Sensor, method for producting same, and test method and device thereof

A sensor, comprising:

• a substrate and at least one infrared temperature measurement unit disposed on the substrate, wherein the infrared temperature measurement unit comprises at least one infrared temperature measurement sub-unit;
• the infrared temperature measurement sub-unit comprises:
• a first support portion, at least one second support portion, a thermocouple, and an infrared absorption portion,
• wherein the thermocouple comprises a first electrode and a second electrode, each of which comprises a first end and a second end;
• the first end of the first electrode and the first end of the second electrode are connected and disposed on the first support portion;
• the infrared absorption portion is disposed on the first support portion and covers the first end of the first electrode and the first end of the second electrode;
• the second end of the first electrode and the second end of the second electrode are not connected and disposed on the second support portion;
• and
• in the infrared temperature measurement unit, a cavity structure is comprised between at least the adjacent first support portion and the second support portion;
• wherein in the infrared temperature measurement sub-unit, the first support portion comprises a first sacrifice sub-portion and a first support sub-portion, and the second support portion comprises a second sacrifice sub-portion and a second support sub-portion;
• the first sacrifice sub-portion and the second sacrifice sub-portion are arranged on the same layer, and the first support sub-portion and the second support sub-portion are arranged on the same layer;
• wherein the first support sub-portion comprises a coverage sub-portion and an extension sub-portion surrounding the coverage sub-portion, and the coverage sub-portion covers the first sacrifice sub-portion;
• the first ends of the first electrode and the second electrode of the thermocouple are both disposed on the extension sub-portion;
• the infrared absorption portion is deposed on the extension sub-portion and covers the first end of the first electrode and the first end of the second electrode;
• the second ends of the first electrode and the second electrode are disposed on the second support sub-portion;
• the second support sub-portion covers the second sacrifice sub-portion;
• and
• in the infrared temperature measurement unit, a cavity structure is comprised between at least the adjacent first sacrifice sub-portion and the second sacrifice sub-portion.