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US 12,189,264 B2Granted
Traveling waveguide in Mach-Zehnder modulator to facilitate phase match and impedance match
AssigneeIntel Corporation
InventorsJianying Zhou, Jin Hong
Life of this patent
Estimating the term…
Abstract
Embodiments described herein may be related to apparatuses, processes, and techniques directed to phase match and impedance match to enable a higher baud rate for ultra-high-speed TW-MZM for 100 Gbaud or above for PAM applications, and/or 120 Gbaud or above for QAM applications. Embodiments described herein may include ultra-high-speed TW-MZM based on differential signal-to-signal (SS) TW using a push-pull PN structure. These embodiments facilitate high speeds for a TW-MZM due to decreased complexity by eliminating a ground in the TW. Other embodiments may be described and/or claimed.
Claims20
A traveling waveguide comprising:
- a first optical waveguide with a first side and a second side opposite the first side;
- a second optical waveguide with a first side and a second side opposite the first side, wherein the second optical waveguide is substantially parallel to the first optical waveguide;
- a P-doping material coupled with the first side of the first optical waveguide and the second side of the second optical waveguide;
- a first N-doping material coupled with the second side of the first optical waveguide;
- a second N-doping material coupled with the first side of the second optical waveguide;
- a first electrode of a radiofrequency (RF) waveguide coupled with the first N-doping material opposite the second side of the first optical waveguide;
- a second electrode of the RF waveguide coupled with the second N-doping material opposite the first side of the second optical waveguide, to facilitate phase match and impedance match within the traveling waveguide;
- and
- a termination component coupled with an end of the RF waveguide, wherein the termination component has an impedance that is based on an impedance of the RF waveguide and that is selected to reduce back reflection of the RF waveguide when the traveling waveguide is operating at a Nyquist frequency.
6 more elements
A method of forming a traveling waveguide, the method comprising:
- forming a first optical waveguide with a first side and a second side opposite the first side;
- forming a second optical waveguide with a first side and a second side opposite the first side;
- coupling a P-doping material coupled with the first side of the first optical waveguide and the second side of the second optical waveguide;
- coupling a first N-doping material with the second side of the first optical waveguide;
- coupling a second N-doping material with the first side of the second optical waveguide;
- coupling a first electrode of a radiofrequency (RF) waveguide with the first N-doping material opposite the second side of the first optical waveguide;
- coupling a second electrode of the RF waveguide with the second N-doping material opposite the first side of the second optical waveguide;
- and
- coupling a termination component with an end of the RF waveguide, wherein the termination component has an impedance that is based on an impedance of the RF waveguide and that is selected to reduce back reflection of the RF waveguide when the traveling waveguide is operating at a Nyquist frequency.
6 more elements
A system comprising:
- a traveling waveguide, comprising:
- a first optical waveguide with a first side and a second side opposite the first side;
- a second optical waveguide with a first side and a second side opposite the first side, wherein the second optical waveguide is substantially parallel to the first optical waveguide;
- a P-doping material coupled with the first side of the first optical waveguide and the second side of the second optical waveguide;
- a first N-doping material coupled with the second side of the first optical waveguide;
- a second N-doping material coupled with the first side of the second optical waveguide;
- a first electrode of a radiofrequency (RF) waveguide coupled with first N-doping material opposite the second side of the first optical waveguide;
- and
- a second electrode of the RF waveguide coupled with the second N-doping material opposite the first side of the second optical waveguide;
- a termination component coupled with the RF waveguide at an end of the traveling waveguide, wherein the termination component has an impedance that is based on an impedance of the traveling waveguide and that is selected to reduce back reflection of the RF waveguide when the traveling waveguide is operating at a Nyquist frequency;
- and
- an RF driver electrically coupled with the first electrode of the RF waveguide and with the second electrode of the RF waveguide at an end of the traveling waveguide opposite the termination component.
9 more elements
Dependencies are inferred from the claim text.