Pulse train annealing method and apparatus

An apparatus for treating a substrate, comprising:

• a first laser apparatus comprising an electrical switch and a laser radiation source, wherein the switch directly interrupts a laser radiation supplied by the laser radiation source;
• a substrate support movably disposed along an optical path of the laser radiation;
• a capacitor and a power supply, wherein the power supply is configured to charge the capacitor and configured to stop generation of energy when electricity provided by the capacitor falls below a power threshold;
• a controller coupled to the substrate support, the power supply, and the switch, wherein the controller is configured to operate the switch to generate a pulse train of electromagnetic radiation;
• and
• an optical assembly disposed along the optical path of the laser radiation between the first laser apparatus and the substrate support, wherein the optical assembly is positioned to receive the pulses of electromagnetic radiation and direct a pulse train of temporally shaped pulses of electromagnetic radiation, wherein the optical assembly is configured to combine the received pulses of electromagnetic radiation to form the temporally shaped pulses of electromagnetic radiation.

An apparatus for treating a substrate, comprising:

• a first laser apparatus comprising an electrical switch and a laser radiation source, wherein the switch directly interrupts a laser radiation supplied by the laser radiation source;
• a substrate support movably disposed along an optical path of the laser radiation;
• a capacitor and a power supply, wherein the power supply is configured to charge the capacitor and configured to stop generation of energy when electricity provided by the capacitor falls below a power threshold;
• a controller coupled to the substrate support, the power supply, and the switch, wherein the controller is configured to operate the switch to generate a pulse train of electromagnetic radiation and configured to operate the switch to generate the pulse train of pulses of electromagnetic radiation, the pulses of electromagnetic radiation having an interval between pulses of about 1 msec to about 20 msec, the pulse train of electromagnetic radiation comprising at least 30 pulses;
• and
• an optical assembly disposed along the optical path of the laser radiation between the first laser apparatus and the substrate support, wherein the optical assembly is positioned to receive the pulses of electromagnetic radiation and direct a pulse train of temporally shaped pulses of electromagnetic radiation, wherein the optical assembly is configured to combine the received pulses of electromagnetic radiation to form the temporally shaped pulses of electromagnetic radiation.