Valve assembly, vacuum assembly and method
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsTorsten Dsaak, Michael Hofmann, Thomas Meyer
Life of this patent
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Abstract
According to various aspects of the disclosure, a valve assembly for a vacuum chamber housing may have: a valve housing, which has a substrate transfer gap; a valve flap, which is mounted so as to be rotatable about an axis of rotation, thus enabling said flap to be rotated into a first position and into a second position, wherein the axis of rotation is arranged in the substrate transfer gap, and wherein the substrate transfer gap is extended longitudinally along the axis of rotation; wherein the valve flap closes the substrate transfer gap in the first position and is arranged adjacent to the substrate transfer gap in the second position.
Claims19
A valve assembly configured to connect to a vacuum chamber, the valve assembly comprising:
- a valve housing, which comprises a substrate transfer gap;
- and
- a valve flap mounted rotatably about an axis of rotation that allows the valve flap to be rotated along a curved interface between the valve flap and the valve housing into a first rotational position about the axis of rotation, a second rotational position about the axis of rotation, and a third rotational position about the axis of rotation, wherein the axis of rotation is disposed in the substrate transfer gap, wherein the substrate transfer gap extends longitudinally along the axis of rotation,
- wherein the valve flap closes the substrate transfer gap along the curved interface in the first rotational position and in the third rotational position, and does not close the substrate transfer gap in the second rotational position, wherein the first rotational position is rotationally opposite to the third rotational position along the curved interface.
A valve assembly for a vacuum chamber housing, the valve assembly comprising:
- a valve housing, which comprises a substrate transfer gap;
- and
- a valve flap mounted rotatably about an axis of rotation that allows the valve flap to be rotated along a curved interface between the valve flap and the valve housing into a first position, a second position, and a third position, wherein the axis of rotation is disposed in the substrate transfer gap, wherein the substrate transfer gap extends longitudinally along the axis of rotation,
- wherein the valve flap closes the substrate transfer gap along the curved interface in the first position and in the third position, and does not close the substrate transfer gap in the second position,
- wherein the first position is located opposite to the third position along the curved interface,
- wherein the valve flap comprises a first radiation shielding comprising a layer stack of an insulation layer and a reflecting radiation layer, wherein the reflecting radiation layer faces the axis of rotation.
Dependencies are inferred from the claim text.