Vacuum system, low-pressure vacuum process device, and cutoff member
AssigneeChangxin Memory Technologies, Inc.
InventorTao Chen
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to the technical field of semiconductors, and provides a vacuum system, a low-pressure vacuum process device, and a cutoff member. The vacuum system includes: a vacuum pump; an exhaust pipeline, wherein one end of the exhaust pipeline is used to communicate with a chamber to be evacuated, and the other end of the exhaust pipeline communicates with the vacuum pump; and a cutoff member, wherein the cutoff member is connected to the exhaust pipeline, the cutoff member includes a filter portion and a carrier portion, the filter portion includes a passage, the carrier portion includes an accommodation groove, and the passage communicates with the accommodation groove.
Claims11
A vacuum system, comprising:
- a vacuum pump;
- an exhaust pipeline, wherein one end of the exhaust pipeline communicates with a chamber to be evacuated, and the other end of the exhaust pipeline communicates with the vacuum pump;
- a cutoff member connected to the exhaust pipeline, wherein the cutoff member comprises:
- a filter portion provided with an air intake end with a plurality of first perforations, an air exhaust end with a plurality of second perforations arranged as a honeycomb structure, and a discharge end with a plurality of third perforations, the first perforations, the second perforations and the third perforations being communicated with each other, an aperture of each first perforation and an aperture of each second perforation being larger than an aperture of each third perforation;
- and, wherein the filter portion is similar to a cylinder structure, the air intake end and the discharge end are respectively arranged on the upper and lower surfaces of the cylinder structure, and the air exhaust end is arranged on a circumferential outer surface of the cylinder structure;
- and
- a carrier portion positioned below and communicated with the filter portion, wherein the carrier portion is similar to a hollow hemispherical structure and an aperture of the hollow hemispherical structure gradually decreases in the direction away from the discharge end of the filter portion.
A cutoff member, comprising:
- a filter portion provided with an air intake end with a plurality of first perforations, an air exhaust end with a plurality of second perforations arranged as a honeycomb structure, and a discharge end with a plurality of third perforations, the first perforations, the second perforations and the third perforations being communicated with each other, an aperture of each first perforation and an aperture of each second perforation being larger than an aperture of each third perforation;
- and, wherein the filter portion is similar to a cylinder structure, the air intake end and the discharge end are respectively arranged on the upper and lower surfaces of the cylinder structure, and the air exhaust end is arranged on a circumferential outer surface of the cylinder structure;
- and
- a carrier portion, positioned below and communicated with the filter portion, wherein the carrier portion is similar to a hollow hemispherical structure and an aperture of the hollow hemispherical structure gradually decreases in the direction away from the discharge end of the filter portion.
Dependencies are inferred from the claim text.