Method for forming a HAMR recording head with a protruding near-field transducer
AssigneeSeagate Technology LLC
InventorsMichael A. Seigler, Peng Zhang, David James Ellison, James D. Kiely, Edwin F. Rejda
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AssigneeSeagate Technology LLC
InventorsMichael A. Seigler, Peng Zhang, David James Ellison, James D. Kiely, Edwin F. Rejda
Estimating the term…
A method involves forming a recording head that comprises a waveguide, a write pole, and a near-field transducer proximate the write pole. The near-field transducer has an extended portion extending towards a surface of the recording head and operable to direct plasmons to a recording medium. The surface of the recording head is lapped to form a lapped surface. A resist or hardmask is patterned on the lapped surface in a region that encompasses the extended portion. The lapped surface is etched with the resist or hardmask pattern to form a media-facing surface such that the extended portion protrudes beyond the media-facing surface by a first distance, and the resist or hardmask is removed.
A method of making a recording head on a wafer, comprising:
Dependencies are inferred from the claim text.