Defect inspection device and defect inspection method
AssigneeShimadzu Corporation
InventorsKoki Yoshida, Kenji Takubo, Takahide Hatahori
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AssigneeShimadzu Corporation
InventorsKoki Yoshida, Kenji Takubo, Takahide Hatahori
Estimating the term…
A defect inspection device (100) includes an excitation unit that excites an elastic wave, an irradiation unit (2) that applies laser lights, a measurement unit (3) that measures the interfered laser lights, and a control unit that acquires vibration state information which is information about a state of the elastic wave excited in an inspection target (P) for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target (P), and extracts recommended frequencies (F) recommended for inspecting a defect of the inspection target (P) from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies.
A defect inspection device comprising:
A defect inspection method comprising:
Dependencies are inferred from the claim text.