Light reflecting element and spatial light modulator

A spatial light modulator in which light reflecting elements are arranged in an array, each light reflecting element including:

• a base body;
• a support portion provided on a base body;
• a hinge portion;
• and
• a light reflecting portion,
• wherein the light reflecting portion includes:
• a support layer;
• and
• a light reflecting layer formed on the support layer,
• wherein the hinge portion includes:
• a torsion bar portion;
• a first extending portion extending from a portion of one side portion of the torsion bar portion;
• a first movable piece extending from an end portion of the first extending portion, a second extending portion extending from a portion of the other side portion of the torsion bar portion;
• and
• a second movable piece extending from an end portion of the second extending portion,
• wherein an end portion of the torsion bar portion is fixed to the support portion,
• wherein the hinge portion is twistedly deformable around an axis of the torsion bar portion,
• wherein the support layer is formed to extend from above the first movable piece to above the second movable piece,
• wherein a recessed portion is provided at least at a portion of the support layer facing a space located between the first movable piece and the second movable piece,
• wherein the support layer has a two-layer structure of a lower layer support layer and an upper layer support layer,
• wherein the lower layer support layer includes a first A lower layer support layer, a first B lower layer support layer, and a first C lower layer support layer, a second A lower layer support layer, a second B lower layer support layer, and a second C lower layer support layer, and a third lower layer support layer,
• wherein the first A lower layer support layer is formed on the first movable piece,
• wherein the first B lower layer support layer and the first C lower layer support layer are separated from a side portion of the first A lower layer support layer and formed on the first movable piece with the first A lower layer support layer interposed therebetween,
• wherein the second A lower layer support layer is formed on the second movable piece, and
• wherein the second B lower layer support layer and the second C lower layer support layer are separated from a side portion of the second A lower layer support layer and formed on the second movable piece with the second A lower layer support layer interposed therebetween.

A light reflecting element, comprising:

• a base body;
• a support portion provided on the base body;
• a hinge portion;
• and
• a light reflecting portion,
• wherein the light reflecting portion includes:
• a support layer;
• and
• a light reflecting layer formed on the support layer,
• wherein the hinge portion includes:
• a torsion bar portion;
• a first extending portion extending from a portion of one side portion of the torsion bar portion;
• a first movable piece extending from an end portion of the first extending portion;
• a second extending portion extending from a portion of the other side portion of the torsion bar portion;
• and
• a second movable piece extending from an end portion of the second extending portion,
• wherein an end portion of the torsion bar portion is fixed to the support portion,
• wherein the hinge portion is twistedly deformable around an axis of the torsion bar portion,
• wherein the support layer is formed to extend from above the first movable piece to above the second movable piece,
• wherein a recessed portion is provided at least at a portion of the support layer facing a space located between the first movable piece and the second movable piece,
• wherein the support layer has a two-layer structure of a lower layer support layer and an upper layer support layer,
• wherein the lower layer support layer includes a first A lower layer support layer, a first B lower layer support layer, and a first C lower layer support layer, a second A lower layer support layer, a second B lower layer support layer, and a second C lower layer support layer, and a third lower layer support layer,
• wherein the upper layer support layer is formed on the third lower layer support layer, formed to extend from the first B lower layer support layer to the first C lower layer support layer, formed to extend from the second B lower layer support layer to the second C lower layer support layer, formed above a space surrounded by the first B lower layer support layer, the second B lower layer support layer, and the third lower layer support layer, and formed above a space surrounded by the first C lower layer support layer, the second C lower layer support layer, and the third lower layer support layer.