# US 12,183,554 B2 · Bottom and middle edge rings

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- Number: US 12,183,554 B2
- Document ID: US12183554B2
- Status: Granted
- Kind: B2
- Application number: 17/681,606
- Filed: 2022-02-25
- Published: 2022-06-16
- Granted: 2024-12-31
- Earliest claimed: 2022-02-25
- Assignees: Lam Research Corporation
- Applicants: Lam Research Corporation
- Inventors: Hiran Rajitha Rathnasinghe; Shawn Tokairin; Jon Mcchesney
- Web page: https://patentgrep.com/patent/US12183554B2

## CPC

- H01J 37/32642: {Focus rings}
- H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins}
- H10P 72/00: Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P 72/0421: {for drying etching}
- H10P 72/0436: {mainly by radiation}
- H10P 72/70: for supporting or gripping
- H10P 72/74: {using temporarily an auxiliary support}
- H10P 72/76: using mechanical means, e.g. clamps or pinches
- H10P 72/7606: {characterised by edge clamping, e.g. clamping ring}
- H10P 72/7611: {characterised by edge profile or support profile}
- H01J 2237/049: Focusing means
- H01J 2237/334: Etching
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring and further configured to be raised and lowered relative to a substrate support includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a guide feature in the upper surface defining the annular outer diameter, an inner annular rim in the upper surface defining the annular inner diameter, and a groove defined in the upper surface between the guide feature and the inner annular rim.

## Claims

### Claim 1

A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring, wherein the moveable edge ring is configured to be raised and lowered relative to a substrate support, the middle ring comprising:
an upper surface;
an annular inner diameter;
an annular outer diameter;
a lower surface;
a guide feature defining the annular outer diameter,
wherein at least one of a first upper corner or a second upper corner of the guide feature is chamfered to facilitate alignment and engagement with the moveable edge ring;
an inner annular rim defining the annular inner diameter, wherein the inner annular rim is stepped downward relative to the guide feature and is configured to support an edge of a substrate; and
a groove defined between the guide feature and the inner annular rim,
wherein the groove is the only groove on the upper surface of the middle ring, and the groove is an annular groove.

### Claim 2 (depends on 1)

The middle ring of claim 1, wherein the at least one of the first upper corner or the second upper corner of the guide feature that is chamfered is an outer, upper corner of the guide feature.

### Claim 3 (depends on 1)

The middle ring of claim 1, wherein the guide feature has a first horizontal width, the inner annular rim has a second horizontal width, and the first horizontal width is greater than the second horizontal width.

### Claim 4 (depends on 1)

The middle ring of claim 1, wherein the middle ring is “U”-shaped.

### Claim 5 (depends on 1)

The middle ring of claim 1, wherein the upper surface includes at least four changes of direction.

### Claim 6 (depends on 1)

The middle ring of claim 1, wherein the upper surface includes at least five alternating vertical and horizontal surfaces.

### Claim 7 (depends on 1)

The middle ring of claim 1, wherein the annular outer diameter of the middle ring is greater than an outer diameter of the substrate.

### Claim 8 (depends on 1)

The middle ring of claim 1, wherein the guide feature is configured to extend into a second groove in a lower surface of the moveable edge ring.