# US 12,191,170 B2 · Heater and heating base > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,191,170 B2 - Document ID: US12191170B2 - Status: Granted - Kind: B2 - Application number: 18/174,336 - Filed: 2023-02-24 - Published: 2023-07-13 - Granted: 2025-01-07 - Earliest claimed: 2020-08-25 - Assignees: Beijing Naura Microelectronics Equipment Co., Ltd. - Applicants: Beijing Naura Microelectronics Equipment Co., Ltd. - Inventors: Dongdong Li - Web page: https://patentgrep.com/patent/US12191170B2 ## CPC - H10P 72/0432: {mainly by conduction} - H05B 3/06: Heater elements structurally combined with coupling elements or holders - H05B 3/22: non-flexible - H10P 72/0434: {mainly by convection} - H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL ## Abstract The present disclosure provides a heater and a heating base. The heater is used in a semiconductor process apparatus and includes a heating body and a base configured to support the heating body. The base includes a base body and a plate connected to each other. The base body is opposite to the heating body and arranged at an interval. The plate is arranged between the base body and the heating body and is fixedly connected to the heating body. An elastic bending structure is arranged on at least one of the plate, the base body, or the connection place between the plate and the base body. The elastic bending structure is configured to cause the plate and the heating body to remain connected by generating elastic deformation when the plate and the base body expand and deform. ## Claims ### Claim 1 A heater for a semiconductor process apparatus comprising: a heating body; and a base configured to support the heating body and including: a base body arranged at a distance from the heating body; and a wall connected to the base body, arranged between the base body and the heating body, and fixedly connected to the heating body, an elastic bending structure being arranged on the base body and being configured to generate an elastic deformation to maintain the connection between the wall and the heating body when the wall and/or the base body expand to deform. ### Claim 2 (depends on 1) The heater according to claim 1, wherein: the elastic bending structure is configured to generate the elastic deformation either in a first direction or in the first direction and in a second direction; the heating body is in a circular shape; the first direction is parallel to a radial direction of the heating body; and the second direction is parallel to an axial direction of the heating body. ### Claim 3 (depends on 1) The heater according to claim 1, wherein the elastic bending structure includes at least one of: a first bending member protruding from a first reference surface toward a side inside the interval between the base body and the heating body, the first reference surface being a surface of the base body, where the first bending member is located opposite to the interval; and a second bending member protruding from a second reference surface toward a side away from the interval between the base body and the heating body, the second reference surface being a surface of the base body, where the second bending member is located away from the interval. ### Claim 4 (depends on 3) The heater according to claim 3, wherein: a shape of an orthographic projection of the first bending member on an axial cross-section of the heating body includes a U shape; and a shape of an orthographic projection of the second bending member on the axial cross-section of the heating body includes a U shape. ### Claim 5 (depends on 3) The heater according to claim 3, wherein: the first bending member is an annular bending member arranged around an axis of the heating body; and the second bending member is an annular bending member arranged around the axis of the heating body. ### Claim 6 (depends on 3) The heater according to claim 3, wherein: in response to the elastic bending structure including the first bending member, the base body includes: a center member; and an edge member arranged around the center member and fixedly connected to the wall, the first bending member being connected between the edge member and the center member. ### Claim 7 (depends on 3) The heater according to claim 3, wherein a gap is arranged between the first bending member and the heating body. ### Claim 8 (depends on 1) The heater according to claim 1, wherein a wall thickness of the elastic bending structure is d, wherein 2 mm≤d≤4 mm. ### Claim 9 (depends on 1) The heater according to claim 1, wherein: a first through-hole is arranged in the heating body, a second through-hole opposite to the first through hole is arranged in the base body, and the first through-hole and the second through-hole are configured for a pin to pass through; and the heater further includes an elastic tube member, two ends of the elastic tube member are sealedly connected to the heating body to seal the first through-hole and the second through-hole, respectively. ### Claim 10 (depends on 9) The heater according to claim 9, wherein the elastic bending structure is arranged at the base body and between the elastic tube member and the wall. ### Claim 11 (depends on 9) The heater according to claim 9, wherein the elastic tube member includes: a plurality of annular elastic rings sequentially connected along an axial direction of the elastic tube member to form a continuous tube member, any two neighboring elastic rings being configured to be folded or unfolded along the axial direction of the elastic tube member. ### Claim 12 (depends on 11) The heater according to claim 11, wherein a wall thickness of an elastic ring of the plurality of annular elastic rings is less than 0.15 mm. ### Claim 13 A heating base comprising: a heater including: a heating body; and a base configured to support the heating body and including: a base body arranged at a distance from the heating body, a first center hole being arranged in the base; and a wall connected to the base body, arranged between the base body and the heating body, and fixedly connected to the heating body, an elastic bending structure being arranged on the base body and being configured to generate an elastic deformation to maintain the connection between the wall and the heating body when the wall and/or the base body expand to deform; an insulation disc arranged at a bottom of the base and sealedly connected to the base to seal the first center hole, a second center hole corresponding to the first center hole being arranged in the insulation disc; and a bellows sealedly connected to a side of the insulation disc away from the heater to seal the second center hole. ### Claim 14 (depends on 13) The heating base according to claim 13, wherein: the elastic bending structure is configured to generate the elastic deformation either in a first direction or in the first direction and in a second direction; the heating body is in a circular shape; the first direction is parallel to a radial direction of the heating body; and the second direction is parallel to an axial direction of the heating body. ### Claim 15 (depends on 13) The heating base according to claim 13, wherein the elastic bending structure includes at least one of: a first bending member protruding from a first reference surface toward a side inside the interval between the base body and the heating body, the first reference surface being a surface of the base body, where the first bending member is located opposite to the interval; and a second bending member protruding from a second reference surface toward a side away from the interval between the base body and the heating body, the second reference surface being a surface of the base body, where the second bending member is located away from the interval. ### Claim 16 (depends on 15) The heating base according to claim 15, wherein: a shape of an orthographic projection of the first bending member on an axial cross-section of the heating body includes a U shape; and a shape of an orthographic projection of the second bending member on the axial cross-section of the heating body includes a U shape. ### Claim 17 (depends on 15) The heating base according to claim 15, wherein: the first bending member is an annular bending member arranged around an axis of the heating body; and the second bending member is an annular bending member arranged around the axis of the heating body. ### Claim 18 (depends on 15) The heating base according to claim 15, wherein: in response to the elastic bending structure including the first bending member, the base body includes: a center member; and an edge member arranged around the center member and fixedly connected to the wall, the first bending member being connected between the edge member and the center member. ### Claim 19 (depends on 15) The heating base according to claim 15, wherein a gap is arranged between the first bending member and the heating body. ### Claim 20 (depends on 13) The heating base according to claim 13, wherein a wall thickness of the elastic bending structure is d, wherein 2 mm≤d≤4 mm.