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US 12,183,689 B2Granted
Ceramic substrate and manufacturing method therefor
AssigneeAmosense Co., Ltd.
InventorJi-Hyung Lee
Life of this patent
Estimating the term…
Abstract
Provided are a ceramic substrate and a method of manufacturing the same, which suppress a warpage phenomenon caused by a difference in volumes occupied by upper and lower metal layers of a ceramic base material and controls areas of the upper and lower metal layers especially when thicknesses of the upper and lower metal layers on the ceramic base material are equal to each other, thereby reducing a defect rate of the ceramic substrate.
Claims13
A ceramic substrate comprising:
- a ceramic base material;
- a first electrode layer formed on the ceramic base material;
- and
- a second electrode layer formed under the ceramic base material,
- wherein Equation (1) below is satisfied:
- 85
-
- %
- ≤
- V
- 1
- V
- 2
- ≤
- 105
-
- %
- Equation
-
-
- (
- 1
- )
- (wherein, V1 refers to a volume of the first electrode layer, and V2 refers to a volume of the second electrode layer),
- wherein a camber ration R defined by Equation (3) below is less than or equal to 0.4%:
- R
- =
- T
- -
- t
- L
- ×
- 100
- Equation
-
-
- (
- 3
- )
- wherein, T refers to a minimum length from a highest position of the entire ceramic substrate including the first electrode and the second electrode to a plane when the ceramic substrate is arranged on the plane, t refers to a thickness of the ceramic substrate, and L refers to a length of the ceramic substrate,
- wherein a relationship between (T-t0), which is a difference between a minimum length T from a highest position of the ceramic substrate to a plane and a thickness to of the ceramic substrate, and a length (L0) of the ceramic substrate satisfies Equation (4) below:
- T−t0≤0.004L0 Equation (4).
39 more elements
A method of manufacturing a ceramic substrate, the method comprising:
- preparing a ceramic base material;
- forming a first electrode layer on the ceramic base material;
- and
- forming a second electrode layer under the ceramic base material,
- wherein Equation (1) below is satisfied:
- 85
-
- %
- ≤
- V
- 1
- V
- 2
- ≤
- 105
-
- %
- Equation
-
-
- (
- 1
- )
- wherein, V1 refers to a volume of the first electrode layer, and V2 refers to a volume of the second electrode layer,
- wherein a camber ratio R defined by Equation (3) below is less than or equal to 0.4%:
- R
- =
- T
- -
- t
- L
- ×
- 100
- Equation
-
- (
- 3
- )
- wherein, T refers to a minimum length from a highest position of the entire ceramic substrate including the first electrode and the second electrode to a plane when the ceramic substrate is arranged on the plane, t refers to a thickness of the ceramic substrate, and L refers to a length of the ceramic substrate,
- wherein a relationship between (T-t0), which is a difference between a minimum length T from a highest position of the ceramic substrate to a plane and a thickness to of the ceramic substrate, and a length (L0) of the ceramic substrate satisfies Equation (4) below:
- T−t0≤0.004L0 Equation (4).
38 more elements
Dependencies are inferred from the claim text.