# US 12,191,117 B2 · Compact low angle ion beam extraction assembly and processing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,191,117 B2 - Document ID: US12191117B2 - Status: Granted - Kind: B2 - Application number: 17/503,334 - Filed: 2021-10-17 - Published: 2023-04-20 - Granted: 2025-01-07 - Earliest claimed: 2021-10-15 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Costel Biloiu; Jay R. Wallace; Solomon Belangedi Basame; Kevin R. Anglin; Tyler Rockwell - Web page: https://patentgrep.com/patent/US12191117B2 ## CPC - H01J 37/32412: {Plasma immersion ion implantation} - H01J 37/32357: {Generation remote from the workpiece, e.g. down-stream} - H01J 37/32422: {Arrangement for selecting ions or species in the plasma} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract An extraction assembly may include an extraction plate for placement along a side of a plasma chamber, and having an extraction aperture, elongated along a first direction, and having an aperture height, extending along a second direction, perpendicular to the first direction. The extraction plate defines an inner surface along the extraction aperture, lying in a first plane. A beam blocker is disposed over the extraction aperture, and has an outer surface, disposed in a second plane, different than the first plane. As such, the beam blocker overlaps with the extraction plate along a first edge of the extraction aperture by a first overlap distance, and overlaps with the extraction plate along a second edge of the extraction aperture by a second overlap distance, so as to define a first extraction slit, along the first edge, and a second extraction slit along the second edge. ## Claims ### Claim 1 An extraction assembly, comprising: an extraction plate for placement along a side of a plasma chamber, the extraction plate having an extraction aperture, elongated along a first direction, and having an extraction aperture height, extending along a second direction, perpendicular to the first direction, the extraction plate defining an inner surface along the extraction aperture, lying in a first plane; a beam blocker, disposed over the extraction aperture, and having an outer surface, disposed in a second plane, different than the first plane, toward an inner side of the extraction plate, wherein the beam blocker overlaps with the extraction plate along a first edge of the extraction aperture by a first overlap distance, and overlaps with the extraction plate along a second edge of the extraction aperture by a second overlap distance, so as to define a first extraction slit, along the first edge, and a second extraction slit along the second edge, wherein the beam blocker comprises a first ridge, disposed along a first end of the beam blocker, and a second ridge, disposed along a second end of the beam blocker; and a spacer assembly, the spacer assembly comprising a first set, disposed between the extraction plate and the first ridge, and further comprising a second set, disposed between the extraction plate and the second ridge. ### Claim 2 (depends on 1) The extraction assembly of claim 1, wherein the extraction plate and the beam blocker comprise a dielectric material. ### Claim 3 (depends on 1) The extraction assembly of claim 1, wherein the first plane and the second plane define an extraction slit width for the first extraction slit and the second extraction slit, the extraction slit width being a separation distance between the first plane and the second plane along a perpendicular to the first plane and the second plane. ### Claim 4 (depends on 3) The extraction assembly of claim 3, wherein the first overlap distance and the second overlap distance equal 10% to 100% of the extraction slit width. ### Claim 5 (depends on 4) The extraction assembly of claim 4, wherein the extraction slit width is equal to 5% to 40% of the extraction aperture height. ### Claim 6 (depends on 1) The extraction assembly of claim 1, wherein the extraction plate and the beam blocker are interoperative to extract a first ion beamlet from the first extraction slit and a second ion beamlet from the second extraction slit, wherein the first ion beamlet and the second ion beamlet generate a beam angular spread of less than 10 degrees. ### Claim 7 (depends on 6) The extraction assembly of claim 6, wherein the first ion beamlet from the first extraction slit and the second ion beamlet define an beam mean angle of less than 20 degrees with respect to a perpendicular to the first plane and the second plane. ### Claim 8 A processing apparatus, comprising: a plasma chamber to house a plasma; an extraction plate arranged along a side of a plasma chamber, the extraction plate having an extraction aperture, elongated along a first direction, and having an extraction aperture height, extending along a second direction, perpendicular to the first direction, the extraction plate defining an inner surface along the extraction aperture, lying in a first plane; a beam blocker, disposed over the extraction aperture, and having an outer surface, disposed in a second plane, different than the first plane, toward an inner side of the extraction plate, wherein the beam blocker overlaps with the extraction plate along a first edge of the extraction aperture by a first overlap distance, and overlaps with the extraction plate along a second edge of the extraction aperture by a second overlap distance, so as to define a first extraction slit, along the first edge, and a second extraction slit along the second edge, wherein the beam blocker comprises a first ridge, disposed along a first end of the beam blocker, and a second ridge, disposed along a second end of the beam blocker; and a spacer assembly, the spacer assembly comprising a first set, disposed between the extraction plate and the first ridge, and further comprising a second set, disposed between the extraction plate and the second ridge. ### Claim 9 (depends on 8) The processing apparatus of claim 8, wherein the extraction plate and the beam blocker comprise a dielectric material. ### Claim 10 (depends on 8) The processing apparatus of claim 8, wherein the first plane and the second plane define an extraction slit width for the first extraction slit and the second extraction slit, the extraction slit width being a separation distance between the first plane and the second plane along a perpendicular to the first plane and the second plane. ### Claim 11 (depends on 10) The processing apparatus of claim 10, wherein the first overlap distance and the second overlap distance equal 10% to 100% of the extraction slit width. ### Claim 12 (depends on 10) The processing apparatus of claim 10, wherein the extraction slit width is equal to 5% to 40% of the extraction aperture height. ### Claim 13 (depends on 8) The processing apparatus of claim 8, wherein the extraction plate and the beam blocker are interoperative to extract a first ion beamlet from the first extraction slit and a second ion beamlet from the second extraction slit, wherein the first ion beamlet and the second ion beamlet generate a beam angular spread of less than 10 degrees. ### Claim 14 (depends on 13) The processing apparatus of claim 13, wherein the first ion beamlet from the first extraction slit and the second ion beamlet define an beam mean angle of less than 20 degrees with respect to a perpendicular to the first plane and the second plane. ### Claim 15 A compact angled ion beam apparatus, comprising: a plasma chamber to house a plasma; and an extraction assembly, disposed adjacent to the plasma chamber, and comprising: an extraction plate arranged along a side of a plasma chamber, the extraction plate having an extraction aperture, elongated along a first direction, and having an aperture height, extending along a second direction, perpendicular to the first direction, the extraction plate defining an inner surface along the extraction aperture, lying in a first plane; a beam blocker, disposed over the extraction aperture, and having an outer surface, disposed in a second plane, different than the first plane, toward an inner side of the extraction plate; and a coupling assembly, reversibly connecting the beam blocker to the extraction plate, wherein the coupling assembly is configured to adjust an overlap distance between the extraction plate and the beam blocker along the second direction, and to adjust a slit width of the extraction assembly, the slit width comprising a distance between the extraction plate and beam blocker along a third direction, perpendicular to the first plane and the second plane. ### Claim 16 (depends on 15) The compact angled ion beam apparatus of claim 15, the beam blocker comprising: a first ridge, disposed along a first end of the beam blocker, and a second ridge, disposed along a second end of the beam blocker; and a shim assembly, the shim assembly comprising a first set, disposed between the extraction plate and the first ridge, and further comprising a second set, disposed between the extraction plate and the second ridge.