# US 12,183,417 B2 · Memory device and manufacturing method of the same

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- Number: US 12,183,417 B2
- Document ID: US12183417B2
- Status: Granted
- Kind: B2
- Application number: 17/882,156
- Filed: 2022-08-05
- Published: 2024-02-08
- Granted: 2024-12-31
- Earliest claimed: 2022-08-05
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Po-Sheng Wang; Kao-Cheng Lin; Yangsyu Lin; Yen-Huei Chen; Cheng Hung Lee; Jonathan Tsung-Yung Chang
- Web page: https://patentgrep.com/patent/US12183417B2

## CPC

- G11C 5/063: {Voltage and signal distribution in integrated semi-conductor memory access lines, e.g. word-line, bit-line, cross-over resistance, propagation delay}
- G11C 7/10: Input/output [I/O] data interface arrangements, e.g. I/O data control circuits, I/O data buffers
- G11C 5/025: {Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device (geometrical lay-out of the components in integrated circuits, geometrical lay-out of the components in integrated circuits H10D89/10)}
- G11C 7/18: Bit line organisation; Bit line lay-out
- G11C 11/419: Read-write [R-W] circuits
- H10B 10/00: Static random access memory [SRAM] devices
- H10B 12/50: {Peripheral circuit region structures}
- H10D 89/10: Integrated device layouts
- G11C 2207/2272: Latency related aspects
- G11C: STATIC STORES (semiconductor memory devices H10B)
- H10B: ELECTRONIC MEMORY DEVICES
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A memory device in an integrated circuit is provided, including an input/output (I/O) circuit, a first memory segment and a second memory segment that separated from the first memory segment in a first direction, a first pair of data lines on a first side of the integrated circuit, extending in the first direction and configured to couple the first memory segment to the I/O circuit, and a second pair of data lines separated from the first pair of data lines in a second direction, different from the first direction, on a second side, opposite to the first side, of the integrated circuit, and configured to couple the second memory segment to the I/O circuit. A first width of the first pair of data lines is different from a second width of the second pair of data lines.

## Claims

### Claim 1

A memory device in an integrated circuit, comprising:
an input/output (I/O) circuit;
a first memory segment and a second memory segment that is separated from the first memory segment in a first direction;
a first pair of data lines on a first side of the integrated circuit, extending in the first direction and configured to couple the first memory segment to the I/O circuit; and
a second pair of data lines separated from the first pair of data lines in a second direction, different from the first direction, on a second side, opposite to the first side, of the integrated circuit, and configured to couple the second memory segment to the I/O circuit,
wherein a first width of the first pair of data lines is different from a second width of the second pair of data lines.

### Claim 2 (depends on 1)

The memory device of claim 1, wherein the first side and the second side of the integrate circuit correspond to a front side and a back side of the integrate circuit respectively.

### Claim 3 (depends on 2)

The memory device of claim 2, further comprising:
a pair of vias each having a rectangular surface coupled to one of the second pair of data lines; and
a first metal track between the second pair of data lines on the second side of the integrated circuit.

### Claim 4 (depends on 1)

The memory device of claim 1, further comprising:
a third memory segment, wherein the second memory segment is interposed between the first and third memory segments; and
a third pair of data lines on the first side of the integrated circuit and configured to couple the third memory segment to the I/O circuit.

### Claim 5 (depends on 4)

The memory device of claim 4, wherein each of the first and third memory segments comprises a first number of memory cells which is smaller than a second number of memory cells included in the second memory segment.

### Claim 6 (depends on 4)

The memory device of claim 4, wherein the first memory segment is arranged closest to the I/O circuit and comprises a largest number of memory cells, compared to the second and third memory segments.

### Claim 7 (depends on 1)

The memory device of claim 1, further comprising:
a third memory segment and a fourth memory segment, wherein the second and third memory segments are interposed between the first and fourth memory segments;
a third pair of data lines on the first side of the integrated circuit, coupled to the third memory segment, and comprising first portions in a first layer and second portions, passing the first and second memory segments, in a second layer above the first layer; and
a fourth pair of data lines on the second side of the integrated circuit, coupled to the fourth memory segment, and comprising first portions in a third layer and second portions, passing the first to third memory segments, in a fourth layer below the first to third layers.

### Claim 8 (depends on 7)

The memory device of claim 7, wherein each of the first and second memory segments comprises a first number of memory cells which is greater than a second number of memory cells included in each of the third and fourth memory segments.

### Claim 9 (depends on 1)

The memory device of claim 1, wherein the first side is a backside of the integrated circuit, and the second side is a front side of the integrated circuit,
wherein the first memory segment, comprising a first number of memory cells, is arranged closer to the I/O circuit than the second memory segment, comprising a second number, smaller than the first number, of memory cells.

### Claim 10

A memory device in an integrated circuit, comprising:
a first pair of complementary data lines that are arranged in a first layer on a first side of the integrated circuit and coupled to a plurality of first memory cells in a first column; and
a second pair of complementary data lines that are arranged in a first layer on a second side, opposite to the first side, of the integrated circuit and coupled to a plurality of second memory cells in the first column,
wherein lengths of the first and second pairs of complementary data lines are different from each other, and widths of the first and second pairs of complementary data lines are different from each other.

### Claim 11 (depends on 10)

The memory device of claim 10, further comprising:
a third pair of complementary data lines comprising first portions arranged in the first layer on the first side of the integrated circuit and second portions that are arranged in a second layer above the first layer on the first side of the integrated circuit and pass the plurality of first memory cells and the plurality of second memory cells,
wherein the third pair of complementary data lines are coupled to a plurality of third memory cells in the first column.

### Claim 12 (depends on 11)

The memory device of claim 11, wherein the first and second sides of the integrated circuit correspond to front and back sides of the integrated circuit respectively,
wherein a number of the plurality of second memory cells is greater than a number of the plurality of first memory cells and a number of the plurality of third memory cells.

### Claim 13 (depends on 11)

The memory device of claim 11, further comprising:
a fourth pair of complementary data lines comprising first portions arranged in the first layer on the second side of the integrated circuit and second portions that are arranged in a second layer below the first layer on the second side of the integrated circuit,
wherein the fourth pair of complementary data lines are coupled to a plurality of fourth memory cells in the first column, and the fourth pair of complementary data lines have a longest length among the first to fourth pairs of complementary data lines.

### Claim 14 (depends on 10)

The memory device of claim 10, further comprising:
a third pair of complementary data lines that are arranged in the first layer on the first side of the integrated circuit and coupled to a plurality of third memory cells in a second column; and
a fourth pair of complementary data lines that are arranged in the first layer on the second side of the integrated circuit and coupled to a plurality of fourth memory cells in the second column,
wherein the first and third pairs of complementary data lines are mirror images with respect to an input/output (I/O) circuit, and
the second and fourth pairs of complementary data lines are mirror images with respect to the I/O circuit.

### Claim 15 (depends on 10)

The memory device of claim 10, further comprising:
an input/output (I/O) circuit apart from the plurality of the first memory cells by a first spacing, wherein a second spacing between the plurality of the first memory cells and the plurality of second memory cells is smaller than the first spacing.

### Claim 16

A method, comprising:
forming a plurality of first data lines extending from an input/output (I/O) circuit in a first layer to couple to a first memory segment; and
forming a plurality of second data lines, in a second layer, separated from the plurality of first data lines along a vertical direction to couple to a second memory segment adjacent to the first memory segment, wherein a length of the plurality of second data lines is greater than a length of the plurality of first data lines in a cross-sectional view.

### Claim 17 (depends on 16)

The method of claim 16, wherein a width of the plurality of second data lines is greater than a width of the plurality of first data lines.

### Claim 18 (depends on 16)

The method of claim 16, further comprising:
forming a plurality of third data lines having first portions in a third layer below the first and second layers and second portions in the second layer, wherein the plurality of third data lines are coupled to a third memory.

### Claim 19 (depends on 18)

The method of claim 18, wherein a width of the first portions in the plurality of third data lines is greater than widths of the plurality of first data lines, the plurality of second data lines and the second portions in the plurality of third data lines.

### Claim 20 (depends on 16)

The method of claim 16, wherein the plurality of first data lines and the plurality of second data lines overlap with each other in a layout view.
