Vessel for hydrogen fluoride gas generation

Abstract

In one embodiment, an anhydrous hydrogen fluoride generator vessel (also referred to herein as the “AHF generator vessel”) is provided. In several embodiments, an AHF generator vessel may include a container assembly, one or more shelves, and a center pipe assembly. The container assembly may include a lid assembly that may be removably coupled to the wall, and one or more feet. The center pipe assembly may include a base adapter, a center pipe, and a bottom adapter. In one embodiment, sodium bifluoride is loaded onto the one or more shelves which are positioned perpendicular to the center pipe and stacked upon one another. An external heat source may provide the heat to the vessel to thermally degrade the sodium bifluoride into HF and sodium fluoride (NaF). In various embodiments, the HF may be carried by a carrier gas out of the AHF generator vessel via the lid assembly.

Dependencies are inferred from the claim text.