls or a plurality of the rollers are located in the annular rolling slot or the plurality of limiting slots. ### Claim 18 (depends on 17) The fixture according to claim 17, wherein when the support part is positioned at the preset position, an inner edge of the support part is adapted to an inner edge of the rotating unit. ### Claim 19 (depends on 17) The fixture according to claim 17, further comprising: at least one operation part, being detachably connected to the cleaning mechanism. ### Claim 20 (depends on 17) The fixture according to claim 17, wherein the at least one cleaning unit comprise a plurality of cleaning units, and the plurality of cleaning units are arranged at equal intervals.