Wafer processing method
AssigneeDisco Corporation
InventorMasaru Nakamura
Life of this patent
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Abstract
A wafer processing method includes a holding step of holding a wafer on a chuck table; a dressing step of cutting a peripheral marginal area of the wafer by a cutting blade mounted to a cutting unit to condition a state of a cutting edge; and a dividing step of cutting streets by the cutting blade mounted to the cutting unit to divide the wafer into individual device chips.
Claims19
A wafer processing method for dividing a wafer formed on a front surface thereof with a device area in which a plurality of devices are partitioned by a plurality of intersecting streets and a peripheral marginal area surrounding the device area into individual device chips, the wafer processing method comprising:
- a preparing step of preparing a cutting apparatus including a chuck table that holds the wafer, a cutting unit to which a cutting blade provided at a periphery thereof with a cutting edge for cutting the wafer held by the chuck table is rotatably mounted, an X-axis feeding mechanism that puts the chuck table and the cutting unit into relative processing feeding in an X-axis direction, a Y-axis feeding mechanism that puts the chuck table and the cutting unit into relative indexing feeding in a Y-axis direction orthogonal to the X-axis direction, and a Z-axis feeding mechanism that puts the cutting unit into cutting-in feeding in a Z-axis direction orthogonal to the X-axis direction and the Y-axis direction;
- a holding step of holding the wafer on the chuck table;
- a dressing step of cutting the peripheral marginal area by the cutting blade mounted to the cutting unit, to condition a state of the cutting edge, after the holding step is carried out, wherein the dressing step results in the formation of a plurality of cut-in grooves within the peripheral marginal area that do not extend into the device area;
- and
- a dividing step of cutting the streets by the cutting blade mounted to the cutting unit, to divide the wafer into the individual device chips.
A wafer processing method for dividing a wafer formed on a front surface thereof with a device area in which a plurality of devices are partitioned by a plurality of intersecting streets and a peripheral marginal area surrounding the device area into individual device chips, the wafer processing method comprising:
- a preparing step of preparing a cutting apparatus including a chuck table that holds the wafer, a cutting unit to which a cutting blade provided at a periphery thereof with a cutting edge for cutting the wafer held by the chuck table is rotatably mounted, an X-axis feeding mechanism that puts the chuck table and the cutting unit into relative processing feeding in an X-axis direction, a Y-axis feeding mechanism that puts the chuck table and the cutting unit into relative indexing feeding in a Y-axis direction orthogonal to the X-axis direction, and a Z-axis feeding mechanism that puts the cutting unit into cutting-in feeding in a Z-axis direction orthogonal to the X-axis direction and the Y-axis direction;
- a holding step of holding the wafer on the chuck table;
- a dressing step of cutting the peripheral marginal area by the cutting blade mounted to the cutting unit, to condition a state of the cutting edge, after the holding step is carried out, wherein the dressing step results in at least one cut-in groove that extends radially inwardly from an outer peripheral edge of the wafer, and further wherein the at least one cut-in groove extends in an oblique direction with respect to the intersecting streets;
- and
- a dividing step of cutting the streets by the cutting blade mounted to the cutting unit, to divide the wafer into the individual device chips.
A wafer processing method for dividing a wafer formed on a front surface thereof with a device area in which a plurality of devices are partitioned by a plurality of intersecting streets and a peripheral marginal area surrounding the device area into individual device chips, the wafer processing method comprising:
- a preparing step of preparing a cutting apparatus including a chuck table that holds the wafer, a cutting unit to which a cutting blade provided at a periphery thereof with a cutting edge for cutting the wafer held by the chuck table is rotatably mounted, an X-axis feeding mechanism that puts the chuck table and the cutting unit into relative processing feeding in an X-axis direction, a Y-axis feeding mechanism that puts the chuck table and the cutting unit into relative indexing feeding in a Y-axis direction orthogonal to the X-axis direction, and a Z-axis feeding mechanism that puts the cutting unit into cutting-in feeding in a Z-axis direction orthogonal to the X-axis direction and the Y-axis direction;
- a holding step of holding the wafer on the chuck table;
- a first dressing step of cutting the peripheral marginal area by the cutting blade mounted to the cutting unit, to condition a state of the cutting edge, after the holding step is carried out, wherein the first dressing step results in at least one first chord that is completely formed within the peripheral marginal area;
- a rotating step of rotating the wafer by 90 degrees;
- a second dressing step of cutting the peripheral marginal area by the cutting blade mounted to the cutting unit, to condition a state of the cutting edge, after the rotating step is carried out, wherein the second dressing step results in at least one second chord that is completely formed within the peripheral marginal area;
- and
- a dividing step of cutting the streets by the cutting blade mounted to the cutting unit, to divide the wafer into the individual device chips.
Dependencies are inferred from the claim text.