Secondary image removal using high resolution x-ray transmission sources

An apparatus comprising:

• an x-ray source comprising:
• an electron beam source configured to generate an electron beam;
• at least one aperture configured to allow a first portion of the electron beam to propagate through the at least one aperture and to block a second portion of the electron beam from propagating through the at least one aperture;
• at least one target comprising at least one x-ray generating material, the at least one x-ray generating material configured to generate a first diverging x-ray beam in response to bombardment by the first portion of the electron beam, the at least one aperture configured to generate a second diverging x-ray beam in response to bombardment by the second portion of the electron beam and/or by electrons backscattered from the at least one target;
• and
• a window configured to emit the first x-ray beam and the second x-ray beam, both the first x-ray beam and the second x-ray beam substantially centered on an x-ray axis that is substantially perpendicular to an outer surface of the window;
• a sample stage configured to support and controllably move a sample;
• and
• at least one x-ray detector configured to receive x-rays of the first x-ray beam transmitted from the x-ray source and through a region-of-interest of the sample along a central beam axis, the central beam axis and the x-ray axis having an angle Φ greater than or equal to 6 degrees therebetween.

An apparatus comprising:

• a transmission x-ray source configured to generate a primary x-ray beam having a first cone angle Θ1 and a secondary x-ray beam having a second cone angle Θ2 less than the first cone angle Θ1, both the primary x-ray beam and the secondary x-ray beam diverging and symmetric about an x-ray axis;
• a sample stage configured to support and controllably move a sample;
• and
• at least one x-ray detector having a region configured to receive x-rays transmitted from the transmission x-ray source and through a region-of-interest of the sample along a beam axis at a non-zero angle Φ relative to the x-ray axis, the at least one x-ray detector configured to generate electrical signals indicative of the x-rays received at the region.