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US 12,181,014 B2Granted
Stationary vibration isolation system and control method thereof
AssigneeIntegrated Dynamics Engineering GmbH
InventorsCarsten Conrady, Han Hartgers, Björn Dollak
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Abstract
A stationary vibration isolation system including a plurality of isolators by way of which a load which is mounted in a vibration isolated manner is supported. The vibration isolation system includes a plurality of actuators by way of which vibrations of the load are actively countered. Each isolator respectively has its own separate control unit with a digital-analog converter for controlling the actuators.
Claims13
A stationary vibration isolation system, comprising:
- a plurality of isolators each including a base which is configured for being coupled with a floor, the plurality of isolators being configured for supporting a load which is mounted in a vibration isolated manner above the floor;
- a plurality of actuators configured for actively countering vibrations of the load through a generation of counter forces, the plurality of actuators being integrated into the plurality of isolators;
- a plurality of control units, an individual one of the plurality of control units being integrated respectively in each of the plurality of isolators, the individual one of the plurality of control units including a digital-analog converter coupled with the plurality of actuators of the respective one of the plurality of isolators;
- a plurality of sensors coupled with each of the control units, the plurality of sensors being configured for sensing vibrations of the load;
- and
- a bus system, the plurality of control units integrated respectively in the plurality of isolators being connected serially to the bus system.
3 more elements
Dependencies are inferred from the claim text.