Systems and methods for optimizing full horizontal scanned beam distance

An apparatus for optimizing a scanned beam distance of a spot ion beam, the apparatus comprising:

• a beam scanner operable to scan the spot ion beam with respect to an intended beam-scan area;
• a Faraday cup along a first side of an intended beam-scan area;
• a Faraday profiler along a second side of the intended beam-scan area, wherein the Faraday cup is operable to measure a first beam current of the spot ion beam and the Faraday profiler is operable to measure a second beam current of the spot ion beam;
• and
• a beam calibration component, comprising a controller and a memory, the memory comprising a calibration routine, operative on the controller, to:
• determine a first overscan value by adding a first product and a length dimension measured between a first aperture of the Faraday cup at a Faraday cup position and the first side of the intended beam-scan area, wherein the first product is obtained by multiplying a beamwidth of the spot ion beam by a first multiplier, and wherein the first multiplier is determined from a first predetermined threshold of the first beam current of the spot ion beam at the Faraday cup position;
• and
• determine a second overscan value by multiplying the beamwidth with a second multiplier, wherein the second multiplier is determined from a second predetermined threshold of the second beam current of the spot ion beam at a Faraday profiler position.

A non-transitory computer-readable storage medium, the non-transitory computer-readable storage medium including instructions that when executed by a computer, cause the computer to:

• scan, by a beam scanner, a spot ion beam with respect to an intended beam-scan area;
• measure a first beam current of the spot ion beam at a first Faraday cup positioned along a first side of the intended beam-scan area, and measure a second beam current of the spot ion beam at a second Faraday cup positioned along a second side of the intended beam-scan area;
• determine a first overscan value by adding a first product and a length dimension measured between a first aperture of a first Faraday cup at the first Faraday cup position and the first side of the intended beam-scan area, wherein the first product is obtained by multiplying a beamwidth of the ion beam by a first multiplier, and wherein the first multiplier is determined from a first predetermined threshold of the first beam current of the ion beam at the first Faraday cup position;
• and
• determine a second overscan value by multiplying the beamwidth with a second multiplier, wherein the second multiplier is determined from a second predetermined threshold of the second beam current of the ion beam at the second Faraday cup position.