# US 12,183,539 B2 · Inert gas sample transfer for beam systems > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,183,539 B2 - Document ID: US12183539B2 - Status: Granted - Kind: B2 - Application number: 17/589,791 - Filed: 2022-01-31 - Published: 2023-08-03 - Granted: 2024-12-31 - Earliest claimed: 2022-01-31 - Assignees: FEI Company - Applicants: FEI Company - Inventors: Libor Novák; Petr Glajc; Marek Uncovský - Web page: https://patentgrep.com/patent/US12183539B2 ## CPC - H01J 37/185: {Means for transferring objects between different enclosures of different pressure or atmosphere} - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - H01J 2237/2007: Holding mechanisms - H01J 2237/20278: Motorised movement - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract Various approaches are provided for transferring samples within an inert gas environment to and from a beam system. In one example, a sample transfer capsule includes a container configured to store a sample during transport, wherein the container is adjustable between a closed configuration and an open configuration, an inert gas storage chamber coupled to the container and configured to store an inert gas, and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration. In this way, samples may be maintained in an inert gas environment during transport and while beam system vacuum chambers are vented, thereby reducing exposure of the samples and subsequently reducing the rate of a chemical reaction, such as oxidation or nitridation, of the samples. ## Claims ### Claim 1 A sample transfer capsule, comprising: a container configured to store a sample during transport, wherein the container is adjustable between a closed configuration and an open configuration; an inert gas storage chamber coupled to the container and configured to store an inert gas; and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration. ### Claim 2 (depends on 1) The sample transfer capsule of claim 1, further comprising a body forming the container with an open portion, and a platform configured to cover the open portion and seal the container in the closed configuration. ### Claim 3 (depends on 2) The sample transfer capsule of claim 2, wherein the body and platform are configured to form a seal where an inert gas pressure in the container is less than a pressure outside the container, and wherein the seal is configured to be unsealed where a pressure outside of the container is below the inert gas pressure in the container. ### Claim 4 (depends on 2) The sample transfer capsule of claim 2, wherein the body and platform comprise respective interlockable mechanisms that seal the container in the closed configuration. ### Claim 5 (depends on 2) The sample transfer capsule of claim 2, further comprising a motor coupled to the platform, wherein the motor is controllable to move the platform to adjust the container between the open configuration and the closed configuration. ### Claim 6 (depends on 2) The sample transfer capsule of claim 2, wherein the body is configured to dock to a holder in a vacuum chamber of a charged particle beam system while the sample and the platform are positioned within a beam path of the charged particle beam system away from the body. ### Claim 7 (depends on 2) The sample transfer capsule of claim 2, further comprising an in-operando holder mounted within the container, wherein the sample is positioned on the in-operando holder, and wherein the sample is exposable to a beam path of a charged particle beam system when the container is in the open configuration. ### Claim 8 (depends on 1) The sample transfer capsule of claim 1, wherein the inert gas comprises argon. ### Claim 9 A system, comprising: a sample transfer capsule configured to transport a sample, comprising: a container configured to store the sample, wherein the container is adjustable between a closed configuration and an open configuration; an inert gas storage chamber coupled to the container and configured to store an inert gas; and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration; and a charged particle beam system, comprising: at least one column configured to generate and direct a charged particle beam toward the sample; a vacuum chamber; and a stage positioned within the vacuum chamber and movable within the vacuum chamber; wherein the sample transfer capsule is mountable to the stage, wherein the container of the sample transfer capsule is configured to adjust from the closed configuration providing an inert gas environment for the sample to the open configuration, and wherein the sample is exposable to the charged particle beam when the container is in the open configuration. ### Claim 10 (depends on 9) The system of claim 9, wherein the sample transfer capsule further comprises a body forming the container with an open portion, and a platform configured to cover the open portion and seal the container in the closed configuration. ### Claim 11 (depends on 10) The system of claim 10, wherein the charged particle beam system further comprises a holder mounted within the vacuum chamber, wherein the platform is detachable from the body of the sample transfer capsule, and wherein the body of the sample transfer capsule is dockable with the holder to secure the sample transfer capsule away from the charged particle beam. ### Claim 12 (depends on 11) The system of claim 11, wherein the platform attaches and seals to the body of the sample transfer capsule when an inert gas pressure in the container is less than an atmospheric pressure surrounding the sample transfer capsule. ### Claim 13 (depends on 11) The system of claim 11, wherein the platform is interlockable with the body via corresponding interlocking mechanisms of the platform and the body, wherein the platform attaches and seals to the body of the sample transfer capsule when the platform is locked onto the body via the corresponding interlocking mechanisms of the platform and the body. ### Claim 14 (depends on 10) The system of claim 10, wherein the sample transfer capsule further comprises a motor coupled to the platform and configured to move the platform to adjust the container between the open configuration and the closed configuration. ### Claim 15 A method, comprising: positioning a sample transfer capsule within a vacuum chamber of a charged particle beam system, wherein the sample transfer capsule seals a sample within a container of the sample transfer capsule filled with inert gas; pumping the vacuum chamber to create a vacuum within the vacuum chamber; opening the sample transfer capsule to expose the sample to a charged particle beam; closing the sample transfer capsule to seal the sample within the sample transfer capsule; opening a valve of the sample transfer capsule to fill the container with the inert gas from an inert gas storage chamber of the sample transfer capsule; and removing the sample transfer capsule from the vacuum chamber. ### Claim 16 (depends on 15) The method of claim 15, wherein opening the sample transfer capsule to expose the sample to the charged particle beam comprises: controlling a stage of the vacuum chamber to dock the container and the inert gas storage chamber of the sample transfer capsule in a holder mounted within the vacuum chamber; controlling the stage to detach a platform of the sample transfer capsule from the container, wherein the sample is positioned on the platform; and controlling the stage to position the sample within a path of the charged particle beam. ### Claim 17 (depends on 16) The method of claim 16, wherein controlling the stage to detach the platform from the container comprises selectively moving the stage and/or holder to unlock the platform from the container. ### Claim 18 (depends on 16) The method of claim 16, wherein controlling the stage to detach the platform from the container comprises lowering the stage after a vacuum pressure of the vacuum chamber is lower than an inert gas pressure within the container. ### Claim 19 (depends on 15) The method of claim 15, wherein opening the sample transfer capsule to expose the sample to the charged particle beam comprises controlling a motor of the sample transfer capsule to open a lid of the sample transfer capsule, and wherein closing the sample transfer capsule to seal the sample within the sample transfer capsule comprises controlling the motor of the sample transfer capsule to close the lid of the sample transfer capsule. ### Claim 20 (depends on 15) The method of claim 15, wherein opening the valve of the sample transfer capsule to fill the container with the inert gas from the inert gas storage chamber of the sample transfer capsule comprises one of electrically, pneumatically, or mechanically actuating the valve to open.