Method of calibrating radiation thermometer and system thereof

A method of automatically calibrating a radiation thermometer disposed in a polishing apparatus, comprising:

• preparing a plurality of heating devices each of which has a measurement body attached thereto;
• and
• using a controller of the polishing apparatus, the controller being coupled to the plurality of heating devices, to:
• heat each measurement body to a predetermined target temperature,
• move each measurement body below the radiation thermometer to measure a temperature of each measurement body at the predetermined target temperature with the radiation thermometer,
• calculate temperature deviation amounts which are differences between the predetermined target temperature and a corresponding temperature output value of the radiation thermometer, and
• calibrate the radiation thermometer so that all of the temperature deviation amounts are within a preset reference range.

A method of automatically calibrating a radiation thermometer disposed in a polishing apparatus, comprising:

• placing a heating device, to which a plurality of measurement bodies having known emissivities different from each other are attached, below the radiation thermometer;
• and
• using a controller of the polishing apparatus, the controller being coupled to the heating device, to:
• heat the plurality of measurement bodies to a predetermined target temperature,
• measure, with the radiation thermometer, the temperatures of the plurality of measurement bodies heated to the predetermined target temperature, respectively,
• calculate temperature deviation amounts which are differences between each temperature expectation value to be output from the radiation thermometer when the measurement bodies that are heated to the predetermined target temperature are measured by the radiation thermometer, and each temperature output value of the radiation thermometer, and
• calibrate the radiation thermometer so that all of the temperature deviation amounts are within a preset reference range.

A calibration system for calibrating a radiation thermometer disposed in a polishing apparatus, comprising:

• a heating device to which a measurement body is attached, and which is placed below the radiation thermometer;
• and
• a temperature regulator coupled to the heating device,
• wherein the temperature regulator is coupled to a controller disposed in the polishing apparatus, and
• the controller is configured to:
• heat the measurement body to a plurality of target temperatures through the temperature regulator,
• measure the temperatures of the measurement body at each target temperature with the radiation thermometer,
• calculate temperature deviation amounts which are differences between each of the target temperatures and temperature output values of the radiation thermometer corresponding to each target temperature, and
• calibrate the radiation thermometer so that all of the temperature deviation amounts are within a preset reference range.

A calibration system for calibrating a radiation thermometer disposed in a polishing apparatus, comprising:

• a plurality of heating devices each of which has a measurement body attached thereto;
• a temperature regulator coupled to the plurality of heating devices, and
• a heating-device moving mechanism configured to move each of the plurality of heating devices below the radiation thermometer,
• wherein the temperature regulator and the heating-device moving mechanism are coupled to a controller disposed in the polishing apparatus, and
• the controller is configured to:
• heat each measurement body to a predetermined target temperature,
• use the heating-device moving mechanism to move each measurement body below the radiation thermometer,
• measure the temperature of each measurement body at the predetermined target temperature with the radiation thermometer,
• calculate temperature deviation amounts which are differences between each of the predetermined target temperatures and temperature output values of the radiation thermometer corresponding to each predetermined target temperature, and
• calibrate the radiation thermometer so that all of the temperature deviation amounts are within a preset reference range.

A calibration system for calibrating a radiation thermometer disposed in a polishing apparatus, comprising:

• a heating device to which a plurality of measurement bodies having known emissivities different from each other are attached, and which is placed below the radiation thermometer;
• and
• a temperature regulator coupled to the heating device,
• wherein the temperature regulator is coupled to a controller disposed in the polishing apparatus, and
• the controller is configured to:
• heat temperatures of the plurality of measurement bodies to a predetermined target temperature,
• measure, with the radiation thermometer, the temperatures of the plurality of measurement bodies heated to the predetermined target temperature, respectively,
• calculate temperature deviation amounts which are differences between each temperature expectation value to be output from the radiation thermometer when the measurement bodies that are heated to the predetermined target temperature are measured by the radiation thermometer, and each temperature output value of the radiation thermometer, and
• calibrate the radiation thermometer so that all of the temperature deviation amounts are within a preset reference range.