# US 12,191,064 B2 · Nanomagnetic inductor cores, inductors and devices incorporating such cores, and associated manufacturing methods

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- Number: US 12,191,064 B2
- Document ID: US12191064B2
- Status: Granted
- Kind: B2
- Application number: 18/442,290
- Filed: 2024-02-15
- Published: 2024-06-06
- Granted: 2025-01-07
- Earliest claimed: 2019-09-30
- Assignees: Murata Manufacturing Co., Ltd.
- Applicants: Murata Manufacturing Co., Ltd.
- Inventors: Frédéric Voiron; Mohamed Mehdi Jatlaoui; Julien El Sabahy
- Web page: https://patentgrep.com/patent/US12191064B2

## CPC

- H01F 1/0063: {in a non-magnetic matrix, e.g. granular solids (granular films H01F10/007)}
- H01F 27/24: Magnetic cores
- H01F 17/0006: {Printed inductances (printed coils for dynamo-electric machines H02K3/26; printed circuits H05K)}
- H01F 17/0033: {with the coil helically wound around a magnetic core}
- H01F 27/28: Coils; Windings; Conductive connections
- H01F 41/0206: {Manufacturing of magnetic cores by mechanical means (magnetic cores per se H01F27/24)}
- H01F 41/046: {structurally combined with ferromagnetic material}
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

## Abstract

A nanomagnetic inductor core that includes: a porous, electrically-insulating template having high-permeability material in the pores thereof to constitute elongated nanowires, and wherein the elongated nanowires are segmented along their axial direction; and a segment of dielectric material interposed between adjacent segments of the high-permeability material along the axial direction of the nanowire; wherein each segment of the high-permeability material has a length, in the axial direction of the nanowire, no greater than a size of a single magnetic domain, and wherein a maximal cross-sectional dimension of the nanowire is no greater than the size of the single magnetic domain. Inductors and LC interposers using such nanomagnetic inductor cores, as well as associated fabrication methods.

## Claims

### Claim 1

A nanomagnetic inductor core comprising:
a porous, electrically-insulating template having high-permeability material in the pores thereof to constitute elongated nanowires, wherein the elongated nanowires are segmented along their axial direction; and
a segment of dielectric material interposed between adjacent segments of the high-permeability material along the axial direction of the nanowire.

### Claim 2 (depends on 1)

The nanomagnetic inductor core according to claim 1, wherein each segment of the high-permeability material has a length, in the axial direction of the nanowire, no greater than a size of a single magnetic domain.

### Claim 3 (depends on 1)

The nanomagnetic inductor core according to claim 1, wherein a maximal cross-sectional dimension of the nanowire is no greater than a size of a single magnetic domain.

### Claim 4 (depends on 1)

The nanomagnetic inductor core according to claim 1, wherein each segment of the high-permeability material includes segments made of one or more materials selected in the group of Zn, Fe, Ni, Co, Mn, Cr, mixtures and alloys thereof, permalloy, ZrO and CoZr.

### Claim 5 (depends on 1)

The nanomagnetic inductor core according to claim 1, wherein the porous, electrically-insulating template is made of porous anodic aluminum oxide or another porous dielectric material.

### Claim 6 (depends on 1)

The nanomagnetic inductor core according to claim 1, wherein the porous, electrically-insulating template is made of a porous dielectric material.

### Claim 7 (depends on 1)

An inductor comprising:
a first conductor;
a second conductor; and
the nanomagnetic inductor core according to claim 1,
wherein the first conductor and the second conductor are electrically interconnected to encircle the nanomagnetic inductor core.

### Claim 8 (depends on 7)

The inductor according to claim 7, wherein the nanomagnetic inductor core is sandwiched between the first conductor and the second conductor, and the first conductor and the second conductor are electrically interconnected by via-hole conductors traversing the nanomagnetic inductor core.

### Claim 9 (depends on 1)

An inductor comprising a three-dimensional coil wound around the nanomagnetic inductor core according to claim 1.

### Claim 10 (depends on 1)

An inductor comprising:
the nanomagnetic inductor core according to claim 1; and
a two-dimensional coil on a surface of the nanomagnetic inductor coil.

### Claim 11 (depends on 1)

An inductor comprising:
a first nanomagnetic inductor core comprising the nanomagnetic inductor core according to claim 1;
a two-dimensional coil on a surface of the first nanomagnetic inductor core; and
a second nanomagnetic inductor core on the two-dimensional coil at a side thereof remote from the first nanomagnetic inductor core.

### Claim 12 (depends on 5)

An LC interposer comprising:
a substrate;
a capacitor comprising a nanoscale capacitive structure in pores of a first region within the substrate; and
an inductor according to claim 5, wherein the nanowires of the nanocomposite inductor core are in pores of a second region in the substrate.

### Claim 13

A method of fabricating a nanomagnetic inductor core, the method comprising:
forming elongated nanowires comprising high-permeability material in pores of an electrically-insulating porous template, the nanowires being segmented along their axial direction; and
interposing a segment of dielectric material between adjacent segments of the high-permeability material along the axial direction of the nanowire.

### Claim 14 (depends on 13)

The method of fabricating a nanomagnetic inductor core according to claim 13, wherein each segment of the high-permeability material has a length, in the axial direction of the nanowire, no greater than a size of a single magnetic domain.

### Claim 15 (depends on 13)

The method of fabricating a nanomagnetic inductor core according to claim 13, wherein a maximal cross-sectional dimension of the nanowire is no greater than a size of a single magnetic domain.
