# US 12,184,173 B2 · Pulsed-DC power generator and method of automatically adjusting arc extinction parameters > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,184,173 B2 - Document ID: US12184173B2 - Status: Granted - Kind: B2 - Application number: 17/713,603 - Filed: 2022-04-05 - Published: 2023-04-27 - Granted: 2024-12-31 - Earliest claimed: 2021-10-22 - Assignees: Delta Electronics, Inc. - Applicants: Delta Electronics, Inc. - Inventors: Wei-Hsun Lai; Chien-Yu Wang - Web page: https://patentgrep.com/patent/US12184173B2 ## CPC - H02M 3/155: using semiconductor devices only - C23C 14/3485: {using pulsed power to the target} - C23C 14/3492: {Variation of parameters during sputtering} - C23C 14/54: Controlling or regulating the coating process - H01J 37/32146: {Amplitude modulation, includes pulsing} - H01J 37/34: operating with cathodic sputtering (H01J37/36 takes precedence {; methods of cathodic sputtering C23C14/34}) - H01J 37/3405: {Magnetron sputtering} - H01J 37/3444: {Associated circuits} - H01J 37/3467: {Pulsed operation, e.g. HIPIMS} - H02M 1/08: Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters - H02M 3/156: with automatic control of output voltage or current, e.g. switching regulators - H02M 1/0095: {Hybrid converter topologies, e.g. NPC mixed with flying capacitor, thyristor converter mixed with MMC or charge pump mixed with buck} - H02M: APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF (transformers H01F; dynamo-electric converters H02K47/00; controlling transformers, reactors or choke coils, control or regulation of electric motors, generators or dynamo-electric converters H02P) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A pulsed-DC power generator is used to sputter a substrate in a chamber, and the power generator includes a first voltage source, a second voltage source, a switch unit, a control unit, and a detection unit. The control unit provides a first control signal to control the switching of the switch unit to integrate a first voltage of the first voltage source and a second voltage of the second voltage source into a pulse voltage. The control unit adjusts parameters of a first predetermined time period for arc extinction when the pulse voltage is in a working time period of the first voltage, and the number that a voltage value of the first voltage in a voltage variation to be higher than a range is higher than the number of occurrence. ## Claims ### Claim 1 A pulsed-DC power generator configured to sputter a target in a chamber, the power generator comprising: a first voltage source configured to generate a first voltage, a second voltage source configured to generate a second voltage with a polarity opposite to the first voltage, a switch unit coupled between the first voltage source and the second voltage source, a control unit coupled to the switch unit, and configured to provide a first control signal to control the switching of the switch unit so that the first voltage and the second voltage generate a pulse voltage at an output end, and a detection unit coupled to the output end and the control unit, and configured to detect the pulse voltage at the output end, wherein the control unit determines that an arc is generated on the surface of the target when the pulse voltage is in a working time period of the first voltage and a voltage variation of the first voltage is higher than a range, and the control unit is configured to control the switch unit to switch the pulse voltage to the second voltage and maintain the second voltage for a first determined time period. ### Claim 2 (depends on 1) The power generator as claimed in claim 1, wherein the control unit is configured to provide a second control signal to control the switching of the switch unit in a second determined time period after the first determined time period, and a switching frequency or a duty cycle of the second control signal is different from that of the first control signal. ### Claim 3 (depends on 2) The power generator as claimed in claim 2, wherein the first control signal comprises a first switching frequency and a first duty cycle, and the second control signal comprises a second switching frequency and a second duty cycle; during the second determined time period, the control unit controls the second switching frequency to be the same as the first switching frequency, and controls the second duty cycle from less than the first duty cycle to be equal to the first duty cycle. ### Claim 4 (depends on 2) The power generator as claimed in claim 2, wherein the first control signal comprises a first switching frequency and a first duty cycle, and the second control signal comprises a second switching frequency and a second duty cycle; during the second determined time period, the control unit controls the second switching frequency to be higher than the first switching frequency, and controls the second duty cycle to be equal to the first duty cycle. ### Claim 5 (depends on 1) The power generator as claimed in claim 1, wherein the control unit sets a first number of occurrences within a unit time, and count a second number that the voltage variation of the pulse voltage higher than the range within the unit time; when the control unit determines that the second number is higher than the first number of occurrences, the control unit is configured to adjust a parameter of the first determined time period. ### Claim 6 (depends on 5) The power generator as claimed in claim 5, wherein the parameter is a time length; the control unit increases the time length of the first determined time period according to the second number being higher than the first number of occurrences. ### Claim 7 (depends on 5) The power generator as claimed in claim 5, wherein the parameter is a voltage; the control unit superimposes the voltage on the second voltage according to the second number being higher than the first number of occurrences. ### Claim 8 (depends on 2) The power generator as claimed in claim 2, wherein the control unit adjusts the second control signal back to the first control signal according to the end of the second determined time period. ### Claim 9 A method of automatically adjusting arc extinction parameters applied to a power generator to sputter a target in a chamber, the method comprising steps of: providing a first control signal to control the switching of a switch unit of the power generator so that the power generator to integrate a first voltage and a second voltage with a polarity opposite to the first voltage into a pulse voltage, detecting that an arc is generated on the surface of the target when the pulse voltage is in a working time period of the first voltage, and a voltage variation of the first voltage is higher than a range, and switching the pulse voltage to the second voltage and maintaining the second voltage for a first determined time period to perform an arc extinction. ### Claim 10 (depends on 9) The method of automatically adjusting arc extinction parameters as claimed in claim 9, further comprising a step of: providing a second control signal to control the switching of the switch unit in a second determined time period after the first determined time period, wherein a switching frequency or a duty cycle of the second control signal is different from that of the first control signal. ### Claim 11 (depends on 10) The method of automatically adjusting arc extinction parameters as claimed in claim 10, further comprising steps of: controlling a second switching frequency of the second control signal to be the same as a first switching frequency of the first control signal, and increasing a second duty cycle of the second control signal from a first duty cycle of the first control signal to be equal to the first duty cycle. ### Claim 12 (depends on 10) The method of automatically adjusting arc extinction parameters as claimed in claim 10, further comprising steps of: controlling a second switch frequency of the second control signal to be higher than a first switching frequency of the first control signal, and controlling a second duty cycle of the second control signal to be equal to a first duty cycle of the first control signal. ### Claim 13 (depends on 9) The method of automatically adjusting arc extinction parameters as claimed in claim 9, further comprising steps of: setting a predetermined density, and the predetermined density is a first number of occurrences within a unit time, counting a second number that the voltage variation of the pulse voltage higher than the range within the unit time, determining that the second number be higher than the predetermined density, and adjusting a parameter of the first determined time period. ### Claim 14 (depends on 13) The method of automatically adjusting arc extinction parameters as claimed in claim 13, wherein the parameter is a time length, and the method further comprises steps of: determining that the second number is higher than the predetermined density, and increasing the time length of the first determined time period. ### Claim 15 (depends on 13) The method of automatically adjusting arc extinction parameters as claimed in claim 13, wherein the parameter is a voltage, and the method further comprises steps of: determining that the second number is higher than the predetermined density, and superimposing the voltage on the second voltage. ### Claim 16 (depends on 10) The method of automatically adjusting arc extinction parameters as claimed in claim 10, further comprising steps of: determining that the second determined time period being to end, and adjusting the second control signal back to the first control signal.