Spray coating device and spray coating method
AssigneeFUJIFILM Corporation
InventorEijiro Iwase
Life of this patent
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Abstract
An object is to provide a spray coating device and a coating method, with which a uniform coating film can be formed by spray coating with two liquids having reactivity, and in which precipitation of a reaction product on a periphery can also be prevented. The object is achieved by providing a transporting unit for transporting a substrate downward; a first spray nozzle; a second spray nozzle disposed below the first spray nozzle; a holding plate for holding the first spray nozzle and the second spray nozzle such that an angle formed by center lines of the first spray nozzle and the second spray nozzle is 5° to 150°; and a liquid film forming unit for forming a liquid film which flows from above to below on a surface of the holding plate.
Claims8
A spray coating device comprising:
- a transporting unit for transporting a substrate downward;
- a first spray nozzle for applying a liquid onto the substrate transported by the transporting unit;
- a second spray nozzle for applying a liquid onto the substrate transported by the transporting unit, the second spray nozzle being disposed below the first spray nozzle;
- a holding plate for holding the first spray nozzle and the second spray nozzle such that an angle formed by a center line of the first spray nozzle and a center line of the second spray nozzle is 5° to 150°;
- and
- a liquid film forming unit for forming a liquid film which flows from above to below on a surface of the holding plate on a substrate side.
Dependencies are inferred from the claim text.