# US 12,183,619 B2 · Method of delivering substrate, and substrate delivery system

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- Number: US 12,183,619 B2
- Document ID: US12183619B2
- Status: Granted
- Kind: B2
- Application number: 17/552,659
- Filed: 2021-12-16
- Published: 2022-06-23
- Granted: 2024-12-31
- Earliest claimed: 2020-12-23
- Assignees: Tokyo Electron Limited
- Applicants: Tokyo Electron Limited
- Inventors: Takehiro Shindo
- Web page: https://patentgrep.com/patent/US12183619B2

## CPC

- H10P 72/3302: {Mechanical parts of transfer devices}
- H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins}
- B23Q 7/005: {Lifting devices}
- H10P 72/3306: {Horizontal transfer of a single workpiece}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines B23B27/00); MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT

## Abstract

A method of delivering a substrate includes moving a holder configured to hold the substrate in a substrate transfer device above a region where an elevating member configured to be capable of being raised/lowered is arranged; and delivering the substrate from the holder to the elevating member by simultaneously performing lowering of the holder and raising of the elevating member, or delivering the substrate from the elevating member to the holder by simultaneously performing lowering of the elevating member that supports the substrate and raising of the holder.

## Claims

### Claim 1

A method of delivering a substrate, the method comprising:
moving a pick configured to hold the substrate in a substrate transfer device above a region where a support pin configured to be capable of being raised/lowered is arranged;
delivering the substrate from the pick to the support pin by simultaneously performing lowering of the pick and raising of the support pin; and
delivering the substrate from the support pin to the pick by simultaneously performing lowering of the support pin that supports the substrate and raising of the pick.

### Claim 2 (depends on 1)

The method of claim 1, wherein the pick is configured to be capable of holding a plurality of substrates, and
wherein the delivering the substrate includes simultaneously delivering the plurality of substrates from the pick to the support pin or from the support pin to the pick.

### Claim 3

A substrate delivery system comprising:
a support pin configured to be capable of being raised/lowered;
a first driver configured to drive raising/lowering of the support pin;
a substrate transfer device including a pick configured to hold a substrate and to be capable of being raised/lowered and moving forward and backward with respect to the support pin;
a second driver configured to drive the raising/lowering and the forward/backward movement of the pick with respect to the support pin; and
a controller configured to control the first driver and the second driver so as to perform a process of:
moving the pick above a region where the support pin is arranged; delivering the substrate from the pick to the support pin by simultaneously performing the lowering of the pick and the raising of the support pin; and
delivering the substrate from the support pin to the pick by simultaneously performing the lowering of the support pin that supports the substrate and the raising of the pick.