# US 12,181,504 B2 · Apparatus and method for inspecting electrostatic chuck > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,181,504 B2 - Document ID: US12181504B2 - Status: Granted - Kind: B2 - Application number: 17/859,000 - Filed: 2022-07-07 - Published: 2023-02-02 - Granted: 2024-12-31 - Earliest claimed: 2021-07-13 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: Su Hyung Lee; Ga Yeon Kim; Sung Ho Lee; Ju Yong Jang - Web page: https://patentgrep.com/patent/US12181504B2 ## CPC - G01R 27/2605: {Measuring capacitance (capacitive sensors G01D5/24)} - G01R 31/56: Testing of electric apparatus (testing of transformers G01R31/62; testing of connections G01R31/66) - H01J 37/32715: {Workpiece holder} - H10P 72/0421: {for drying etching} - H10P 72/0432: {mainly by conduction} - H10P 72/0471: {comprising at least one ion or electron beam chamber} - H10P 72/0474: {comprising at least one lithography chamber} - H10P 72/06: {Apparatus for monitoring, sorting, marking, testing or measuring} - H10P 72/722: {Details of electrostatic chucks} - H01J 2237/2007: Holding mechanisms - H01J 2237/24592: Inspection and quality control of devices - H10P 72/72: using electrostatic chucks - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An apparatus and a method for non-destructive inspection of quality of an electrostatic chuck are disclosed. The apparatus includes a measurement unit for measuring a first capacitance of a dielectric layer of the electrostatic chuck and for measuring a second capacitance of an electrode installed in the dielectric layer; and a control unit configured to evaluate quality of the electrode, based on the first capacitance and the second capacitance. ## Claims ### Claim 1 An apparatus for non-destructive inspection of quality of an electrostatic chuck, the apparatus comprising: a measurement unit for measuring a first capacitance of a dielectric layer of the electrostatic chuck and for measuring a second capacitance of an electrode installed in the dielectric layer; and a control unit configured to evaluate quality of the electrode, based on the first capacitance and the second capacitance. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the control unit evaluates the quality of the electrode based on at least one of an area of the electrode, or whether an arrangement of the electrode with respect to the dielectric layer is asymmetric. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein when the control unit evaluates the quality of the electrode based on the area of the electrode, the control unit calculates the area of the electrode and compares the calculation result with a reference value, and evaluate the quality of the electrode based on the comparing result. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the control unit is configured to calculate an area of the electrode based on an area of the dielectric layer, the first capacitance of the dielectric layer, and the second capacitance of the electrode. ### Claim 5 (depends on 4) The apparatus of claim 4, wherein when the control unit calculates the area of the electrode, the control unit further uses a dielectric constant of the dielectric layer and a thickness of the dielectric layer. ### Claim 6 (depends on 4) The apparatus of claim 4, wherein the control unit calculates the area of the electrode by multiplying a value obtained by dividing the second capacitance by the first capacitance by the area of the dielectric layer. ### Claim 7 (depends on 3) The apparatus of claim 3, wherein the reference value is a size of an area surrounded with the electrode. ### Claim 8 (depends on 3) The apparatus of claim 3, wherein the control unit determines that the quality of the electrode is good when the calculation result and the reference value are the same as each other, wherein the control unit determines that the quality of the electrode is defective when the calculation result and the reference value are different from each other. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the control unit is configured to first consider an area of the electrode first, and subsequently, consider whether an arrangement of the electrode with respect to the dielectric layer is asymmetric. ### Claim 10 (depends on 9) The apparatus of claim 9, wherein when the control unit determine that the quality of the electrode is good in consideration of the area of the electrode, the control unit evaluates the quality of the electrode again in consideration of whether the arrangement of the electrode with respect to the dielectric layer is asymmetric. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the control unit is configured to divide an area of a top face of the dielectric layer into a plurality of sub-areas, and evaluate the quality of the electrode using a plurality of third capacitances, wherein the plurality of third capacitances correspond to the plurality of sub-areas. ### Claim 12 (depends on 11) The apparatus of claim 11, wherein the measurement unit measures the plurality of third capacitances using a metallic plate. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein a size of an area of the plate corresponds to a size of each of the sub-areas. ### Claim 14 (depends on 11) The apparatus of claim 11, wherein the control unit evaluates the quality of the electrode based on a comparing result between the plurality of third capacitances. ### Claim 15 (depends on 14) The apparatus of claim 14, wherein the control unit determines that the quality of the electrode is good when all of the plurality of third capacitances are the same as each other, wherein the control unit determines that the quality of the electrode is defective when at least two of the plurality of third capacitances are different from each other. ### Claim 16 (depends on 15) The apparatus of claim 15, wherein when at least two of the plurality of third capacitances are different from each other, the control unit determines that the electrode has moved toward a sub-area having a relatively larger third capacitance such that the arrangement of the electrode with respect to the dielectric layer is asymmetric. ### Claim 17 (depends on 1) The apparatus of claim 1, wherein when the measurement unit measures the first capacitance, the measurement unit is connected to a top of the dielectric layer via a first line connected to a first terminal of the measurement unit, and is connected to a bottom of the dielectric layer via a second line connected to a second terminal thereof. ### Claim 18 (depends on 1) The apparatus of claim 1, wherein when the measurement unit measures the second capacitance, the measurement unit is connected to a top and a bottom of the dielectric layer via a first line and a second line connected to a first terminal of the measurement unit, respectively, and is connected to a transmission line via a third line connected to a second terminal thereof, wherein the transmission line connects the electrode to a power supply. ### Claim 19 An apparatus for inspection of an electrostatic chuck, the apparatus comprising: a measurement unit for measuring first capacitance of a dielectric layer of the electrostatic chuck and measuring second capacitance of an electrode installed in the dielectric layer; and a control unit configured to evaluate quality of the electrode, based on the first capacitance and the second capacitance, wherein the control unit evaluates the quality of the electrode based on at least one of an area of the electrode or whether an arrangement of the electrode with respect to the dielectric layer is asymmetric, wherein when the control unit evaluates the quality of the electrode based on the area of the electrode, the control unit calculates the area of the electrode based on an area of the dielectric layer, the first capacitance, and the second capacitance, and compares the calculation result with a reference value, and evaluates the quality of the electrode, based on the comparing result, wherein when the control unit evaluates the quality of the electrode based on whether the arrangement of the electrode with respect to the dielectric layer is asymmetric, the control unit divides an area of a top face of the dielectric layer into a plurality of sub-areas, and evaluates the quality of the electrode based on a comparing result between a plurality of third capacitances, wherein the plurality of third capacitances correspond to the plurality of sub-areas. ### Claim 20 A method for non-destructive inspection of quality of an electrostatic chuck, the method comprising: measuring first capacitance of a dielectric layer of the electrostatic chuck; measuring second capacitance of an electrode installed in the dielectric layer; and evaluating quality of the electrode based on the first capacitance and the second capacitance.