# US 12,181,347 B2 · Wavefront sensors with irregular aperture masks, diffusers, and cameras, and methods of making and using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,181,347 B2 - Document ID: US12181347B2 - Status: Granted - Kind: B2 - Application number: 18/256,413 - Filed: 2021-12-14 - Published: 2024-03-28 - Granted: 2024-12-31 - Earliest claimed: 2020-12-15 - Assignees: Quartus Engineering Incorporated - Applicants: Quartus Engineering Incorporated - Inventors: Peter Pilarz; Jason Kuhn; Brian Dunne; Jesse Melrose - Web page: https://patentgrep.com/patent/US12181347B2 ## CPC - G01J 9/00: Measuring optical phase difference (devices or arrangements for controlling the phase of light beams G02F1/01); Determining degree of coherence; Measuring optical wavelength (spectrometry G01J3/00) - G06T 7/0002: {Inspection of images, e.g. flaw detection} - G06T 7/66: of image moments or centre of gravity - G06T 7/70: Determining position or orientation of objects or cameras (camera calibration G06T7/80) - G06T 7/80: Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ## Abstract Wavefront sensors are provided herein. An aperture mask is configured to receive incident light the wavefront of which is to be measured and comprising irregularly spaced apertures that respectively transmit sub-beams of the incident light. A diffuser is configured to receive the sub-beams transmitted by irregularly spaced apertures of the aperture mask. A camera, having a focal plane in which the diffuser substantially is located, is configured to obtain a digital image of the diffuser and thus to obtain a digital image of the incident light the sub-beams of which the aperture mask transmits onto the diffuser. A controller is configured to electronically receive the digital image of the diffuser and to measure the wavefront of the incident light based on the digital image. Methods also are provided. ## Claims ### Claim 1 A wavefront sensor for measuring a wavefront, the sensor comprising: an aperture mask configured to receive incident light the wavefront of which is to be measured and comprising irregularly spaced apertures that respectively transmit sub-beams of the incident light, wherein the irregularly spaced apertures are arranged in a plurality of sub-windows, each sub-window having a particular pattern of on and off spots that does not exist in any of the other sub-windows; a diffuser configured to receive the sub-beams transmitted by irregularly spaced apertures of the aperture mask; a camera having a focal plane in which the diffuser substantially is located, the camera being configured to obtain a digital image of the diffuser and thus to obtain a digital image of the incident light the sub-beams of which the aperture mask transmits onto the diffuser; and a controller configured to: electronically receive the digital image of the diffuser; convolve the sub-beams imaged on the diffuser with a map of the irregularly spaced apertures of the mask to identify the measured sub-beams; and measure the wavefront of the incident light based on respective changes in position of the identified sub-beams in the digital image relative to both respective reference positions and neighboring sub-beams. ### Claim 2 (depends on 1) The sensor of claim 1, further comprising a source of collimated light having the wavefront. ### Claim 3 (depends on 2) The sensor of claim 2, wherein the source of collimated light comprises a laser. ### Claim 4 (depends on 2) The sensor of claim 2, further comprising a beamsplitter configured to reflect light from the source to a surface the wavefront from which is to be measured, to receive light that is reflected, diffused, or diffracted by the surface, and to transmit such light which then is incident on the mask. ### Claim 5 (depends on 1) The sensor of claim 1, wherein the mask is configured to receive light that is transmitted by an optical component generating the wavefront to be measured. ### Claim 6 (depends on 1) The sensor of claim 1, wherein the controller is configured to detect sub-beam centroids in the digital image and undistort the sub-beam centroids using an intrinsic camera calibration. ### Claim 7 (depends on 1) The sensor of claim 1, wherein the controller is configured to measure a tilt of the incident light. ### Claim 8 (depends on 7) The sensor of claim 7, wherein the tilt is an average tilt. ### Claim 9 (depends on 1) The sensor of claim 1, wherein the controller is configured to measure a wavefront error of the incident light. ### Claim 10 A method for measuring a wavefront, the method comprising: at an aperture mask, receiving incident light the wavefront of which is to be measured, the aperture mask comprising irregularly spaced apertures that respectively transmit sub-beams of the incident light, wherein the irregularly spaced apertures are arranged in a plurality of sub-windows, each sub-window having a particular pattern of on and off spots that does not exist in any of the other sub-windows; at a diffuser, receiving the sub-beams transmitted by irregularly spaced apertures of the aperture mask; obtaining a digital image of the diffuser and thus obtaining a digital image of the incident light the sub-beams of which the aperture mask transmits onto the diffuser; convolving the sub-beams imaged on the diffuser with a map of the irregularly spaced apertures of the mask to identify the measured sub-beams; and measuring the wavefront of the incident light based on respective changes in position of the identified sub-beams in the digital image relative to both respective reference positions and neighboring sub-beams. ### Claim 11 (depends on 10) The method of claim 10, further comprising generating collimated light having the wavefront. ### Claim 12 (depends on 11) The method of claim 11, wherein the source of collimated light comprises a laser. ### Claim 13 (depends on 11) The method of claim 11, further using a beamsplitter to reflect light from the source to a surface the wavefront from which is to be measured, to receive light that is reflected, diffused, or diffracted by the surface, and to transmit such light which then is incident on the mask. ### Claim 14 (depends on 10) The method of claim 10, wherein the mask receives light that is transmitted by an optical component generating the wavefront to be measured. ### Claim 15 (depends on 10) The method of claim 10, wherein measuring the wavefront comprises detecting sub-beam centroids in the digital image and undistorting the sub-beam centroids using an intrinsic camera calibration. ### Claim 16 (depends on 10) The method of claim 10, wherein measuring the wavefront comprises measuring a tilt of the incident light. ### Claim 17 (depends on 16) The method of claim 16, wherein the tilt is an average tilt. ### Claim 18 (depends on 10) The method of claim 10, wherein measuring the wavefront comprises measuring a wavefront error of the incident light.