# US 12,181,691 B2 · Inspecting apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,181,691 B2 - Document ID: US12181691B2 - Status: Granted - Kind: B2 - Application number: 17/813,443 - Filed: 2022-07-19 - Published: 2023-02-09 - Granted: 2024-12-31 - Earliest claimed: 2021-08-05 - Assignees: Disco Corporation - Applicants: Disco Corporation - Inventors: Nobuyuki Kimura - Web page: https://patentgrep.com/patent/US12181691B2 ## CPC - G02B 5/005: {Diaphragms (for cameras G03B9/02)} - G01N 21/8806: {Specially adapted optical and illumination features} - G01N 21/9501: {Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} - G02B 17/00: Systems with reflecting surfaces, with or without refracting elements - G01N 2201/0635: Structured illumination, e.g. with grating - G01N 2201/0636: Reflectors - G02B 5/10: with curved faces - G02B 26/0816: {by means of one or more reflecting elements} - G02B 27/42: Diffraction optics {, i.e. systems including a diffractive element being designed for providing a diffractive effect}(G02B27/60 takes precedence) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract An inspecting apparatus includes a table for supporting a workpiece thereon, a light applying unit for applying light to the workpiece supported on the table, and a light detector for detecting light reflected from the workpiece. The light detector includes a camera and a diffusion plate disposed between the table and the camera. ## Claims ### Claim 1 An inspecting apparatus for inspecting a workpiece, comprising: a table for supporting the workpiece thereon; a light applying unit for applying light to the workpiece supported on the table, wherein the light applying unit includes: a white light source, a diffraction grating for diffracting white light emitted by the white light source, and light selecting means for selecting a light of a particular wavelength from a plurality of lights of different wavelengths from the diffraction grating, wherein the light selecting means includes a stepping motor, wherein the stepping motor turns the diffraction grating about a central axis of the diffraction grating such that the diffraction grating is actuatable by the stepping motor; and a light detector for detecting light reflected from the workpiece, wherein the light detector includes a camera and a diffusion plate disposed between the table and the camera. ### Claim 2 (depends on 1) The inspecting apparatus according to claim 1, wherein the light applying unit is capable of applying the selected light of the particular wavelength to the workpiece. ### Claim 3 (depends on 1) The inspecting apparatus according to claim 1, wherein the light selecting means includes a pinhole mask for selecting the light of the particular wavelength from the plurality of lights of different wavelengths from the diffraction grating. ### Claim 4 (depends on 3) The inspecting apparatus according to claim 3, wherein the light selecting means includes: a first converging mirror for reflecting the plurality of lights of different wavelengths from the diffraction grating, a second converging mirror having a focal length which is the same as a focal length of the first converging mirror, the first converging mirror and the second converging mirror being disposed in point symmetry with each other with respect to a focal point of the first converging mirror, and an optical path changing mirror for changing optical paths that is positioned at a focal point of the second converging mirror, and the pinhole mask selects the light of the particular wavelength from the plurality of lights of different wavelengths whose optical paths have been changed by the optical path changing mirror. ### Claim 5 (depends on 4) The inspecting apparatus according to claim 4, wherein the light selecting means further includes a third converging mirror disposed between the optical path changing mirror and the pinhole mask in such a manner that the third converging mirror has a focal point positioned at the pinhole mask. ### Claim 6 (depends on 2) The inspecting apparatus according to claim 2, wherein the white light source is selected from a group consisting of a super luminescent diode light source, an amplified spontaneous emission light source, a light emitting diode light source, a supercontinuum light source, a halogen light source, a xenon light source, a mercury light source, and a metal halide light source. ### Claim 7 An inspecting apparatus for inspecting a workpiece, comprising: a table for supporting the workpiece thereon; a light applying unit for applying light to the workpiece supported on the table, wherein the light applying unit includes: a white light source, a diffraction grating for diffracting white light emitted by the white light source, and light selecting means for selecting a light of a particular wavelength from a plurality of lights of different wavelengths from the diffraction grating, so that the light applying unit is capable of applying the selected light of the particular wavelength to the workpiece, wherein the light selecting means includes: a first converging mirror for reflecting the plurality of lights of different wavelengths from the diffraction grating, a second converging mirror having a focal length which is the same as a focal length of the first converging mirror, the first converging mirror and the second converging mirror being disposed in point symmetry with each other with respect to a focal point of the first converging mirror, and an optical path changing mirror for changing optical paths that is positioned at a focal point of the second converging mirror, and the pinhole mask selects the light of the particular wavelength from the plurality of lights of different wavelengths whose optical paths have been changed by the optical path changing mirror; and a light detector for detecting light reflected from the workpiece wherein the light selecting means includes a pinhole mask for selecting the light of the particular wavelength from the plurality of lights of different wavelengths from the diffraction grating, wherein the light detector includes a camera and a diffusion plate disposed between the table and the camera. ### Claim 8 (depends on 7) The inspecting apparatus according to claim 7, wherein the light selecting means further includes a third converging mirror disposed between the optical path changing mirror and the pinhole mask in such a manner that the third converging mirror has a focal point positioned at the pinhole mask. ### Claim 9 An inspecting apparatus for inspecting a workpiece, comprising: a table for supporting the workpiece thereon; a light applying unit for applying light to the workpiece supported on the table, wherein the light applying unit includes: a white light source, an optical path changing mirror, a diffraction grating for diffracting white light emitted by the white light source, a pinhole mask for selecting the light of the particular wavelength from the plurality of lights of different wavelengths from the diffraction grating, and a converging mirror disposed between the optical path changing mirror and the pinhole mask in such a manner that the converging mirror has a focal point positioned at the pinhole mask, and a light detector for detecting light reflected from the workpiece, wherein the light detector includes a camera and a diffusion plate disposed between the table and the camera. ### Claim 10 (depends on 9) The inspecting apparatus according to claim 9, wherein the light applying unit further comprises a stepping motor, wherein the optical path changing mirror is actuatable by the stepping motor, such the stepping motor turns the optical path changing mirror about a central axis of the optical path changing mirror. ### Claim 11 (depends on 9) The inspecting apparatus according to claim 9, wherein the white light source is selected from a group consisting of a super luminescent diode light source, an amplified spontaneous emission light source, a light emitting diode light source, a supercontinuum light source, a halogen light source, a xenon light source, a mercury light source, and a metal halide light source.