# US 12,183,592 B1 · Method of manufacturing a ceramic structure with metal traces

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- Number: US 12,183,592 B1
- Document ID: US12183592B1
- Status: Granted
- Kind: B1
- Application number: 18/224,524
- Filed: 2023-07-20
- Granted: 2024-12-31
- Earliest claimed: 2020-02-04
- Assignees: HRL Laboratories, LLC
- Applicants: HRL Laboratories, LLC
- Inventors: Tobias Schaedler; Kayleigh Porter; Phuong Bui
- Web page: https://patentgrep.com/patent/US12183592B1

## CPC

- H10W 99/00: Subject matter not provided for in other groups of this subclass
- C04B 35/5603: {with a well-defined oxygen content, e.g. oxycarbides}
- C04B 35/571: obtained from {Si-containing} polymer precursors {or organosilicon monomers}
- C04B 35/589: obtained from {Si-containing} polymer precursors {or organosilicon monomers}
- C04B 35/74: containing shaped metallic materials
- H10W 70/05: of insulating or insulated package substrates, or of interposers, or of redistribution layers (manufacture or treatment of leadframes H10W70/04)
- H10W 70/098: {Applying pastes or inks, e.g. screen printing (H10W70/095 takes precedence)}
- H10W 70/65: Shapes or dispositions of interconnections
- H10W 70/685: comprising multiple insulating layers
- H10W 70/692: Ceramics or glasses
- C04B 2235/3206: Magnesium oxides or oxide-forming salts thereof
- C04B 2235/3217: Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
- C04B 2235/3222: Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
- C04B 2235/3224: Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B 2235/3225: Yttrium oxide or oxide-forming salts thereof
- C04B 2235/3244: Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
- C04B 2235/3418: Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
- C04B 2235/3427: Silicates other than clay, e.g. water glass
- C04B 2235/3463: Alumino-silicates other than clay, e.g. mullite
- C04B 2235/36: Glass starting materials for making ceramics, e.g. silica glass
- C04B 2235/3826: Silicon carbides
- C04B 2235/386: Boron nitrides
- C04B 2235/3873: Silicon nitrides, e.g. silicon carbonitride, silicon oxynitride
- C04B 2235/447: Phosphates or phosphites, e.g. orthophosphate or hypophosphite
- C04B 2235/5436: micrometer sized, i.e. from 1 to 100 micron
- C04B 2235/5445: submicron sized, i.e. from 0,1 to 1 micron
- C04B 2235/6026: Computer aided shaping, e.g. rapid prototyping
- C04B 2235/6562: Heating rate
- C04B 2235/6565: Cooling rate
- C04B 2235/6582: Hydrogen containing atmosphere
- C04B 2235/663: Oxidative annealing
- C04B 2235/664: Reductive annealing
- C04B 2235/77: Density
- C04B 2235/80: Phases present in the sintered or melt-cast ceramic products other than the main phase
- H10W 70/635: {Through-vias}
- H10W 70/66: Conductive materials thereof
- H10W 70/666: {Organic materials or pastes}
- H10W 70/68: Shapes or dispositions thereof
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE

## Abstract

A ceramic article. In some embodiments, the ceramic article includes a ceramic body composed of a ceramic material; and a first conductive trace, the first conductive trace having a first portion entirely within the ceramic material, the first portion having a length of 0.5 mm and transverse dimensions less than 500 microns, the ceramic material including a plurality of ceramic particles in a ceramic matrix.

## Claims

### Claim 1

A method for manufacturing an article, the method comprising:
forming a layer of a preceramic polymer resin on a surface of a partially-fabricated article;
selectively curing the layer in a first region of the surface after the forming of the layer of the preceramic polymer resin on the surface;
forming one or more patches of a slurry of metallic particles, in a second region of the surface, the second region being different from the first region; and
wherein after the forming of the layer of the preceramic polymer resin on the surface and after the forming of one or more patches of the slurry of metallic particles, the method further comprises performing pyrolysis on the partially-fabricated article in an inert atmosphere at one or more temperatures between 600° C. and 1000° C. for 10 minutes to 100 minutes after heating at a heating rate of between 0.5° C./min and 5° C./min.

### Claim 2 (depends on 1)

The method of claim 1, wherein the selective curing of the layer in the first region of the surface comprises exposing the first region to ultraviolet light.

### Claim 3 (depends on 2)

The method of claim 2, wherein the exposing of the first region to ultraviolet light comprises exposing the first region to ultraviolet light utilizing stereolithography or digital light projection.

### Claim 4 (depends on 1)

The method of claim 1, wherein the forming of the one or more patches of the slurry of metallic particles comprises depositing the slurry utilizing a method selected from the group consisting of micro-extrusion, inkjet printing, aerosol jet printing, and combinations thereof.

### Claim 5 (depends on 1)

The method of claim 1, further comprising curing the slurry of metallic particles by temperature or light.

### Claim 6 (depends on 1)

The method of claim 1, further comprising, after the selective curing of the layer in the first region of the surface, and before the forming of the one or more patches of the slurry of metallic particles:
removing uncured preceramic polymer resin from the second region of the surface.

### Claim 7 (depends on 1)

The method of claim 1, wherein after the performing of pyrolysis, the method further comprises performing a heat treatment on the partially-fabricated article in an oxidizing atmosphere at one or more temperatures between 400° C. and 800° C. for 10 minutes to 100 minutes after heating at a heating rate of between 1° C./min to 10° C./min.

### Claim 8 (depends on 7)

The method of claim 7, wherein after the performing of the heat treatment in the oxidizing atmosphere, the method further comprises performing a heat treatment on the partially-fabricated article in a reducing atmosphere at one or more temperatures between 400° C. and 800° C. for 10 minutes to 100 minutes after heating at a heating rate of between 1° C./min to 10° C./min.

### Claim 9 (depends on 1)

The article manufactured according to the method of claim 1.

### Claim 10

A method of manufacture for manufacturing an article, the method of manufacture comprising:
forming a layer of a preceramic polymer resin on a surface of a partially-fabricated article;
selectively curing the layer in a first region of the surface after the forming of the layer of the preceramic polymer resin on the surface;
forming one or more patches of a slurry of metallic particles, in a second region of the surface, the second region being different from the first region; and
performing pyrolysis on the partially-fabricated article, after the selective curing of the layer in the first region of the surface and after the forming of one or more patches of the slurry of metallic particles, in an inert atmosphere at one or more temperatures between 600° C. and 800° C. to form the article;
wherein, the article comprises:
a ceramic body composed of a ceramic material formed from the preceramic polymer resin and the partially-fabricated article; and
a first conductive trace formed from the slurry of metallic particles,
the first conductive trace having a first portion entirely within the ceramic material, and
the first conductive trace comprising, as a major component, a material selected from the group consisting of copper, silver, gold, and alloys and combinations thereof.
