US 12,183,542 B2 · Transmission electron microscope and imaging method

Abstract

The invention is to simplify operations performed when imaging an electron diffraction pattern by using a transmission electron microscope. As a solution to the problem, a transmission electron microscope includes a detector to which an electron diffraction pattern is projected, a mask for zero-order wave configured to be inserted into and pulled out from between a sample and the detector, and a current detector configured to be inserted into and pulled out from a detection region of the zero-order waves in a state where the mask is inserted. An amount of current of electron beams emitted to the mask is measured in real time, and the measurement result is automatically reflected in settings of imaging conditions of an imaging camera provided in the transmission electron microscope.

Claims12

Dependent claims

A transmission electron microscope, comprising:

an electron gun configured to emit an electron beam;
a detector on which an electron diffraction pattern is projected;
a sample table on which a sample is placed;
and
a mask for zero-order waves configured to be inserted into or pulled out from between the sample table and the detector, wherein
the zero-order waves are detected in a state where the mask is inserted,
the zero-order waves are detected by using a current detector provided on the mask, and
an imaging condition of the detector is adjusted based on an output of the current detector.

5 more elements

An imaging method to be used in a transmission electron microscope including:

an electron gun configured to emit an electron beam,
a detector on which an electron diffraction pattern is projected,
a sample table on which a sample is placed, and
a mask for zero-order waves configured to be inserted into or pulled out from between the sample table and the detector,
the imaging method comprising:
a step (a) of detecting the zero-order waves in a state where the mask is inserted,
wherein a current detector provided on the mask and configured to detect the zero-order waves are further provided, and
the imaging method further comprises:
a step (b) of adjusting an imaging condition of the detector based on an output of the current detector;
and
a step (c) of imaging the electron diffraction pattern after the step (b).

8 more elements

Dependencies are inferred from the claim text.

Transmission electron microscope and imaging method

Life of this patent

Transmission electron microscope and imaging method

Life of this patent

Abstract

Claims12