Cover with a sensor system for a configurable measuring system for a configurable sputtering system
AssigneeSoleras Advanced Coatings BV
InventorsIvan Van De Putte, Niek Dewilde, Guy Gobin, Wilmert De Bosscher
Life of this patent
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Abstract
A cover for a configurable measuring system of a configurable sputtering system which is adapted for sputtering multilayer coatings with varying compositions and comprising a plurality of sputtering zones and having a plurality of apertures on which the cover is detachably attachable, and wherein the cover comprises a sensor system for in situ detection of a property of the multilayer coating on a substrate, wherein said at least one sensor system is attached to the cover.
Claims24
A cover for a configurable measuring system of a configurable sputtering system, the configurable sputtering system being provided for sputtering multilayer coatings on a substrate, and the configurable sputtering system comprising a plurality of stations and having a plurality of apertures to provide access to a space within the stations;
- the cover being detachably attachable to each of the apertures of the stations individually, such that the cover closes one aperture at a time and is movable from one aperture to another;
- the cover comprising a sensor system allowing to determine a property of a substrate with or without a stack of the multilayer coating on the substrate by directly measuring on the substrate,
- the sensor system comprising at least one sensor adapted for detecting or measuring a signal representative of the property of the substrate with or without the stack in one of the plurality of stations, and comprising at least one first transmission means for transferring or transmitting the detected signal or the determined property;
- the at least one sensor being attached to the cover, such that moving the cover from one of the plurality of stations to another allows detecting or measuring the signal representative of the property of the substrate with or without the stack in the other station.
A cover for a configurable measuring system of a configurable sputtering system, the configurable sputtering system being provided for sputtering multilayer coatings on a substrate, and the configurable sputtering system comprising a plurality of stations and having a plurality of apertures to provide access to a space within the stations;
- the cover being detachably attachable to each of the apertures of the stations individually, such that the cover closes one aperture at a time and is movable from one aperture to another;
- the cover comprising:
- a vacuum pump,
- a sputtering target, and
- a sensor system allowing to determine a property of a substrate with or without a stack of the multilayer coating on the substrate by directly measuring on the substrate,
- the sensor system comprising at least one sensor adapted for detecting or measuring a signal representative of the property of the substrate with or without the stack in one of the plurality of stations, and comprising at least one first transmission means for transferring or transmitting the detected signal or the determined property;
- the at least one sensor being attached to the cover;
- wherein the cover further comprises at least one rail, and wherein the at least one sensor is mounted on the at least one rail and is movable along the at least one rail.
Dependencies are inferred from the claim text.