Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment

A system comprising non-transitory memory and a processing device coupled to the non-transitory memory, wherein the processing device is configured to:

• obtain sensor data during a first manufacturing procedure of a manufacturing chamber;
• generate summary data based on the sensor data, generating the summary data comprising:
• identifying a steady state portion of the sensor data and generating a first portion of the summary data based on the steady state portion, and
• identifying a transient portion of the sensor data and generating a second portion of the summary data based at least in part on one or more differences between the transient portion and predicted data associated with the transient portion;
• receive reference data, wherein the reference data comprises data associated with the sensor data;
• provide the summary data and the reference data to a comparison model;
• receive from the comparison model a similarity score associated with the summary data and the reference data;
• and
• cause performance of a corrective action in view of the similarity score.

A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:

• obtaining sensor data during a first manufacturing procedure of a manufacturing chamber;
• generating summary data based on the sensor data, generating the summary data comprising:
• identifying a steady state portion of the sensor data and generating a first portion of the summary data based on the steady state portion, and
• identifying a transient portion of the sensor data and generating a second portion of the summary data based at least in part on one or more differences between the transient portion and predicted data associated with the transient portion;
• receiving reference data, wherein the reference data comprises data associated with the sensor data;
• providing the summary data and the reference data to a comparison model;
• receiving from the comparison model a similarity score associated with the summary data and the reference data;
• and
• causing performance of a corrective action in view of the similarity score.