# US 12,181,539 B2 · Magnetic field sensor with increased SNR > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,181,539 B2 - Document ID: US12181539B2 - Status: Granted - Kind: B2 - Application number: 18/622,584 - Filed: 2024-03-29 - Published: 2024-07-18 - Granted: 2024-12-31 - Earliest claimed: 2015-04-29 - Assignees: Everspin Technologies, Inc. - Applicants: Everspin Technologies, Inc. - Inventors: Phillip G. Mather; Anuraag Mohan - Web page: https://patentgrep.com/patent/US12181539B2 ## CPC - G01R 33/093: {using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00)} - G01R 33/098: {comprising tunnel junctions, e.g. tunnel magnetoresistance sensors} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract Various means for improvement in signal-to-noise ratio (SNR) for a magnetic field sensor are disclosed for low power and high resolution magnetic sensing. The improvements may be done by reducing parasitic effects, increasing sense element packing density, interleaving a Z-axis layout to reduce a subtractive effect, and optimizing an alignment between a Z-axis sense element and a flux guide, etc. ## Claims ### Claim 1 A magnetic field sensor, comprising: a plurality of magnetoresistance sense elements coupled together as a first circuit to sense a magnetic field, wherein each magnetoresistance sense element of the plurality of magnetoresistance sense elements includes a first ferromagnetic layer and a second ferromagnetic layer separated by an insulating barrier layer, wherein portions of at least two magnetoresistance sense elements are electrically connected, wherein at least two magnetoresistance sense elements of the plurality of magnetoresistance sense elements share a common ferromagnetic layer such that either (1) a first portion of the common ferromagnetic layer is above the first ferromagnetic layer of one of the at least two magnetoresistance sense elements and a second portion of the common ferromagnetic layer is above the first ferromagnetic layer of another one of the at least two magnetoresistance sense elements, or (2) a first portion of the common ferromagnetic layer is below the first ferromagnetic layer of one of the at least two magnetoresistance sense elements and a second portion of the common ferromagnetic layer is below the first ferromagnetic layer of another one of the at least two magnetoresistance sense elements. ### Claim 2 (depends on 1) The magnetic field sensor of claim 1, further comprising: at least one flux guide located between the at least two magnetoresistance sense elements. ### Claim 3 (depends on 1) The magnetic field sensor of claim 1, further comprising: at least one flux guide located between the at least two magnetoresistance sense elements, wherein the at least one flux guide is located above or below the at least two magnetoresistance sense elements. ### Claim 4 (depends on 1) The magnetic field sensor of claim 1, further comprising: at least one flux guide located between the at least two magnetoresistance sense elements, wherein the at least one flux guide is located above or below the at least two magnetoresistance sense elements, and wherein the at least one flux guide includes a thin ferromagnetic material layer on both sides of the at least one flux guide. ### Claim 5 (depends on 1) The magnetic field sensor of claim 1, further comprising a plurality of flux guides. ### Claim 6 (depends on 1) The magnetic field sensor of claim 1, further comprising a plurality of flux guides, wherein the plurality of flux guides are located above or below the at least two magnetoresistance sense elements. ### Claim 7 (depends on 1) The magnetic field sensor of claim 1, wherein, when a magnetic field is sensed by the plurality of magnetoresistance sense elements, a sense current flows through the first ferromagnetic layer, the insulating barrier layer, and the second ferromagnetic layer of a magnetoresistance sense element. ### Claim 8 (depends on 1) The magnetic field sensor of claim 1, further comprising: at least one flux guide located between the at least two magnetoresistance sense elements, wherein the at least one flux guide is located above or below the at least two magnetoresistance sense elements, wherein the at least one flux guide is located symmetrically between the at least two magnetoresistance sense elements, and wherein a width of the at least one flux guide covers a whole width between the at least two magnetoresistance sense elements. ### Claim 9 (depends on 1) The magnetic field sensor of claim 1, further comprising: a plurality of flux guides, wherein the plurality of flux guides are located above or below the at least two magnetoresistance sense elements, and wherein at least one flux guide of the plurality of flux guides is located symmetrically between the at least two magnetoresistance sense elements. ### Claim 10 (depends on 1) The magnetic field sensor of claim 1, further comprising: at least one flux guide located between the at least two magnetoresistance sense elements, wherein the at least one flux guide includes a first flux guide and a second flux guide, wherein the first flux guide is located above the at least two magnetoresistance sense elements, and wherein the second flux guide is located below the at least two magnetoresistance sense elements. ### Claim 11 (depends on 1) The magnetic field sensor of claim 1, wherein the first ferromagnetic layer of each magnetoresistance sense element includes a magnetization direction free to rotate in a magnetic field, and wherein the second ferromagnetic layer of each magnetoresistance sense element includes a fixed magnetization direction. ### Claim 12 (depends on 1) The magnetic field sensor of claim 1, wherein the plurality of magnetoresistance sense elements includes one or more tunneling magnetoresistance sense elements, giant magnetoresistance sense elements, and/or anisotropic magnetoresistance sense elements. ### Claim 13 (depends on 1) The magnetic field sensor of claim 1, further comprising: a conductive line coupling the first ferromagnetic layers of the at least two magnetoresistance sense elements of the plurality of magnetoresistance sense elements; and a second circuit comprising a plurality of current lines, wherein each current line of the plurality of current lines is adjacent to, above, or below a corresponding magnetoresistance sense element of the plurality of magnetoresistance sense elements. ### Claim 14 (depends on 1) The magnetic field sensor of claim 1, further comprising: a conductive line coupling the first ferromagnetic layers of the at least two magnetoresistance sense elements; and a second circuit comprising a plurality of current lines, wherein each current line of the plurality of current lines is adjacent to, above, or below a corresponding magnetoresistance sense element of the plurality of magnetoresistance sense elements, wherein at least one current line of the plurality of current lines is positioned at either a 45 degree cross angle or a 90 degree cross angle relative to the first ferromagnetic layer of the corresponding magnetoresistance sense element of the plurality of magnetoresistance sense elements. ### Claim 15 A magnetic field sensor, comprising: a plurality of magnetoresistance sense elements coupled together as a first circuit to sense a magnetic field, wherein each of the plurality of magnetoresistance sense elements includes a first ferromagnetic layer and a second ferromagnetic layer separated by an insulating barrier layer, wherein the plurality of magnetoresistance sense elements includes at least a first magnetoresistance sense element and a second magnetoresistance sense element located in a plane; and wherein the first magnetoresistance sense element and a third magnetoresistance sense element of the plurality of magnetoresistance sense elements are coupled via a first common ferromagnetic layer that extends between the first and third magnetoresistance sense elements, wherein the second magnetoresistance sense element and a fourth magnetoresistance sense element of the plurality of magnetoresistance sense elements are coupled via a second common ferromagnetic layer that extends between the second and fourth magnetoresistance sense elements, and wherein the first common ferromagnetic layer and the second common ferromagnetic layer are spaced apart. ### Claim 16 (depends on 15) The magnetic field sensor of claim 15, wherein the first common ferromagnetic layer includes first and second portions, wherein either (1) the first portion of the common ferromagnetic layer is above a ferromagnetic layer of the first magnetoresistance sense element and the second portion of the common ferromagnetic layer is above a ferromagnetic layer of the third magnetoresistance sense element, or (2) the first portion of the common ferromagnetic layer is below a ferromagnetic layer of the first magnetoresistance sense element and the second portion of the common ferromagnetic layer is below a ferromagnetic layer of the third magnetoresistance sense element, and wherein, when a magnetic field is sensed by the plurality of magnetoresistance sense elements, a sense current flows through the first ferromagnetic layer, the insulating barrier layer, and the second ferromagnetic layer of a magnetoresistance sense element. ### Claim 17 (depends on 15) The magnetic field sensor of claim 15, further comprising: a plurality of flux guides, wherein a first flux guide of the plurality of flux guides is located between the first and second magnetoresistance sense elements and above or below the first magnetoresistance sense element, wherein each flux guide of the plurality of flux guides is configured to direct a portion of a magnetic field oriented orthogonally to the plane of first and second magnetoresistance sense elements into the plane of the first and second magnetoresistance sense elements, wherein the first flux guide is configured to direct the magnetic field into the plane in a first direction, and wherein a second flux guide of the plurality of flux guides is configured to direct the magnetic field into the plane in a second direction opposite the first direction. ### Claim 18 A magnetic field sensor, comprising: a plurality of magnetoresistance sense elements coupled together as a first circuit to sense a magnetic field, wherein each magnetoresistance sense element of the plurality of magnetoresistance sense elements includes a first ferromagnetic layer and a second ferromagnetic layer separated by an insulating barrier layer; and a second circuit comprising a plurality of current lines, wherein each current line of the plurality of current lines is adjacent to a corresponding magnetoresistance sense element of the plurality of magnetoresistance sense elements, wherein a first magnetoresistance sense element and a third magnetoresistance sense element of the plurality of magnetoresistance sense elements share a common ferromagnetic layer such that either (1) a first portion of the common ferromagnetic layer is on a first side the first ferromagnetic layer of the first magnetoresistance sense element and a second portion of the common ferromagnetic layer is on a first side the first ferromagnetic layer of the third magnetoresistance sense element, or (2) the first portion of the common ferromagnetic layer is on a second side the first ferromagnetic layer of the first magnetoresistance sense element and the second portion of the common ferromagnetic layer is on a second side the first ferromagnetic layer of the third magnetoresistance sense element, and wherein at least one current line of the plurality of current lines is positioned on a first or second side of a magnetoresistance sense element. ### Claim 19 (depends on 18) The magnetic field sensor of claim 18, wherein, when a magnetic field is sensed by the plurality of magnetoresistance sense elements, a sense current flows through the first ferromagnetic layer, the insulating barrier layer, and the second ferromagnetic layer of a magnetoresistance sense element, and wherein a direction of the sense current is adjacent to the corresponding magnetoresistance sense element of the plurality of magnetoresistance sense elements. ### Claim 20 (depends on 18) The magnetic field sensor of claim 18, wherein the at least one current line of the plurality of current lines is positioned at either a 45 degree or a 90 degree cross angle relative to a first ferromagnetic layer of a magnetoresistance sense element of the plurality of magnetoresistance sense elements.