# US 12,182,993 B2 · Visual inspection apparatus and visual inspection methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,182,993 B2 - Document ID: US12182993B2 - Status: Granted - Kind: B2 - Application number: 18/311,540 - Filed: 2023-05-03 - Published: 2024-01-11 - Granted: 2024-12-31 - Earliest claimed: 2022-07-05 - Assignees: Renesas Electronics Corporation - Applicants: Renesas Electronics Corporation - Inventors: Hiroshi Yamashita; Masahiro Ibe; Kojiro Tanimura - Web page: https://patentgrep.com/patent/US12182993B2 ## CPC - G06T 7/001: {using an image reference approach} - G06T 7/0004: {Industrial image inspection} - H04N 23/56: provided with illuminating means - G06T 2207/30148: Semiconductor; IC; Wafer - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract A visual inspection apparatus includes a stage on which a FCBGA type semiconductor package having a lid is placed, a camera located above the stage, a coaxial illumination device located between the camera and the stage, an oblique illumination device located between the camera and the stage, and a control device. The control device is configured to irradiate the FCBGA type semiconductor package with illumination lights by the coaxial illumination device and the oblique illumination device, capture the FCBGA type semiconductor package by the camera to obtain the captured image, integrate a number of pixels of a predetermined pixel value by a binarization process of the captured image to obtain a determination value, and compare the determination value with a predetermined value to determine a non-defective product or a defective product. ## Claims ### Claim 1 A visual inspection apparatus comprising: a stage on which an inspection target to be mounted; a coaxial illumination device and an oblique illumination device irradiated with illumination lights from above to the inspection target; a camera which takes a captured image of the inspection target irradiated with the illumination lights by the coaxial illumination device and the oblique illumination device; and a control device, wherein the control device converts the captured image into a binary image, the control device calculates a judgment value by integrating a number of pixels of a predetermined pixel value of the binary image, and the control device judges non-defective product or defective product for the inspection target by comparison the judgment value and a predetermined value. ### Claim 2 (depends on 1) The visual inspection apparatus according to claim 1, wherein the coaxial illumination device and the oblique illumination device are located between the stage and the camera. ### Claim 3 (depends on 1) The visual inspection apparatus according to claim 1, wherein the inspection target is a FCBGA type semiconductor package having a lid, and the visual inspection apparatus is an apparatus for inspecting an appearance of the FCBGA type semiconductor package having the lid. ### Claim 4 (depends on 2) The visual inspection apparatus according to claim 2, wherein the predetermined value is obtained by inspecting another FCBGA type semiconductor package having another lid deformed to a known amount of deformation. ### Claim 5 (depends on 2) The visual inspection apparatus according to claim 2, wherein the illumination light of the coaxial illumination device is blue, and the illumination light of the oblique illumination device is red. ### Claim 6 (depends on 2) The visual inspection apparatus according to claim 2, wherein the control device sets a brightness of the coaxial illumination device and a brightness of the oblique illumination device so that a deformation of the lid can be detected. ### Claim 7 (depends on 6) The visual inspection apparatus according to claim 6, wherein the control device sets the brightness of the coaxial illumination device to be lower than the brightness of the oblique illumination device. ### Claim 8 A method of a visual inspection comprising: (a) mounting an inspection target on a stage; (b) irradiating illumination lights by a coaxial illumination device and an oblique illumination device from above to the inspection target; (c) taking a captured image of the inspection target illuminated with the illumination lights by the coaxial illumination device and the oblique illumination device by a camera; (d) converting the captured image into a binary image on a control device; (e) calculating a judgment value by integrating a number of pixels of a predetermined pixel value of the binary image on the control device; and (f) judging non-defective product or defective product for the inspection target by comparison the judgment value and a predetermined value on the control device. ### Claim 9 (depends on 8) The method of the visual inspection according to claim 8, wherein the coaxial illumination device and the oblique illumination device are located between the stage and the camera. ### Claim 10 (depends on 8) The method of the visual inspection according to claim 8, wherein the inspection target is a FCBGA type semiconductor package having a lid. ### Claim 11 (depends on 10) The method of the visual inspection according to claim 10, wherein the predetermined value is obtained by inspecting another FCBGA type semiconductor package having another lid deformed to a known amount of deformation. ### Claim 12 (depends on 8) The method of the visual inspection according to claim 8, wherein the illumination light of the coaxial illumination device is blue, and the illumination light of the oblique illumination device is red. ### Claim 13 (depends on 8) The method of the visual inspection according to claim 8, wherein the control device sets a brightness of the coaxial illumination device and a brightness of the oblique illumination device so as to detect a deformation of the lid. ### Claim 14 (depends on 13) The method of the visual inspection according to claim 13, wherein the control device sets the brightness of the coaxial illumination device to be lower than the brightness of the oblique illumination device.