# US 12,183,602 B2 · Substrate processing apparatus for processing substrates > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,183,602 B2 - Document ID: US12183602B2 - Status: Granted - Kind: B2 - Application number: 18/235,467 - Filed: 2023-08-18 - Published: 2023-12-07 - Granted: 2024-12-31 - Earliest claimed: 2018-10-31 - Assignees: ASM IP Holding B.V. - Applicants: ASM IP Holding B.V. - Inventors: Theodorus Oosterlaken; Chris de Ridder - Web page: https://patentgrep.com/patent/US12183602B2 ## CPC - H10P 72/0452: {characterised by the layout of the process chambers} - B65G 47/90: Devices for picking-up and depositing articles or materials - F27D 3/0084: {Charging; Manipulation of SC or SC wafers} - F27D 5/0037: {Supports specially adapted for semi-conductors} - F27D 7/06: Forming or maintaining special atmospheres or vacuum within heating chambers (supplying steam, vapour, gases or liquids F27D7/02) - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - H10P 72/0434: {mainly by convection} - H10P 72/0441: {Apparatus for sealing, encapsulating, glassing, decapsulating or the like} - H10P 72/0464: {characterised by the construction of the transfer chamber} - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/3402: {Mechanical parts of transfer devices} - B65G 2201/0297: Wafer cassette - H10P 72/3404: {Storage means} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) - F27D: DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE ## Abstract The disclosure relates to substrate processing apparatus, with a first and second reactor, each reactor configured for processing a plurality of substrates; and, a substrate handling robot constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the first and second reactor. The apparatus is constructed and arranged with a maintenance area between the first and second reactors to allow maintenance of the reactors from the maintenance area to both the first and second reactor. ## Claims ### Claim 1 A substrate processing apparatus, comprising: a housing comprising a front wall and a back wall, with a first side wall and a second side wall extending between the front wall and the back wall; a first and second module disposed within the housing; a substrate handling robot disposed within the housing, the substrate handling robot constructed and arranged to transfer substrates; a maintenance area between the respective side walls and between a back wall opening in the back wall and the first and second modules, with the substrate handling robot provided adjacent the maintenance area; and a handler door forming part of the housing, wherein the back wall in top view comprises a first leg and a second leg, wherein the maintenance area is between the first leg and the second leg, and wherein substrate processing apparatus is constructed and arranged to allow maintenance access by a maintenance worker standing in the maintenance area to the first module, the second module, and the substrate handling robot. ### Claim 2 (depends on 1) The substrate processing apparatus according to claim 1, wherein at least one of the first and second modules is provided in a lower part of the first leg of the substrate processing apparatus. ### Claim 3 (depends on 1) The substrate processing apparatus according to claim 1, further comprising a gas cabinet constructed and arranged to provide process gas to at least one of the first and the second modules. ### Claim 4 (depends on 1) The substrate processing apparatus according to claim 1, further comprising a gas exhaust pipe constructed and arranged to remove process gas from at least one of the first and the second modules. ### Claim 5 (depends on 1) The substrate processing apparatus according to claim 1, further comprising a back door between the first leg and the second leg, wherein the back door opens to at least partially define the back wall opening. ### Claim 6 (depends on 1) The substrate processing apparatus according to claim 1, comprising a module door openable in a direction of the maintenance area for allowing maintenance access by the maintenance worker to the first module from the maintenance area. ### Claim 7 (depends on 1) The substrate processing apparatus according to claim 1, wherein the handler door is removable. ### Claim 8 (depends on 1) The substrate processing apparatus according to claim 1, wherein the first side wall and the second side wall are parallel to each other and are perpendicular to the front wall. ### Claim 9 (depends on 1) The substrate processing apparatus according to claim 1, wherein a width of the housing is between 200 and 240 cm. ### Claim 10 (depends on 1) The substrate processing apparatus according to claim 1, wherein the maintenance area has a width between 60 and 120 cm. ### Claim 11 (depends on 1) The substrate processing apparatus according to claim 1, wherein the first module is provided with a first elevator to transfer a rack of substrates between a first lower region of the apparatus and the first module. ### Claim 12 (depends on 11) The substrate processing apparatus according to claim 11, wherein the first elevator comprises a moveable rack support arm having a bearing surface configured to support the substrate rack. ### Claim 13 (depends on 11) The substrate processing apparatus according to claim 11, wherein the first lower region of the apparatus is provided with a rack conveyor comprising an accommodation for racks and constructed and arranged to transfer racks between a plurality of rack positions in said first lower region. ### Claim 14 (depends on 13) The substrate processing apparatus according to claim 13, wherein the rack conveyor comprises a support platform having at least two cut-outs therein, the cut-outs being sized and shaped to allow a bearing surface of a rack support arm to translate vertically therethrough and to allow the platform to support a substrate rack. ### Claim 15 (depends on 11) The substrate processing apparatus according to claim 11, wherein the substrate handling robot is constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the rack in the first lower region. ### Claim 16 (depends on 11) The substrate processing apparatus according to claim 11, further comprising a gate valve provided between a substrate handler and the first lower region to create a minienvironment therein. ### Claim 17 (depends on 16) The substrate processing apparatus according to claim 16, wherein the minienvironment comprises a gas inlet and a gas outlet fluidly connected to a pump to provide a gas flow through the minienvironment. ### Claim 18 (depends on 1) The substrate processing apparatus according to claim 1, further comprising a wall separating a cassette handler and the substrate handling robot. ### Claim 19 (depends on 1) The substrate processing apparatus according to claim 1, further comprising an internal wall, wherein the internal wall comprises a closable substrate access opening. ### Claim 20 A substrate processing apparatus, comprising: a housing comprising sidewalls and a back wall, the housing defining a first leg, a second leg, and an opening therebetween; a first module within the first leg and second module within the second leg; a door connecting the first leg and the second leg; and a substrate handling robot disposed within the housing and constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the first and second module, wherein the substrate processing apparatus is constructed and arranged to allow maintenance of the substrate handling robot by a person standing in a maintenance area between the door and the substrate handling robot and between the first leg and the second leg, and the first and second modules are constructed and arranged to allow maintenance of the modules from the maintenance area.