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US 12,183,568 B2Granted
Excimer lamp and UV irradiation unit including the same
AssigneeORC Manufacturing Co., Ltd.
InventorsGo Kobayashi, Izumi Serizawa, Shunya Matsushima
Life of this patent
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Abstract
An excimer lamp includes a discharge tube, a band-shaped foil electrode provided in the discharge tube, and a dielectric configured to cover the foil electrode and maintain close contact with the foil electrode. The foil electrode extends along the axis of said discharge tube. The opposite sides of the foil electrode are flattened along the width direction of the foil electrode. Both edge portions of the foil electrode are pointed.
Claims18
An excimer lamp comprising:
- a discharge tube;
- a band-shaped foil electrode provided in said discharge tube, said foil electrode extending along the axis of said discharge tube;
- and
- a dielectric configured to cover said foil electrode and maintain close contact with said foil electrode, wherein
- opposite sides of said foil electrode being flattened along a width direction of said foil electrode, both edge portions of said foil electrode being pointed,
- said dielectric has an oval profile, such that a thickness of said dielectric in said width direction of said foil electrode is greater than a thickness of said dielectric in a direction orthogonal to said width direction of said foil electrode, and
- said dielectric includes at least two linear surfaces along said oval profile, opposite from each other, and both extending in said width direction of said foil electrode.
4 more elements
A UV (Ultraviolet) irradiation unit comprising:
- an excimer lamp;
- and
- an electric power supplier configured to supply electric power to said excimer lamp,
- said excimer lamp comprising:
- a discharge tube;
- a band-shaped foil electrode provided in said discharge tube, said foil electrode extending along the axis of said discharge tube;
- and
- a dielectric configured to cover said foil electrode and maintain close contact with said foil electrode, wherein
- opposite sides of said foil electrode being flattened along a width direction of said foil electrode, both edge portions of said foil electrode being pointed,
- said dielectric has an oval profile, such that a thickness of said dielectric in said width direction of said foil electrode is greater than a thickness of said dielectric in a direction orthogonal to said width direction of said foil electrode, and
- said dielectric includes at least two linear surfaces along said oval profile, opposite from each other, and both extending in said width direction of said foil electrode.
8 more elements
Dependencies are inferred from the claim text.