# US 12,190,950 B2 · Variable resistance nonvolatile storage device and write method therefor

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- Number: US 12,190,950 B2
- Document ID: US12190950B2
- Status: Granted
- Kind: B2
- Application number: 18/057,067
- Filed: 2022-11-18
- Published: 2023-03-16
- Granted: 2025-01-07
- Earliest claimed: 2020-07-09
- Assignees: Nuvoton Technology Corporation Japan
- Applicants: Nuvoton Technology Corporation Japan
- Inventors: Ken Kawai; Koji Katayama
- Web page: https://patentgrep.com/patent/US12190950B2

## CPC

- G11C 13/0069: {Writing or programming circuits or methods}
- G11C 13/0007: {comprising metal oxide memory material, e.g. perovskites}
- G11C 13/0026: {Bit-line or column circuits}
- G11C 13/003: {Cell access}
- G11C 13/0011: {comprising conductive bridging RAM [CBRAM] or programming metallization cells [PMCs]}
- G11C 2013/0078: {Write using current through the cell}
- G11C 2013/0083: {Write to perform initialising, forming process, electro forming or conditioning}
- G11C 2213/32: Material having simple binary metal oxide structure
- G11C 2213/72: Array wherein the access device being a diode
- G11C 2213/79: Array wherein the access device being a transistor
- G11C: STATIC STORES (semiconductor memory devices H10B)

## Abstract

A variable resistance nonvolatile storage device includes: a variable resistance element having a state reversibly changeable between a high resistance state and a low resistance state; and a current supply circuit that supplies the variable resistance element with a low-resistance changing current for changing the state from the high resistance state to the low resistance state. The low-resistance changing current has a waveform that includes a first period and a second period along a time axis, the second period being subsequent to the first period. The current supply circuit applies to the variable resistance element: a first current during the first period; and a second current during the second period, the second current being smaller than the first current. The first current is not zero at an end of the first period, and the second current is not zero at a start of the second period.

## Claims

### Claim 1

A variable resistance nonvolatile storage device comprising:
a variable resistance element having a state reversibly changeable between a high resistance state and a low resistance state; and
a current supply circuit that supplies the variable resistance element with a low-resistance changing current for changing the state from the high resistance state to the low resistance state,
wherein the low-resistance changing current has a waveform that includes a first period and a second period along a time axis, the second period being subsequent to the first period,
the current supply circuit applies to the variable resistance element:
a first current during the first period; and
a second current during the second period, the second current being smaller than the first current,
the first current is not zero at an end of the first period, and
the second current is not zero at a start of the second period.

### Claim 2 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the first current is a constant current.

### Claim 3 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the first current has a peak value greater than a peak value of the second current.

### Claim 4 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the waveform of the low-resistance changing current is a descending step form.

### Claim 5 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the current supply circuit supplies the variable resistance element with:
a first constant current during the first period; and
a second constant current during the second period, the second constant current being smaller than the first constant current.

### Claim 6 (depends on 5)

The variable resistance nonvolatile storage device according to claim 5,
wherein the current supply circuit includes:
a first constant current source; and
a second constant current source, and
the current supply circuit generates:
the first constant current by superimposing a constant current from the first constant current source and a constant current from the second constant current source during the first period; and
the second constant current that is one of the constant current from the first constant current source or the constant current from the second constant current source during the second period.

### Claim 7 (depends on 6)

The variable resistance nonvolatile storage device according to claim 6,
wherein the current supply circuit includes:
a first switch connected to the first constant current source; and
a second switch connected to the second constant current source, and
the current supply circuit supplies the variable resistance element with:
the first constant current by placing both the first switch and the second switch in a conductive state during the first period; and
the second constant current by placing one of the first switch or the second switch in a non-conductive state and placing a remaining one of the first switch or the second switch in the conductive state during the second period.

### Claim 8 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the first period is shorter than the second period.

### Claim 9 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the first period is at most 10 percent of the second period.

### Claim 10 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the first period is at most 5 ns, and
the second period is at least 50 ns.

### Claim 11 (depends on 5)

The variable resistance nonvolatile storage device according to claim 5,
wherein the second constant current is at most 60 percent of the first constant current.

### Claim 12 (depends on 5)

The variable resistance nonvolatile storage device according to claim 5,
wherein the first constant current is at least 125 μA, and
the second constant current is at most 75 μA.

### Claim 13 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1,
wherein the variable resistance element includes:
a first electrode;
a second electrode across from the first electrode; and
a variable resistance layer between the first electrode and the second electrode, and
the variable resistance layer includes a transition metal oxide.

### Claim 14 (depends on 13)

The variable resistance nonvolatile storage device according to claim 13,
wherein the transition metal oxide includes at least one of a tantalum oxide or a hafnium oxide.

### Claim 15 (depends on 13)

The variable resistance nonvolatile storage device according to claim 13,
wherein the variable resistance element is disposed above a semiconductor substrate, and
the second electrode is more spaced apart from the semiconductor substrate than the first electrode is from the semiconductor substrate.

### Claim 16 (depends on 1)

The variable resistance nonvolatile storage device according to claim 1, further comprising:
a plurality of memory cells disposed in a matrix,
wherein the plurality of memory cells each include:
a switch element; and
the variable resistance element connected in series to the switch element.

### Claim 17 (depends on 16)

The variable resistance nonvolatile storage device according to claim 16,
wherein the switch element is an NMOS transistor or a bidirectional diode.

### Claim 18

A write method for a variable resistance nonvolatile storage device that includes a variable resistance element that is a memory cell and has a state reversibly changeable between a high resistance state and a low resistance state, the write method being a method for changing the state of the variable resistance element from the high resistance state to the low resistance state, the write method comprising:
supplying the variable resistance element with a first current during a first period; and
supplying the variable resistance element with a second current during a second period subsequent to the first period, the second current being smaller than the first current,
wherein the first current is not zero at an end of the first period, and
the second current is not zero at a start of the second period.
