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US 12,187,528 B2Granted
Substrate storage container
AssigneeShin-Etsu Polymer Co., Ltd.
InventorOsamu Ogawa
Life of this patent
Estimating the term…
Abstract
A substrate storage container includes: an opening on a front surface side; and a gas supply mechanism on a bottom surface. The gas supply mechanism has: an introduction path configured to receive a gas from a bottom surface side; a check valve disposed at a position that does not overlap with the introduction path in a horizontal plane along the bottom surface; and a flow path configured to supply the gas from the introduction path to the check valve.
Claims7
A substrate storage container, comprising:
- an opening on a front surface side;
- and
- a gas supply mechanism on a bottom surface, wherein
- the gas supply mechanism comprises:
- an introduction path configured to receive a gas from a bottom surface side;
- a check valve disposed at a position that does not overlap with the introduction path in a direction perpendicular to the bottom surface;
- and
- a flow path extending between the introduction path and the check valve and configured to supply the gas from the introduction path to the check valve.
5 more elements
Dependencies are inferred from the claim text.