Back to results
US 12,183,537 B2Granted
Systems and methods of hysteresis compensation
AssigneeFEI Company
InventorsEdwin Verschueren, Paul Tacx
Life of this patent
Estimating the term…
Abstract
A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.
Claims20
A positioning system, comprising:
- a drive unit comprising an actuator element, the actuator element comprising a piezoelectric material;
- and
- a control system configured to:
- select a path between a first position and a second position;
- identify at least one change of direction of the actuator element along the selected path;
- generate a hysteresis-compensated drive signal based at least in part on the change in direction;
- and
- apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.
5 more elements
A charged particle microscope, comprising:
- a vacuum chamber;
- a charged particle beam source configured to output a charged particle beam toward an object in the vacuum chamber;
- and
- a positioning system coupled to the vacuum chamber and operable to position the object in the vacuum chamber relative to the charged particle beam, the positioning system comprising:
- a drive unit comprising an actuator element, the actuator element comprising a piezoelectric material;
- and
- a control system configured to:
- select a path between a first position and a second position;
- identify at least one change of direction of the actuator element along the selected path;
- generate a hysteresis-compensated drive signal based at least in part on the change in direction;
- and
- apply the hysteresis-compensated drive signal to the actuator element to move the object along the path in the vacuum chamber.
9 more elements
Dependencies are inferred from the claim text.